6/15/2010	12:18:18 AM	Helium valve closed
6/15/2010	12:18:18 AM	BCl3 valve closed
6/15/2010	12:18:18 AM	Main Vac valve closed
6/15/2010	12:18:18 AM	Bypass valve closed
6/15/2010	12:18:18 AM	H2 valve opened
6/15/2010	12:18:18 AM	PH3 valve opened
6/15/2010	12:18:18 AM	SiCl4 pre valve opened
6/15/2010	12:18:18 AM	SiCl4 post valve opened
6/15/2010	12:18:18 AM	Bubbler valve opened
6/15/2010	12:18:18 AM	Helium MFC set to  0.000000
6/15/2010	12:18:18 AM	H2 MFC set to  500.000000
6/15/2010	12:18:18 AM	BCl3 MFC set to  0.000000
6/15/2010	12:18:18 AM	PHl3 MFC set to  1.000000
6/15/2010	12:18:18 AM	SiCl4 MFC set to  50.000000
6/15/2010	12:18:18 AM	Bypass solenoid MFC set to  0.000000
6/15/2010	12:18:18 AM	Tube furnace set to 1000
6/15/2010	12:43:18 AM	H2 valve closed
6/15/2010	12:43:18 AM	BCl3 valve closed
6/15/2010	12:43:18 AM	PH3 valve closed
6/15/2010	12:43:18 AM	SiCl4 pre valve closed
6/15/2010	12:43:18 AM	SiCl4 post valve closed
6/15/2010	12:43:18 AM	Main Vac valve closed
6/15/2010	12:43:18 AM	Bypass valve closed
6/15/2010	12:43:18 AM	Helium valve opened
6/15/2010	12:43:18 AM	Bubbler valve opened
6/15/2010	12:43:18 AM	Helium MFC set to  500.000000
6/15/2010	12:43:18 AM	H2 MFC set to  0.000000
6/15/2010	12:43:18 AM	BCl3 MFC set to  0.000000
6/15/2010	12:43:18 AM	PHl3 MFC set to  0.000000
6/15/2010	12:43:18 AM	SiCl4 MFC set to  0.000000
6/15/2010	12:43:18 AM	Bypass solenoid MFC set to  0.000000
6/15/2010	12:43:19 AM	Tube furnace set to 0
6/15/2010	1:05:45 AM	Run aborted at 1:05 AM
6/15/2010	1:05:45 AM	Helium valve closed
6/15/2010	1:05:45 AM	H2 valve closed
6/15/2010	1:05:45 AM	BCl3 valve closed
6/15/2010	1:05:45 AM	PH3 valve closed
6/15/2010	1:05:45 AM	SiCl4 pre valve closed
6/15/2010	1:05:45 AM	SiCl4 post valve closed
6/15/2010	1:05:45 AM	Bypass valve closed
6/15/2010	1:05:45 AM	Main Vac valve closed
6/15/2010	1:05:45 AM	Bubbler valve closed
6/15/2010	1:05:45 AM	Helium MFC set to  0.000000
6/15/2010	1:05:45 AM	H2 MFC set to  0.000000
6/15/2010	1:05:45 AM	BCl3 MFC set to  0.000000
6/15/2010	1:05:45 AM	PHl3 MFC set to  0.000000
6/15/2010	1:05:45 AM	SiCl4 MFC set to  0.000000
6/15/2010	1:05:45 AM	Tube furnace set to 0
6/15/2010	1:10:29 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/15/2010	1:10:29 AM	Recipe started at 1:10 AM
6/15/2010	1:10:29 AM	Helium valve closed
6/15/2010	1:10:29 AM	H2 valve closed
6/15/2010	1:10:29 AM	BCl3 valve closed
6/15/2010	1:10:29 AM	PH3 valve closed
6/15/2010	1:10:29 AM	SiCl4 pre valve closed
6/15/2010	1:10:29 AM	SiCl4 post valve closed
6/15/2010	1:10:29 AM	Main Vac valve closed
6/15/2010	1:10:29 AM	Bubbler valve closed
6/15/2010	1:10:29 AM	Bypass valve opened
6/15/2010	1:10:29 AM	Helium MFC set to  0.000000
6/15/2010	1:10:29 AM	H2 MFC set to  0.000000
6/15/2010	1:10:29 AM	BCl3 MFC set to  0.000000
6/15/2010	1:10:29 AM	PHl3 MFC set to  0.000000
6/15/2010	1:10:29 AM	SiCl4 MFC set to  0.000000
6/15/2010	1:10:29 AM	Bypass solenoid MFC set to  0.000000
6/15/2010	1:10:29 AM	Tube furnace set to 0
6/15/2010	1:11:18 AM	Helium valve closed
6/15/2010	1:11:18 AM	H2 valve closed
6/15/2010	1:11:18 AM	BCl3 valve closed
6/15/2010	1:11:18 AM	PH3 valve closed
6/15/2010	1:11:18 AM	SiCl4 pre valve closed
6/15/2010	1:11:18 AM	SiCl4 post valve closed
6/15/2010	1:11:18 AM	Bubbler valve closed
6/15/2010	1:11:18 AM	Main Vac valve opened
6/15/2010	1:11:18 AM	Bypass valve opened
6/15/2010	1:11:18 AM	Helium MFC set to  0.000000
6/15/2010	1:11:18 AM	H2 MFC set to  0.000000
6/15/2010	1:11:18 AM	BCl3 MFC set to  0.000000
6/15/2010	1:11:18 AM	PHl3 MFC set to  0.000000
6/15/2010	1:11:18 AM	SiCl4 MFC set to  0.000000
6/15/2010	1:11:18 AM	Bypass solenoid MFC set to  0.000000
6/15/2010	1:11:18 AM	Tube furnace set to 0
6/15/2010	1:11:18 AM	Run finished at 1:11 AM
6/15/2010	1:11:18 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/15/2010	1:11:59 AM	Helium MFC set to  75.000000
6/15/2010	1:12:00 AM	Helium valve opened
6/15/2010	1:21:11 AM	Helium valve closed
6/15/2010	1:22:34 AM	Helium valve opened
6/15/2010	1:40:21 AM	Helium valve closed
6/15/2010	1:41:25 AM	Recipe started at 1:41 AM
6/15/2010	1:41:25 AM	Helium valve closed
6/15/2010	1:41:25 AM	BCl3 valve closed
6/15/2010	1:41:25 AM	PH3 valve closed
6/15/2010	1:41:25 AM	SiCl4 pre valve closed
6/15/2010	1:41:25 AM	SiCl4 post valve closed
6/15/2010	1:41:25 AM	Main Vac valve closed
6/15/2010	1:41:25 AM	Bypass valve closed
6/15/2010	1:41:25 AM	Bubbler valve closed
6/15/2010	1:41:25 AM	H2 valve opened
6/15/2010	1:41:25 AM	Helium MFC set to  0.000000
6/15/2010	1:41:25 AM	H2 MFC set to  500.000000
6/15/2010	1:41:25 AM	BCl3 MFC set to  0.000000
6/15/2010	1:41:25 AM	PHl3 MFC set to  0.000000
6/15/2010	1:41:25 AM	SiCl4 MFC set to  0.000000
6/15/2010	1:41:25 AM	Bypass solenoid MFC set to  0.000000
6/15/2010	1:41:25 AM	Tube furnace set to 0
6/15/2010	1:42:43 AM	Helium valve closed
6/15/2010	1:42:43 AM	BCl3 valve closed
6/15/2010	1:42:43 AM	PH3 valve closed
6/15/2010	1:42:43 AM	SiCl4 pre valve closed
6/15/2010	1:42:43 AM	SiCl4 post valve closed
6/15/2010	1:42:43 AM	Main Vac valve closed
6/15/2010	1:42:43 AM	Bypass valve closed
6/15/2010	1:42:43 AM	H2 valve opened
6/15/2010	1:42:43 AM	Bubbler valve opened
6/15/2010	1:42:43 AM	Helium MFC set to  0.000000
6/15/2010	1:42:43 AM	H2 MFC set to  500.000000
6/15/2010	1:42:43 AM	BCl3 MFC set to  0.000000
6/15/2010	1:42:43 AM	PHl3 MFC set to  0.000000
6/15/2010	1:42:43 AM	SiCl4 MFC set to  0.000000
6/15/2010	1:42:43 AM	Bypass solenoid MFC set to  0.000000
6/15/2010	1:42:43 AM	Tube furnace set to 1000
6/15/2010	1:43:03 AM	Run aborted at 1:43 AM
6/15/2010	1:43:03 AM	Helium valve closed
6/15/2010	1:43:03 AM	H2 valve closed
6/15/2010	1:43:03 AM	BCl3 valve closed
6/15/2010	1:43:03 AM	PH3 valve closed
6/15/2010	1:43:03 AM	SiCl4 pre valve closed
6/15/2010	1:43:03 AM	SiCl4 post valve closed
6/15/2010	1:43:03 AM	Bypass valve closed
6/15/2010	1:43:03 AM	Main Vac valve closed
6/15/2010	1:43:03 AM	Bubbler valve closed
6/15/2010	1:43:03 AM	Helium MFC set to  0.000000
6/15/2010	1:43:03 AM	H2 MFC set to  0.000000
6/15/2010	1:43:03 AM	BCl3 MFC set to  0.000000
6/15/2010	1:43:03 AM	PHl3 MFC set to  0.000000
6/15/2010	1:43:03 AM	SiCl4 MFC set to  0.000000
6/15/2010	1:43:03 AM	Tube furnace set to 0
6/15/2010	1:43:05 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/15/2010	1:43:06 AM	Recipe started at 1:43 AM
6/15/2010	1:43:06 AM	Helium valve closed
6/15/2010	1:43:06 AM	H2 valve closed
6/15/2010	1:43:06 AM	BCl3 valve closed
6/15/2010	1:43:06 AM	PH3 valve closed
6/15/2010	1:43:06 AM	SiCl4 pre valve closed
6/15/2010	1:43:06 AM	SiCl4 post valve closed
6/15/2010	1:43:06 AM	Main Vac valve closed
6/15/2010	1:43:06 AM	Bubbler valve closed
6/15/2010	1:43:06 AM	Bypass valve opened
6/15/2010	1:43:06 AM	Helium MFC set to  0.000000
6/15/2010	1:43:06 AM	H2 MFC set to  0.000000
6/15/2010	1:43:06 AM	BCl3 MFC set to  0.000000
6/15/2010	1:43:06 AM	PHl3 MFC set to  0.000000
6/15/2010	1:43:06 AM	SiCl4 MFC set to  0.000000
6/15/2010	1:43:06 AM	Bypass solenoid MFC set to  0.000000
6/15/2010	1:43:06 AM	Tube furnace set to 0
6/15/2010	1:43:26 AM	Helium valve closed
6/15/2010	1:43:26 AM	H2 valve closed
6/15/2010	1:43:26 AM	BCl3 valve closed
6/15/2010	1:43:26 AM	PH3 valve closed
6/15/2010	1:43:26 AM	SiCl4 pre valve closed
6/15/2010	1:43:26 AM	SiCl4 post valve closed
6/15/2010	1:43:26 AM	Bubbler valve closed
6/15/2010	1:43:26 AM	Main Vac valve opened
6/15/2010	1:43:26 AM	Bypass valve opened
6/15/2010	1:43:26 AM	Helium MFC set to  0.000000
6/15/2010	1:43:26 AM	H2 MFC set to  0.000000
6/15/2010	1:43:26 AM	BCl3 MFC set to  0.000000
6/15/2010	1:43:26 AM	PHl3 MFC set to  0.000000
6/15/2010	1:43:26 AM	SiCl4 MFC set to  0.000000
6/15/2010	1:43:26 AM	Bypass solenoid MFC set to  0.000000
6/15/2010	1:43:26 AM	Tube furnace set to 0
6/15/2010	1:43:26 AM	Run finished at 1:43 AM
6/15/2010	1:43:26 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/15/2010	1:44:16 AM	Recipe started at 1:44 AM
6/15/2010	1:44:16 AM	Helium valve closed
6/15/2010	1:44:16 AM	BCl3 valve closed
6/15/2010	1:44:16 AM	PH3 valve closed
6/15/2010	1:44:16 AM	SiCl4 pre valve closed
6/15/2010	1:44:16 AM	SiCl4 post valve closed
6/15/2010	1:44:16 AM	Main Vac valve closed
6/15/2010	1:44:16 AM	Bypass valve closed
6/15/2010	1:44:16 AM	Bubbler valve closed
6/15/2010	1:44:16 AM	H2 valve opened
6/15/2010	1:44:16 AM	Helium MFC set to  0.000000
6/15/2010	1:44:16 AM	H2 MFC set to  500.000000
6/15/2010	1:44:16 AM	BCl3 MFC set to  0.000000
6/15/2010	1:44:16 AM	PHl3 MFC set to  0.000000
6/15/2010	1:44:16 AM	SiCl4 MFC set to  0.000000
6/15/2010	1:44:16 AM	Bypass solenoid MFC set to  0.000000
6/15/2010	1:44:16 AM	Tube furnace set to 0
6/15/2010	1:45:34 AM	Helium valve closed
6/15/2010	1:45:34 AM	BCl3 valve closed
6/15/2010	1:45:34 AM	PH3 valve closed
6/15/2010	1:45:34 AM	SiCl4 pre valve closed
6/15/2010	1:45:34 AM	SiCl4 post valve closed
6/15/2010	1:45:34 AM	Main Vac valve closed
6/15/2010	1:45:34 AM	Bypass valve closed
6/15/2010	1:45:34 AM	H2 valve opened
6/15/2010	1:45:34 AM	Bubbler valve opened
6/15/2010	1:45:34 AM	Helium MFC set to  0.000000
6/15/2010	1:45:34 AM	H2 MFC set to  500.000000
6/15/2010	1:45:34 AM	BCl3 MFC set to  0.000000
6/15/2010	1:45:34 AM	PHl3 MFC set to  0.000000
6/15/2010	1:45:34 AM	SiCl4 MFC set to  0.000000
6/15/2010	1:45:34 AM	Bypass solenoid MFC set to  0.000000
6/15/2010	1:45:34 AM	Tube furnace set to 1000
6/15/2010	2:05:34 AM	Helium valve closed
6/15/2010	2:05:34 AM	BCl3 valve closed
6/15/2010	2:05:34 AM	Main Vac valve closed
6/15/2010	2:05:34 AM	Bypass valve closed
6/15/2010	2:05:34 AM	H2 valve opened
6/15/2010	2:05:34 AM	PH3 valve opened
6/15/2010	2:05:34 AM	SiCl4 pre valve opened
6/15/2010	2:05:34 AM	SiCl4 post valve opened
6/15/2010	2:05:34 AM	Bubbler valve opened
6/15/2010	2:05:34 AM	Helium MFC set to  0.000000
6/15/2010	2:05:34 AM	H2 MFC set to  500.000000
6/15/2010	2:05:34 AM	BCl3 MFC set to  0.000000
6/15/2010	2:05:34 AM	PHl3 MFC set to  1.000000
6/15/2010	2:05:34 AM	SiCl4 MFC set to  50.000000
6/15/2010	2:05:34 AM	Bypass solenoid MFC set to  0.000000
6/15/2010	2:05:34 AM	Tube furnace set to 1000
6/15/2010	2:25:34 AM	H2 valve closed
6/15/2010	2:25:34 AM	BCl3 valve closed
6/15/2010	2:25:34 AM	PH3 valve closed
6/15/2010	2:25:34 AM	SiCl4 pre valve closed
6/15/2010	2:25:34 AM	SiCl4 post valve closed
6/15/2010	2:25:34 AM	Main Vac valve closed
6/15/2010	2:25:34 AM	Bypass valve closed
6/15/2010	2:25:34 AM	Helium valve opened
6/15/2010	2:25:34 AM	Bubbler valve opened
6/15/2010	2:25:34 AM	Helium MFC set to  500.000000
6/15/2010	2:25:34 AM	H2 MFC set to  0.000000
6/15/2010	2:25:34 AM	BCl3 MFC set to  0.000000
6/15/2010	2:25:34 AM	PHl3 MFC set to  0.000000
6/15/2010	2:25:34 AM	SiCl4 MFC set to  0.000000
6/15/2010	2:25:34 AM	Bypass solenoid MFC set to  0.000000
6/15/2010	2:25:34 AM	Tube furnace set to 0
6/15/2010	2:48:11 AM	Run aborted at 2:48 AM
6/15/2010	2:48:11 AM	Helium valve closed
6/15/2010	2:48:11 AM	H2 valve closed
6/15/2010	2:48:11 AM	BCl3 valve closed
6/15/2010	2:48:11 AM	PH3 valve closed
6/15/2010	2:48:11 AM	SiCl4 pre valve closed
6/15/2010	2:48:11 AM	SiCl4 post valve closed
6/15/2010	2:48:11 AM	Bypass valve closed
6/15/2010	2:48:11 AM	Main Vac valve closed
6/15/2010	2:48:11 AM	Bubbler valve closed
6/15/2010	2:48:11 AM	Helium MFC set to  0.000000
6/15/2010	2:48:11 AM	H2 MFC set to  0.000000
6/15/2010	2:48:11 AM	BCl3 MFC set to  0.000000
6/15/2010	2:48:11 AM	PHl3 MFC set to  0.000000
6/15/2010	2:48:11 AM	SiCl4 MFC set to  0.000000
6/15/2010	2:48:11 AM	Tube furnace set to 0
6/15/2010	2:55:36 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/15/2010	2:55:37 AM	Recipe started at 2:55 AM
6/15/2010	2:55:37 AM	Helium valve closed
6/15/2010	2:55:37 AM	H2 valve closed
6/15/2010	2:55:37 AM	BCl3 valve closed
6/15/2010	2:55:37 AM	PH3 valve closed
6/15/2010	2:55:37 AM	SiCl4 pre valve closed
6/15/2010	2:55:37 AM	SiCl4 post valve closed
6/15/2010	2:55:37 AM	Main Vac valve closed
6/15/2010	2:55:37 AM	Bubbler valve closed
6/15/2010	2:55:37 AM	Bypass valve opened
6/15/2010	2:55:37 AM	Helium MFC set to  0.000000
6/15/2010	2:55:37 AM	H2 MFC set to  0.000000
6/15/2010	2:55:37 AM	BCl3 MFC set to  0.000000
6/15/2010	2:55:37 AM	PHl3 MFC set to  0.000000
6/15/2010	2:55:37 AM	SiCl4 MFC set to  0.000000
6/15/2010	2:55:37 AM	Bypass solenoid MFC set to  0.000000
6/15/2010	2:55:37 AM	Tube furnace set to 0
6/15/2010	2:56:26 AM	Helium valve closed
6/15/2010	2:56:26 AM	H2 valve closed
6/15/2010	2:56:26 AM	BCl3 valve closed
6/15/2010	2:56:26 AM	PH3 valve closed
6/15/2010	2:56:26 AM	SiCl4 pre valve closed
6/15/2010	2:56:26 AM	SiCl4 post valve closed
6/15/2010	2:56:26 AM	Bubbler valve closed
6/15/2010	2:56:26 AM	Main Vac valve opened
6/15/2010	2:56:26 AM	Bypass valve opened
6/15/2010	2:56:26 AM	Helium MFC set to  0.000000
6/15/2010	2:56:26 AM	H2 MFC set to  0.000000
6/15/2010	2:56:26 AM	BCl3 MFC set to  0.000000
6/15/2010	2:56:26 AM	PHl3 MFC set to  0.000000
6/15/2010	2:56:26 AM	SiCl4 MFC set to  0.000000
6/15/2010	2:56:26 AM	Bypass solenoid MFC set to  0.000000
6/15/2010	2:56:26 AM	Tube furnace set to 0
6/15/2010	2:56:26 AM	Run finished at 2:56 AM
6/15/2010	2:56:26 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/15/2010	8:14:40 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/15/2010	8:14:40 AM	Recipe started at 8:14 AM
6/15/2010	8:14:40 AM	H2 valve closed
6/15/2010	8:14:40 AM	BCl3 valve closed
6/15/2010	8:14:40 AM	PH3 valve closed
6/15/2010	8:14:40 AM	SiCl4 pre valve closed
6/15/2010	8:14:40 AM	SiCl4 post valve closed
6/15/2010	8:14:40 AM	Main Vac valve closed
6/15/2010	8:14:40 AM	Bypass valve closed
6/15/2010	8:14:40 AM	Bubbler valve closed
6/15/2010	8:14:40 AM	Helium valve opened
6/15/2010	8:14:40 AM	Helium MFC set to  500.000000
6/15/2010	8:14:40 AM	H2 MFC set to  0.000000
6/15/2010	8:14:40 AM	BCl3 MFC set to  0.000000
6/15/2010	8:14:40 AM	PHl3 MFC set to  0.000000
6/15/2010	8:14:40 AM	SiCl4 MFC set to  0.000000
6/15/2010	8:14:40 AM	Bypass solenoid MFC set to  0.000000
6/15/2010	8:14:40 AM	Tube furnace set to 0
6/15/2010	8:16:00 AM	Helium valve closed
6/15/2010	8:16:00 AM	H2 valve closed
6/15/2010	8:16:00 AM	BCl3 valve closed
6/15/2010	8:16:00 AM	PH3 valve closed
6/15/2010	8:16:00 AM	SiCl4 pre valve closed
6/15/2010	8:16:00 AM	SiCl4 post valve closed
6/15/2010	8:16:00 AM	Main Vac valve closed
6/15/2010	8:16:00 AM	Bypass valve closed
6/15/2010	8:16:00 AM	Bubbler valve closed
6/15/2010	8:16:00 AM	Helium MFC set to  0.000000
6/15/2010	8:16:00 AM	H2 MFC set to  0.000000
6/15/2010	8:16:00 AM	BCl3 MFC set to  0.000000
6/15/2010	8:16:00 AM	PHl3 MFC set to  0.000000
6/15/2010	8:16:00 AM	SiCl4 MFC set to  0.000000
6/15/2010	8:16:00 AM	Bypass solenoid MFC set to  0.000000
6/15/2010	8:16:00 AM	Tube furnace set to 0
6/15/2010	8:16:00 AM	Run finished at 8:16 AM
6/15/2010	8:16:00 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/15/2010	8:26:11 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/15/2010	8:26:12 AM	Recipe started at 8:26 AM
6/15/2010	8:26:12 AM	Helium valve closed
6/15/2010	8:26:12 AM	H2 valve closed
6/15/2010	8:26:12 AM	BCl3 valve closed
6/15/2010	8:26:12 AM	PH3 valve closed
6/15/2010	8:26:12 AM	SiCl4 pre valve closed
6/15/2010	8:26:12 AM	SiCl4 post valve closed
6/15/2010	8:26:12 AM	Main Vac valve closed
6/15/2010	8:26:12 AM	Bubbler valve closed
6/15/2010	8:26:12 AM	Bypass valve opened
6/15/2010	8:26:12 AM	Helium MFC set to  0.000000
6/15/2010	8:26:12 AM	H2 MFC set to  0.000000
6/15/2010	8:26:12 AM	BCl3 MFC set to  0.000000
6/15/2010	8:26:12 AM	PHl3 MFC set to  0.000000
6/15/2010	8:26:12 AM	SiCl4 MFC set to  0.000000
6/15/2010	8:26:12 AM	Bypass solenoid MFC set to  0.000000
6/15/2010	8:26:12 AM	Tube furnace set to 0
6/15/2010	8:27:00 AM	Helium valve closed
6/15/2010	8:27:00 AM	H2 valve closed
6/15/2010	8:27:00 AM	BCl3 valve closed
6/15/2010	8:27:00 AM	PH3 valve closed
6/15/2010	8:27:00 AM	SiCl4 pre valve closed
6/15/2010	8:27:00 AM	SiCl4 post valve closed
6/15/2010	8:27:00 AM	Bubbler valve closed
6/15/2010	8:27:00 AM	Main Vac valve opened
6/15/2010	8:27:00 AM	Bypass valve opened
6/15/2010	8:27:00 AM	Helium MFC set to  0.000000
6/15/2010	8:27:00 AM	H2 MFC set to  0.000000
6/15/2010	8:27:00 AM	BCl3 MFC set to  0.000000
6/15/2010	8:27:00 AM	PHl3 MFC set to  0.000000
6/15/2010	8:27:00 AM	SiCl4 MFC set to  0.000000
6/15/2010	8:27:00 AM	Bypass solenoid MFC set to  0.000000
6/15/2010	8:27:00 AM	Tube furnace set to 0
6/15/2010	8:27:00 AM	Run finished at 8:27 AM
6/15/2010	8:27:00 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/15/2010	8:27:36 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
6/15/2010	8:27:41 AM	Recipe started at 8:27 AM
6/15/2010	8:27:41 AM	H2 valve closed
6/15/2010	8:27:41 AM	BCl3 valve closed
6/15/2010	8:27:41 AM	PH3 valve closed
6/15/2010	8:27:41 AM	SiCl4 pre valve closed
6/15/2010	8:27:41 AM	SiCl4 post valve closed
6/15/2010	8:27:41 AM	Main Vac valve closed
6/15/2010	8:27:41 AM	Bypass valve closed
6/15/2010	8:27:41 AM	Bubbler valve closed
6/15/2010	8:27:41 AM	Helium valve opened
6/15/2010	8:27:41 AM	Helium MFC set to  500.000000
6/15/2010	8:27:41 AM	H2 MFC set to  0.000000
6/15/2010	8:27:41 AM	BCl3 MFC set to  0.000000
6/15/2010	8:27:41 AM	PHl3 MFC set to  0.000000
6/15/2010	8:27:41 AM	SiCl4 MFC set to  0.000000
6/15/2010	8:27:41 AM	Bypass solenoid MFC set to  0.000000
6/15/2010	8:27:41 AM	Tube furnace set to 0
6/15/2010	8:29:03 AM	Helium valve closed
6/15/2010	8:29:03 AM	H2 valve closed
6/15/2010	8:29:03 AM	BCl3 valve closed
6/15/2010	8:29:03 AM	PH3 valve closed
6/15/2010	8:29:03 AM	SiCl4 pre valve closed
6/15/2010	8:29:03 AM	SiCl4 post valve closed
6/15/2010	8:29:03 AM	Main Vac valve closed
6/15/2010	8:29:03 AM	Bypass valve closed
6/15/2010	8:29:03 AM	Bubbler valve closed
6/15/2010	8:29:03 AM	Helium MFC set to  0.000000
6/15/2010	8:29:03 AM	H2 MFC set to  0.000000
6/15/2010	8:29:03 AM	BCl3 MFC set to  0.000000
6/15/2010	8:29:03 AM	PHl3 MFC set to  0.000000
6/15/2010	8:29:03 AM	SiCl4 MFC set to  0.000000
6/15/2010	8:29:03 AM	Bypass solenoid MFC set to  0.000000
6/15/2010	8:29:03 AM	Tube furnace set to 0
6/15/2010	8:29:18 AM	Helium valve closed
6/15/2010	8:29:18 AM	H2 valve closed
6/15/2010	8:29:18 AM	BCl3 valve closed
6/15/2010	8:29:18 AM	PH3 valve closed
6/15/2010	8:29:18 AM	SiCl4 pre valve closed
6/15/2010	8:29:18 AM	SiCl4 post valve closed
6/15/2010	8:29:18 AM	Main Vac valve closed
6/15/2010	8:29:18 AM	Bubbler valve closed
6/15/2010	8:29:18 AM	Bypass valve opened
6/15/2010	8:29:18 AM	Helium MFC set to  0.000000
6/15/2010	8:29:18 AM	H2 MFC set to  0.000000
6/15/2010	8:29:18 AM	BCl3 MFC set to  0.000000
6/15/2010	8:29:18 AM	PHl3 MFC set to  0.000000
6/15/2010	8:29:18 AM	SiCl4 MFC set to  0.000000
6/15/2010	8:29:18 AM	Bypass solenoid MFC set to  0.000000
6/15/2010	8:29:18 AM	Tube furnace set to 0
6/15/2010	8:29:52 AM	Helium valve closed
6/15/2010	8:29:52 AM	H2 valve closed
6/15/2010	8:29:52 AM	BCl3 valve closed
6/15/2010	8:29:52 AM	PH3 valve closed
6/15/2010	8:29:52 AM	SiCl4 pre valve closed
6/15/2010	8:29:52 AM	SiCl4 post valve closed
6/15/2010	8:29:52 AM	Bubbler valve closed
6/15/2010	8:29:52 AM	Main Vac valve opened
6/15/2010	8:29:52 AM	Bypass valve opened
6/15/2010	8:29:52 AM	Helium MFC set to  0.000000
6/15/2010	8:29:52 AM	H2 MFC set to  0.000000
6/15/2010	8:29:52 AM	BCl3 MFC set to  0.000000
6/15/2010	8:29:52 AM	PHl3 MFC set to  0.000000
6/15/2010	8:29:52 AM	SiCl4 MFC set to  0.000000
6/15/2010	8:29:52 AM	Bypass solenoid MFC set to  0.000000
6/15/2010	8:29:52 AM	Tube furnace set to 0
6/15/2010	8:34:52 AM	H2 valve closed
6/15/2010	8:34:52 AM	BCl3 valve closed
6/15/2010	8:34:52 AM	PH3 valve closed
6/15/2010	8:34:52 AM	SiCl4 pre valve closed
6/15/2010	8:34:52 AM	SiCl4 post valve closed
6/15/2010	8:34:52 AM	Main Vac valve closed
6/15/2010	8:34:52 AM	Bypass valve closed
6/15/2010	8:34:52 AM	Bubbler valve closed
6/15/2010	8:34:52 AM	Helium valve opened
6/15/2010	8:34:52 AM	Helium MFC set to  500.000000
6/15/2010	8:34:52 AM	H2 MFC set to  0.000000
6/15/2010	8:34:52 AM	BCl3 MFC set to  0.000000
6/15/2010	8:34:52 AM	PHl3 MFC set to  0.000000
6/15/2010	8:34:52 AM	SiCl4 MFC set to  0.000000
6/15/2010	8:34:52 AM	Bypass solenoid MFC set to  0.000000
6/15/2010	8:34:53 AM	Tube furnace set to 0
6/15/2010	8:36:14 AM	Helium valve closed
6/15/2010	8:36:14 AM	H2 valve closed
6/15/2010	8:36:14 AM	BCl3 valve closed
6/15/2010	8:36:14 AM	PH3 valve closed
6/15/2010	8:36:14 AM	SiCl4 pre valve closed
6/15/2010	8:36:14 AM	SiCl4 post valve closed
6/15/2010	8:36:14 AM	Main Vac valve closed
6/15/2010	8:36:14 AM	Bypass valve closed
6/15/2010	8:36:14 AM	Bubbler valve closed
6/15/2010	8:36:14 AM	Helium MFC set to  0.000000
6/15/2010	8:36:14 AM	H2 MFC set to  0.000000
6/15/2010	8:36:14 AM	BCl3 MFC set to  0.000000
6/15/2010	8:36:14 AM	PHl3 MFC set to  0.000000
6/15/2010	8:36:14 AM	SiCl4 MFC set to  0.000000
6/15/2010	8:36:14 AM	Bypass solenoid MFC set to  0.000000
6/15/2010	8:36:14 AM	Tube furnace set to 0
6/15/2010	8:36:29 AM	Helium valve closed
6/15/2010	8:36:29 AM	H2 valve closed
6/15/2010	8:36:29 AM	BCl3 valve closed
6/15/2010	8:36:29 AM	PH3 valve closed
6/15/2010	8:36:29 AM	SiCl4 pre valve closed
6/15/2010	8:36:29 AM	SiCl4 post valve closed
6/15/2010	8:36:29 AM	Main Vac valve closed
6/15/2010	8:36:29 AM	Bubbler valve closed
6/15/2010	8:36:29 AM	Bypass valve opened
6/15/2010	8:36:29 AM	Helium MFC set to  0.000000
6/15/2010	8:36:29 AM	H2 MFC set to  0.000000
6/15/2010	8:36:29 AM	BCl3 MFC set to  0.000000
6/15/2010	8:36:29 AM	PHl3 MFC set to  0.000000
6/15/2010	8:36:29 AM	SiCl4 MFC set to  0.000000
6/15/2010	8:36:29 AM	Bypass solenoid MFC set to  0.000000
6/15/2010	8:36:29 AM	Tube furnace set to 0
6/15/2010	8:37:03 AM	Helium valve closed
6/15/2010	8:37:03 AM	H2 valve closed
6/15/2010	8:37:03 AM	BCl3 valve closed
6/15/2010	8:37:03 AM	PH3 valve closed
6/15/2010	8:37:03 AM	SiCl4 pre valve closed
6/15/2010	8:37:03 AM	SiCl4 post valve closed
6/15/2010	8:37:03 AM	Bubbler valve closed
6/15/2010	8:37:03 AM	Main Vac valve opened
6/15/2010	8:37:03 AM	Bypass valve opened
6/15/2010	8:37:03 AM	Helium MFC set to  0.000000
6/15/2010	8:37:03 AM	H2 MFC set to  0.000000
6/15/2010	8:37:03 AM	BCl3 MFC set to  0.000000
6/15/2010	8:37:03 AM	PHl3 MFC set to  0.000000
6/15/2010	8:37:03 AM	SiCl4 MFC set to  0.000000
6/15/2010	8:37:03 AM	Bypass solenoid MFC set to  0.000000
6/15/2010	8:37:03 AM	Tube furnace set to 0
6/15/2010	8:42:03 AM	H2 valve closed
6/15/2010	8:42:03 AM	BCl3 valve closed
6/15/2010	8:42:03 AM	PH3 valve closed
6/15/2010	8:42:03 AM	SiCl4 pre valve closed
6/15/2010	8:42:03 AM	SiCl4 post valve closed
6/15/2010	8:42:03 AM	Main Vac valve closed
6/15/2010	8:42:03 AM	Bypass valve closed
6/15/2010	8:42:03 AM	Bubbler valve closed
6/15/2010	8:42:03 AM	Helium valve opened
6/15/2010	8:42:03 AM	Helium MFC set to  500.000000
6/15/2010	8:42:03 AM	H2 MFC set to  0.000000
6/15/2010	8:42:03 AM	BCl3 MFC set to  0.000000
6/15/2010	8:42:03 AM	PHl3 MFC set to  0.000000
6/15/2010	8:42:03 AM	SiCl4 MFC set to  0.000000
6/15/2010	8:42:03 AM	Bypass solenoid MFC set to  0.000000
6/15/2010	8:42:04 AM	Tube furnace set to 0
6/15/2010	8:43:25 AM	Helium valve closed
6/15/2010	8:43:25 AM	H2 valve closed
6/15/2010	8:43:25 AM	BCl3 valve closed
6/15/2010	8:43:25 AM	PH3 valve closed
6/15/2010	8:43:25 AM	SiCl4 pre valve closed
6/15/2010	8:43:25 AM	SiCl4 post valve closed
6/15/2010	8:43:25 AM	Main Vac valve closed
6/15/2010	8:43:25 AM	Bypass valve closed
6/15/2010	8:43:25 AM	Bubbler valve closed
6/15/2010	8:43:25 AM	Helium MFC set to  0.000000
6/15/2010	8:43:25 AM	H2 MFC set to  0.000000
6/15/2010	8:43:25 AM	BCl3 MFC set to  0.000000
6/15/2010	8:43:25 AM	PHl3 MFC set to  0.000000
6/15/2010	8:43:25 AM	SiCl4 MFC set to  0.000000
6/15/2010	8:43:25 AM	Bypass solenoid MFC set to  0.000000
6/15/2010	8:43:25 AM	Tube furnace set to 0
6/15/2010	8:43:40 AM	Helium valve closed
6/15/2010	8:43:40 AM	H2 valve closed
6/15/2010	8:43:40 AM	BCl3 valve closed
6/15/2010	8:43:40 AM	PH3 valve closed
6/15/2010	8:43:40 AM	SiCl4 pre valve closed
6/15/2010	8:43:40 AM	SiCl4 post valve closed
6/15/2010	8:43:40 AM	Main Vac valve closed
6/15/2010	8:43:40 AM	Bubbler valve closed
6/15/2010	8:43:40 AM	Bypass valve opened
6/15/2010	8:43:40 AM	Helium MFC set to  0.000000
6/15/2010	8:43:40 AM	H2 MFC set to  0.000000
6/15/2010	8:43:40 AM	BCl3 MFC set to  0.000000
6/15/2010	8:43:40 AM	PHl3 MFC set to  0.000000
6/15/2010	8:43:40 AM	SiCl4 MFC set to  0.000000
6/15/2010	8:43:40 AM	Bypass solenoid MFC set to  0.000000
6/15/2010	8:43:40 AM	Tube furnace set to 0
6/15/2010	8:44:14 AM	Helium valve closed
6/15/2010	8:44:14 AM	H2 valve closed
6/15/2010	8:44:14 AM	BCl3 valve closed
6/15/2010	8:44:14 AM	PH3 valve closed
6/15/2010	8:44:14 AM	SiCl4 pre valve closed
6/15/2010	8:44:14 AM	SiCl4 post valve closed
6/15/2010	8:44:14 AM	Bubbler valve closed
6/15/2010	8:44:14 AM	Main Vac valve opened
6/15/2010	8:44:14 AM	Bypass valve opened
6/15/2010	8:44:14 AM	Helium MFC set to  0.000000
6/15/2010	8:44:14 AM	H2 MFC set to  0.000000
6/15/2010	8:44:14 AM	BCl3 MFC set to  0.000000
6/15/2010	8:44:14 AM	PHl3 MFC set to  0.000000
6/15/2010	8:44:14 AM	SiCl4 MFC set to  0.000000
6/15/2010	8:44:14 AM	Bypass solenoid MFC set to  0.000000
6/15/2010	8:44:14 AM	Tube furnace set to 0
6/15/2010	8:49:14 AM	Helium valve closed
6/15/2010	8:49:14 AM	H2 valve closed
6/15/2010	8:49:14 AM	BCl3 valve closed
6/15/2010	8:49:14 AM	PH3 valve closed
6/15/2010	8:49:14 AM	SiCl4 pre valve closed
6/15/2010	8:49:14 AM	SiCl4 post valve closed
6/15/2010	8:49:14 AM	Bubbler valve closed
6/15/2010	8:49:14 AM	Main Vac valve opened
6/15/2010	8:49:14 AM	Bypass valve opened
6/15/2010	8:49:14 AM	Helium MFC set to  0.000000
6/15/2010	8:49:14 AM	H2 MFC set to  0.000000
6/15/2010	8:49:14 AM	BCl3 MFC set to  0.000000
6/15/2010	8:49:14 AM	PHl3 MFC set to  0.000000
6/15/2010	8:49:14 AM	SiCl4 MFC set to  0.000000
6/15/2010	8:49:14 AM	Bypass solenoid MFC set to  0.000000
6/15/2010	8:49:15 AM	Tube furnace set to 0
6/15/2010	8:49:16 AM	Run finished at 8:49 AM
6/15/2010	8:49:16 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
6/15/2010	8:51:31 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
6/15/2010	8:51:31 AM	Recipe started at 8:51 AM
6/15/2010	8:51:31 AM	Helium valve closed
6/15/2010	8:51:31 AM	H2 valve closed
6/15/2010	8:51:31 AM	BCl3 valve closed
6/15/2010	8:51:31 AM	PH3 valve closed
6/15/2010	8:51:31 AM	SiCl4 pre valve closed
6/15/2010	8:51:31 AM	SiCl4 post valve closed
6/15/2010	8:51:31 AM	Main Vac valve closed
6/15/2010	8:51:31 AM	Bypass valve closed
6/15/2010	8:51:31 AM	Bubbler valve closed
6/15/2010	8:51:31 AM	Helium MFC set to  0.000000
6/15/2010	8:51:31 AM	H2 MFC set to  0.000000
6/15/2010	8:51:31 AM	BCl3 MFC set to  0.000000
6/15/2010	8:51:31 AM	PHl3 MFC set to  0.000000
6/15/2010	8:51:31 AM	SiCl4 MFC set to  0.000000
6/15/2010	8:51:31 AM	Bypass solenoid MFC set to  0.000000
6/15/2010	8:51:31 AM	Tube furnace set to 0
6/15/2010	8:51:32 AM	Run finished at 8:51 AM
6/15/2010	8:51:32 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
6/15/2010	8:51:42 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
6/15/2010	8:51:48 AM	Recipe started at 8:51 AM
6/15/2010	8:51:48 AM	H2 valve closed
6/15/2010	8:51:48 AM	BCl3 valve closed
6/15/2010	8:51:48 AM	PH3 valve closed
6/15/2010	8:51:48 AM	SiCl4 pre valve closed
6/15/2010	8:51:48 AM	SiCl4 post valve closed
6/15/2010	8:51:48 AM	Main Vac valve closed
6/15/2010	8:51:48 AM	Bypass valve closed
6/15/2010	8:51:48 AM	Bubbler valve closed
6/15/2010	8:51:48 AM	Helium valve opened
6/15/2010	8:51:48 AM	Helium MFC set to  500.000000
6/15/2010	8:51:48 AM	H2 MFC set to  0.000000
6/15/2010	8:51:48 AM	BCl3 MFC set to  0.000000
6/15/2010	8:51:48 AM	PHl3 MFC set to  0.000000
6/15/2010	8:51:48 AM	SiCl4 MFC set to  0.000000
6/15/2010	8:51:48 AM	Bypass solenoid MFC set to  0.000000
6/15/2010	8:51:48 AM	Tube furnace set to 0
6/15/2010	8:53:09 AM	Helium valve closed
6/15/2010	8:53:09 AM	H2 valve closed
6/15/2010	8:53:09 AM	BCl3 valve closed
6/15/2010	8:53:09 AM	PH3 valve closed
6/15/2010	8:53:09 AM	SiCl4 pre valve closed
6/15/2010	8:53:09 AM	SiCl4 post valve closed
6/15/2010	8:53:09 AM	Main Vac valve closed
6/15/2010	8:53:09 AM	Bypass valve closed
6/15/2010	8:53:09 AM	Bubbler valve closed
6/15/2010	8:53:09 AM	Helium MFC set to  0.000000
6/15/2010	8:53:09 AM	H2 MFC set to  0.000000
6/15/2010	8:53:09 AM	BCl3 MFC set to  0.000000
6/15/2010	8:53:09 AM	PHl3 MFC set to  0.000000
6/15/2010	8:53:09 AM	SiCl4 MFC set to  0.000000
6/15/2010	8:53:09 AM	Bypass solenoid MFC set to  0.000000
6/15/2010	8:53:10 AM	Tube furnace set to 0
6/15/2010	8:53:25 AM	Helium valve closed
6/15/2010	8:53:25 AM	H2 valve closed
6/15/2010	8:53:25 AM	BCl3 valve closed
6/15/2010	8:53:25 AM	PH3 valve closed
6/15/2010	8:53:25 AM	SiCl4 pre valve closed
6/15/2010	8:53:25 AM	SiCl4 post valve closed
6/15/2010	8:53:25 AM	Main Vac valve closed
6/15/2010	8:53:25 AM	Bubbler valve closed
6/15/2010	8:53:25 AM	Bypass valve opened
6/15/2010	8:53:25 AM	Helium MFC set to  0.000000
6/15/2010	8:53:25 AM	H2 MFC set to  0.000000
6/15/2010	8:53:25 AM	BCl3 MFC set to  0.000000
6/15/2010	8:53:25 AM	PHl3 MFC set to  0.000000
6/15/2010	8:53:25 AM	SiCl4 MFC set to  0.000000
6/15/2010	8:53:25 AM	Bypass solenoid MFC set to  0.000000
6/15/2010	8:53:25 AM	Tube furnace set to 0
6/15/2010	8:53:58 AM	Helium valve closed
6/15/2010	8:53:59 AM	H2 valve closed
6/15/2010	8:53:59 AM	BCl3 valve closed
6/15/2010	8:53:59 AM	PH3 valve closed
6/15/2010	8:53:59 AM	SiCl4 pre valve closed
6/15/2010	8:53:59 AM	SiCl4 post valve closed
6/15/2010	8:53:59 AM	Bubbler valve closed
6/15/2010	8:53:59 AM	Main Vac valve opened
6/15/2010	8:53:59 AM	Bypass valve opened
6/15/2010	8:53:59 AM	Helium MFC set to  0.000000
6/15/2010	8:53:59 AM	H2 MFC set to  0.000000
6/15/2010	8:53:59 AM	BCl3 MFC set to  0.000000
6/15/2010	8:53:59 AM	PHl3 MFC set to  0.000000
6/15/2010	8:53:59 AM	SiCl4 MFC set to  0.000000
6/15/2010	8:53:59 AM	Bypass solenoid MFC set to  0.000000
6/15/2010	8:53:59 AM	Tube furnace set to 0
6/15/2010	8:58:59 AM	H2 valve closed
6/15/2010	8:58:59 AM	BCl3 valve closed
6/15/2010	8:58:59 AM	PH3 valve closed
6/15/2010	8:58:59 AM	SiCl4 pre valve closed
6/15/2010	8:58:59 AM	SiCl4 post valve closed
6/15/2010	8:58:59 AM	Main Vac valve closed
6/15/2010	8:58:59 AM	Bypass valve closed
6/15/2010	8:58:59 AM	Bubbler valve closed
6/15/2010	8:58:59 AM	Helium valve opened
6/15/2010	8:58:59 AM	Helium MFC set to  500.000000
6/15/2010	8:58:59 AM	H2 MFC set to  0.000000
6/15/2010	8:58:59 AM	BCl3 MFC set to  0.000000
6/15/2010	8:58:59 AM	PHl3 MFC set to  0.000000
6/15/2010	8:58:59 AM	SiCl4 MFC set to  0.000000
6/15/2010	8:58:59 AM	Bypass solenoid MFC set to  0.000000
6/15/2010	8:58:59 AM	Tube furnace set to 0
6/15/2010	9:00:20 AM	Helium valve closed
6/15/2010	9:00:20 AM	H2 valve closed
6/15/2010	9:00:20 AM	BCl3 valve closed
6/15/2010	9:00:20 AM	PH3 valve closed
6/15/2010	9:00:20 AM	SiCl4 pre valve closed
6/15/2010	9:00:20 AM	SiCl4 post valve closed
6/15/2010	9:00:20 AM	Main Vac valve closed
6/15/2010	9:00:20 AM	Bypass valve closed
6/15/2010	9:00:20 AM	Bubbler valve closed
6/15/2010	9:00:20 AM	Helium MFC set to  0.000000
6/15/2010	9:00:20 AM	H2 MFC set to  0.000000
6/15/2010	9:00:20 AM	BCl3 MFC set to  0.000000
6/15/2010	9:00:20 AM	PHl3 MFC set to  0.000000
6/15/2010	9:00:20 AM	SiCl4 MFC set to  0.000000
6/15/2010	9:00:20 AM	Bypass solenoid MFC set to  0.000000
6/15/2010	9:00:21 AM	Tube furnace set to 0
6/15/2010	9:00:36 AM	Helium valve closed
6/15/2010	9:00:36 AM	H2 valve closed
6/15/2010	9:00:36 AM	BCl3 valve closed
6/15/2010	9:00:36 AM	PH3 valve closed
6/15/2010	9:00:36 AM	SiCl4 pre valve closed
6/15/2010	9:00:36 AM	SiCl4 post valve closed
6/15/2010	9:00:36 AM	Main Vac valve closed
6/15/2010	9:00:36 AM	Bubbler valve closed
6/15/2010	9:00:36 AM	Bypass valve opened
6/15/2010	9:00:36 AM	Helium MFC set to  0.000000
6/15/2010	9:00:36 AM	H2 MFC set to  0.000000
6/15/2010	9:00:36 AM	BCl3 MFC set to  0.000000
6/15/2010	9:00:36 AM	PHl3 MFC set to  0.000000
6/15/2010	9:00:36 AM	SiCl4 MFC set to  0.000000
6/15/2010	9:00:36 AM	Bypass solenoid MFC set to  0.000000
6/15/2010	9:00:36 AM	Tube furnace set to 0
6/15/2010	9:01:10 AM	Helium valve closed
6/15/2010	9:01:10 AM	H2 valve closed
6/15/2010	9:01:10 AM	BCl3 valve closed
6/15/2010	9:01:10 AM	PH3 valve closed
6/15/2010	9:01:10 AM	SiCl4 pre valve closed
6/15/2010	9:01:10 AM	SiCl4 post valve closed
6/15/2010	9:01:10 AM	Bubbler valve closed
6/15/2010	9:01:10 AM	Main Vac valve opened
6/15/2010	9:01:10 AM	Bypass valve opened
6/15/2010	9:01:10 AM	Helium MFC set to  0.000000
6/15/2010	9:01:10 AM	H2 MFC set to  0.000000
6/15/2010	9:01:10 AM	BCl3 MFC set to  0.000000
6/15/2010	9:01:10 AM	PHl3 MFC set to  0.000000
6/15/2010	9:01:10 AM	SiCl4 MFC set to  0.000000
6/15/2010	9:01:10 AM	Bypass solenoid MFC set to  0.000000
6/15/2010	9:01:10 AM	Tube furnace set to 0
6/15/2010	9:06:10 AM	H2 valve closed
6/15/2010	9:06:10 AM	BCl3 valve closed
6/15/2010	9:06:10 AM	PH3 valve closed
6/15/2010	9:06:10 AM	SiCl4 pre valve closed
6/15/2010	9:06:10 AM	SiCl4 post valve closed
6/15/2010	9:06:10 AM	Main Vac valve closed
6/15/2010	9:06:10 AM	Bypass valve closed
6/15/2010	9:06:10 AM	Bubbler valve closed
6/15/2010	9:06:10 AM	Helium valve opened
6/15/2010	9:06:10 AM	Helium MFC set to  500.000000
6/15/2010	9:06:10 AM	H2 MFC set to  0.000000
6/15/2010	9:06:10 AM	BCl3 MFC set to  0.000000
6/15/2010	9:06:10 AM	PHl3 MFC set to  0.000000
6/15/2010	9:06:10 AM	SiCl4 MFC set to  0.000000
6/15/2010	9:06:10 AM	Bypass solenoid MFC set to  0.000000
6/15/2010	9:06:10 AM	Tube furnace set to 0
6/15/2010	9:07:32 AM	Helium valve closed
6/15/2010	9:07:32 AM	H2 valve closed
6/15/2010	9:07:32 AM	BCl3 valve closed
6/15/2010	9:07:32 AM	PH3 valve closed
6/15/2010	9:07:32 AM	SiCl4 pre valve closed
6/15/2010	9:07:32 AM	SiCl4 post valve closed
6/15/2010	9:07:32 AM	Main Vac valve closed
6/15/2010	9:07:32 AM	Bypass valve closed
6/15/2010	9:07:32 AM	Bubbler valve closed
6/15/2010	9:07:32 AM	Helium MFC set to  0.000000
6/15/2010	9:07:32 AM	H2 MFC set to  0.000000
6/15/2010	9:07:32 AM	BCl3 MFC set to  0.000000
6/15/2010	9:07:32 AM	PHl3 MFC set to  0.000000
6/15/2010	9:07:32 AM	SiCl4 MFC set to  0.000000
6/15/2010	9:07:32 AM	Bypass solenoid MFC set to  0.000000
6/15/2010	9:07:32 AM	Tube furnace set to 0
6/15/2010	9:07:47 AM	Helium valve closed
6/15/2010	9:07:47 AM	H2 valve closed
6/15/2010	9:07:47 AM	BCl3 valve closed
6/15/2010	9:07:47 AM	PH3 valve closed
6/15/2010	9:07:47 AM	SiCl4 pre valve closed
6/15/2010	9:07:47 AM	SiCl4 post valve closed
6/15/2010	9:07:47 AM	Main Vac valve closed
6/15/2010	9:07:47 AM	Bubbler valve closed
6/15/2010	9:07:47 AM	Bypass valve opened
6/15/2010	9:07:47 AM	Helium MFC set to  0.000000
6/15/2010	9:07:47 AM	H2 MFC set to  0.000000
6/15/2010	9:07:47 AM	BCl3 MFC set to  0.000000
6/15/2010	9:07:47 AM	PHl3 MFC set to  0.000000
6/15/2010	9:07:47 AM	SiCl4 MFC set to  0.000000
6/15/2010	9:07:47 AM	Bypass solenoid MFC set to  0.000000
6/15/2010	9:07:47 AM	Tube furnace set to 0
6/15/2010	9:08:21 AM	Helium valve closed
6/15/2010	9:08:21 AM	H2 valve closed
6/15/2010	9:08:21 AM	BCl3 valve closed
6/15/2010	9:08:21 AM	PH3 valve closed
6/15/2010	9:08:21 AM	SiCl4 pre valve closed
6/15/2010	9:08:21 AM	SiCl4 post valve closed
6/15/2010	9:08:21 AM	Bubbler valve closed
6/15/2010	9:08:21 AM	Main Vac valve opened
6/15/2010	9:08:21 AM	Bypass valve opened
6/15/2010	9:08:21 AM	Helium MFC set to  0.000000
6/15/2010	9:08:21 AM	H2 MFC set to  0.000000
6/15/2010	9:08:21 AM	BCl3 MFC set to  0.000000
6/15/2010	9:08:21 AM	PHl3 MFC set to  0.000000
6/15/2010	9:08:21 AM	SiCl4 MFC set to  0.000000
6/15/2010	9:08:21 AM	Bypass solenoid MFC set to  0.000000
6/15/2010	9:08:21 AM	Tube furnace set to 0
6/15/2010	9:13:21 AM	Helium valve closed
6/15/2010	9:13:21 AM	H2 valve closed
6/15/2010	9:13:21 AM	BCl3 valve closed
6/15/2010	9:13:21 AM	PH3 valve closed
6/15/2010	9:13:21 AM	SiCl4 pre valve closed
6/15/2010	9:13:21 AM	SiCl4 post valve closed
6/15/2010	9:13:21 AM	Bubbler valve closed
6/15/2010	9:13:21 AM	Main Vac valve opened
6/15/2010	9:13:21 AM	Bypass valve opened
6/15/2010	9:13:21 AM	Helium MFC set to  0.000000
6/15/2010	9:13:21 AM	H2 MFC set to  0.000000
6/15/2010	9:13:21 AM	BCl3 MFC set to  0.000000
6/15/2010	9:13:21 AM	PHl3 MFC set to  0.000000
6/15/2010	9:13:21 AM	SiCl4 MFC set to  0.000000
6/15/2010	9:13:21 AM	Bypass solenoid MFC set to  0.000000
6/15/2010	9:13:21 AM	Tube furnace set to 0
6/15/2010	9:13:22 AM	Run finished at 9:13 AM
6/15/2010	9:13:22 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
6/15/2010	10:06:08 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
6/15/2010	10:06:08 AM	Recipe started at 10:06 AM
6/15/2010	10:06:08 AM	Helium valve closed
6/15/2010	10:06:08 AM	H2 valve closed
6/15/2010	10:06:08 AM	BCl3 valve closed
6/15/2010	10:06:08 AM	PH3 valve closed
6/15/2010	10:06:08 AM	SiCl4 pre valve closed
6/15/2010	10:06:08 AM	SiCl4 post valve closed
6/15/2010	10:06:08 AM	Main Vac valve closed
6/15/2010	10:06:08 AM	Bypass valve closed
6/15/2010	10:06:08 AM	Bubbler valve closed
6/15/2010	10:06:08 AM	Helium MFC set to  0.000000
6/15/2010	10:06:08 AM	H2 MFC set to  0.000000
6/15/2010	10:06:08 AM	BCl3 MFC set to  0.000000
6/15/2010	10:06:08 AM	PHl3 MFC set to  0.000000
6/15/2010	10:06:08 AM	SiCl4 MFC set to  0.000000
6/15/2010	10:06:08 AM	Bypass solenoid MFC set to  0.000000
6/15/2010	10:06:08 AM	Tube furnace set to 0
6/15/2010	10:06:08 AM	Run finished at 10:06 AM
6/15/2010	10:06:08 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
6/15/2010	10:06:29 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/15/2010	10:06:30 AM	Recipe started at 10:06 AM
6/15/2010	10:06:30 AM	Helium valve closed
6/15/2010	10:06:30 AM	H2 valve closed
6/15/2010	10:06:30 AM	BCl3 valve closed
6/15/2010	10:06:30 AM	PH3 valve closed
6/15/2010	10:06:30 AM	SiCl4 pre valve closed
6/15/2010	10:06:30 AM	SiCl4 post valve closed
6/15/2010	10:06:30 AM	Main Vac valve closed
6/15/2010	10:06:30 AM	Bubbler valve closed
6/15/2010	10:06:30 AM	Bypass valve opened
6/15/2010	10:06:30 AM	Helium MFC set to  0.000000
6/15/2010	10:06:30 AM	H2 MFC set to  0.000000
6/15/2010	10:06:30 AM	BCl3 MFC set to  0.000000
6/15/2010	10:06:30 AM	PHl3 MFC set to  0.000000
6/15/2010	10:06:30 AM	SiCl4 MFC set to  0.000000
6/15/2010	10:06:30 AM	Bypass solenoid MFC set to  0.000000
6/15/2010	10:06:30 AM	Tube furnace set to 0
6/15/2010	10:06:30 AM	Helium valve closed
6/15/2010	10:06:30 AM	H2 valve closed
6/15/2010	10:06:30 AM	BCl3 valve closed
6/15/2010	10:06:30 AM	PH3 valve closed
6/15/2010	10:06:30 AM	SiCl4 pre valve closed
6/15/2010	10:06:30 AM	SiCl4 post valve closed
6/15/2010	10:06:30 AM	Bubbler valve closed
6/15/2010	10:06:30 AM	Main Vac valve opened
6/15/2010	10:06:30 AM	Bypass valve opened
6/15/2010	10:06:30 AM	Helium MFC set to  0.000000
6/15/2010	10:06:30 AM	H2 MFC set to  0.000000
6/15/2010	10:06:30 AM	BCl3 MFC set to  0.000000
6/15/2010	10:06:30 AM	PHl3 MFC set to  0.000000
6/15/2010	10:06:30 AM	SiCl4 MFC set to  0.000000
6/15/2010	10:06:30 AM	Bypass solenoid MFC set to  0.000000
6/15/2010	10:06:31 AM	Tube furnace set to 0
6/15/2010	10:06:31 AM	Run finished at 10:06 AM
6/15/2010	10:06:31 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/15/2010	10:07:17 AM	Recipe started at 10:07 AM
6/15/2010	10:07:17 AM	Helium valve closed
6/15/2010	10:07:17 AM	BCl3 valve closed
6/15/2010	10:07:17 AM	PH3 valve closed
6/15/2010	10:07:17 AM	SiCl4 pre valve closed
6/15/2010	10:07:17 AM	SiCl4 post valve closed
6/15/2010	10:07:17 AM	Main Vac valve closed
6/15/2010	10:07:17 AM	Bypass valve closed
6/15/2010	10:07:17 AM	Bubbler valve closed
6/15/2010	10:07:17 AM	H2 valve opened
6/15/2010	10:07:17 AM	Helium MFC set to  0.000000
6/15/2010	10:07:17 AM	H2 MFC set to  500.000000
6/15/2010	10:07:17 AM	BCl3 MFC set to  0.000000
6/15/2010	10:07:17 AM	PHl3 MFC set to  0.000000
6/15/2010	10:07:17 AM	SiCl4 MFC set to  0.000000
6/15/2010	10:07:17 AM	Bypass solenoid MFC set to  0.000000
6/15/2010	10:07:17 AM	Tube furnace set to 0
6/15/2010	10:08:39 AM	Helium valve closed
6/15/2010	10:08:39 AM	BCl3 valve closed
6/15/2010	10:08:39 AM	PH3 valve closed
6/15/2010	10:08:39 AM	SiCl4 pre valve closed
6/15/2010	10:08:39 AM	SiCl4 post valve closed
6/15/2010	10:08:39 AM	Main Vac valve closed
6/15/2010	10:08:39 AM	Bypass valve closed
6/15/2010	10:08:39 AM	H2 valve opened
6/15/2010	10:08:39 AM	Bubbler valve opened
6/15/2010	10:08:39 AM	Helium MFC set to  0.000000
6/15/2010	10:08:39 AM	H2 MFC set to  500.000000
6/15/2010	10:08:39 AM	BCl3 MFC set to  0.000000
6/15/2010	10:08:39 AM	PHl3 MFC set to  0.000000
6/15/2010	10:08:39 AM	SiCl4 MFC set to  0.000000
6/15/2010	10:08:39 AM	Bypass solenoid MFC set to  0.000000
6/15/2010	10:08:40 AM	Tube furnace set to 1000
6/15/2010	10:28:39 AM	Helium valve closed
6/15/2010	10:28:39 AM	PH3 valve closed
6/15/2010	10:28:39 AM	Main Vac valve closed
6/15/2010	10:28:39 AM	Bypass valve closed
6/15/2010	10:28:39 AM	H2 valve opened
6/15/2010	10:28:39 AM	BCl3 valve opened
6/15/2010	10:28:39 AM	SiCl4 pre valve opened
6/15/2010	10:28:39 AM	SiCl4 post valve opened
6/15/2010	10:28:39 AM	Bubbler valve opened
6/15/2010	10:28:39 AM	Helium MFC set to  0.000000
6/15/2010	10:28:39 AM	H2 MFC set to  500.000000
6/15/2010	10:28:39 AM	BCl3 MFC set to  7.000000
6/15/2010	10:28:39 AM	PHl3 MFC set to  0.000000
6/15/2010	10:28:39 AM	SiCl4 MFC set to  50.000000
6/15/2010	10:28:39 AM	Bypass solenoid MFC set to  0.000000
6/15/2010	10:28:40 AM	Tube furnace set to 1000
6/15/2010	10:43:40 AM	H2 valve closed
6/15/2010	10:43:40 AM	BCl3 valve closed
6/15/2010	10:43:40 AM	PH3 valve closed
6/15/2010	10:43:40 AM	SiCl4 pre valve closed
6/15/2010	10:43:40 AM	SiCl4 post valve closed
6/15/2010	10:43:40 AM	Main Vac valve closed
6/15/2010	10:43:40 AM	Bypass valve closed
6/15/2010	10:43:40 AM	Helium valve opened
6/15/2010	10:43:40 AM	Bubbler valve opened
6/15/2010	10:43:40 AM	Helium MFC set to  500.000000
6/15/2010	10:43:40 AM	H2 MFC set to  0.000000
6/15/2010	10:43:40 AM	BCl3 MFC set to  0.000000
6/15/2010	10:43:40 AM	PHl3 MFC set to  0.000000
6/15/2010	10:43:40 AM	SiCl4 MFC set to  0.000000
6/15/2010	10:43:40 AM	Bypass solenoid MFC set to  0.000000
6/15/2010	10:43:40 AM	Tube furnace set to 0
6/15/2010	11:03:40 AM	Helium valve closed
6/15/2010	11:03:40 AM	H2 valve closed
6/15/2010	11:03:40 AM	BCl3 valve closed
6/15/2010	11:03:40 AM	PH3 valve closed
6/15/2010	11:03:40 AM	SiCl4 pre valve closed
6/15/2010	11:03:40 AM	SiCl4 post valve closed
6/15/2010	11:03:40 AM	Main Vac valve closed
6/15/2010	11:03:40 AM	Bypass valve closed
6/15/2010	11:03:40 AM	Bubbler valve closed
6/15/2010	11:03:40 AM	Helium MFC set to  0.000000
6/15/2010	11:03:40 AM	H2 MFC set to  0.000000
6/15/2010	11:03:40 AM	BCl3 MFC set to  0.000000
6/15/2010	11:03:40 AM	PHl3 MFC set to  0.000000
6/15/2010	11:03:40 AM	SiCl4 MFC set to  0.000000
6/15/2010	11:03:40 AM	Bypass solenoid MFC set to  0.000000
6/15/2010	11:03:40 AM	Tube furnace set to 0
6/15/2010	11:03:40 AM	Run finished at 11:03 AM
6/15/2010	11:10:03 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/15/2010	11:10:04 AM	Recipe started at 11:10 AM
6/15/2010	11:10:04 AM	H2 valve closed
6/15/2010	11:10:04 AM	BCl3 valve closed
6/15/2010	11:10:04 AM	PH3 valve closed
6/15/2010	11:10:04 AM	SiCl4 pre valve closed
6/15/2010	11:10:04 AM	SiCl4 post valve closed
6/15/2010	11:10:04 AM	Main Vac valve closed
6/15/2010	11:10:04 AM	Bypass valve closed
6/15/2010	11:10:04 AM	Bubbler valve closed
6/15/2010	11:10:04 AM	Helium valve opened
6/15/2010	11:10:04 AM	Helium MFC set to  500.000000
6/15/2010	11:10:04 AM	H2 MFC set to  0.000000
6/15/2010	11:10:04 AM	BCl3 MFC set to  0.000000
6/15/2010	11:10:04 AM	PHl3 MFC set to  0.000000
6/15/2010	11:10:04 AM	SiCl4 MFC set to  0.000000
6/15/2010	11:10:04 AM	Bypass solenoid MFC set to  0.000000
6/15/2010	11:10:04 AM	Tube furnace set to 0
6/15/2010	11:10:06 AM	Helium valve closed
6/15/2010	11:10:06 AM	H2 valve closed
6/15/2010	11:10:06 AM	BCl3 valve closed
6/15/2010	11:10:06 AM	PH3 valve closed
6/15/2010	11:10:06 AM	SiCl4 pre valve closed
6/15/2010	11:10:06 AM	SiCl4 post valve closed
6/15/2010	11:10:06 AM	Main Vac valve closed
6/15/2010	11:10:06 AM	Bypass valve closed
6/15/2010	11:10:06 AM	Bubbler valve closed
6/15/2010	11:10:06 AM	Helium MFC set to  0.000000
6/15/2010	11:10:06 AM	H2 MFC set to  0.000000
6/15/2010	11:10:06 AM	BCl3 MFC set to  0.000000
6/15/2010	11:10:06 AM	PHl3 MFC set to  0.000000
6/15/2010	11:10:06 AM	SiCl4 MFC set to  0.000000
6/15/2010	11:10:06 AM	Bypass solenoid MFC set to  0.000000
6/15/2010	11:10:06 AM	Tube furnace set to 0
6/15/2010	11:10:06 AM	Run finished at 11:10 AM
6/15/2010	11:10:06 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/15/2010	11:43:31 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/15/2010	11:43:32 AM	Recipe started at 11:43 AM
6/15/2010	11:43:32 AM	Helium valve closed
6/15/2010	11:43:32 AM	H2 valve closed
6/15/2010	11:43:32 AM	BCl3 valve closed
6/15/2010	11:43:32 AM	PH3 valve closed
6/15/2010	11:43:32 AM	SiCl4 pre valve closed
6/15/2010	11:43:32 AM	SiCl4 post valve closed
6/15/2010	11:43:32 AM	Main Vac valve closed
6/15/2010	11:43:32 AM	Bubbler valve closed
6/15/2010	11:43:32 AM	Bypass valve opened
6/15/2010	11:43:32 AM	Helium MFC set to  0.000000
6/15/2010	11:43:32 AM	H2 MFC set to  0.000000
6/15/2010	11:43:32 AM	BCl3 MFC set to  0.000000
6/15/2010	11:43:32 AM	PHl3 MFC set to  0.000000
6/15/2010	11:43:32 AM	SiCl4 MFC set to  0.000000
6/15/2010	11:43:32 AM	Bypass solenoid MFC set to  0.000000
6/15/2010	11:43:32 AM	Tube furnace set to 0
6/15/2010	11:44:22 AM	Helium valve closed
6/15/2010	11:44:22 AM	H2 valve closed
6/15/2010	11:44:22 AM	BCl3 valve closed
6/15/2010	11:44:22 AM	PH3 valve closed
6/15/2010	11:44:22 AM	SiCl4 pre valve closed
6/15/2010	11:44:22 AM	SiCl4 post valve closed
6/15/2010	11:44:22 AM	Bubbler valve closed
6/15/2010	11:44:22 AM	Main Vac valve opened
6/15/2010	11:44:22 AM	Bypass valve opened
6/15/2010	11:44:22 AM	Helium MFC set to  0.000000
6/15/2010	11:44:22 AM	H2 MFC set to  0.000000
6/15/2010	11:44:22 AM	BCl3 MFC set to  0.000000
6/15/2010	11:44:22 AM	PHl3 MFC set to  0.000000
6/15/2010	11:44:22 AM	SiCl4 MFC set to  0.000000
6/15/2010	11:44:22 AM	Bypass solenoid MFC set to  0.000000
6/15/2010	11:44:22 AM	Tube furnace set to 0
6/15/2010	11:44:22 AM	Run finished at 11:44 AM
6/15/2010	11:44:22 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/15/2010	11:44:46 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
6/15/2010	11:44:51 AM	Recipe started at 11:44 AM
6/15/2010	11:44:51 AM	H2 valve closed
6/15/2010	11:44:51 AM	BCl3 valve closed
6/15/2010	11:44:51 AM	PH3 valve closed
6/15/2010	11:44:51 AM	SiCl4 pre valve closed
6/15/2010	11:44:51 AM	SiCl4 post valve closed
6/15/2010	11:44:51 AM	Main Vac valve closed
6/15/2010	11:44:51 AM	Bypass valve closed
6/15/2010	11:44:51 AM	Bubbler valve closed
6/15/2010	11:44:51 AM	Helium valve opened
6/15/2010	11:44:51 AM	Helium MFC set to  500.000000
6/15/2010	11:44:51 AM	H2 MFC set to  0.000000
6/15/2010	11:44:51 AM	BCl3 MFC set to  0.000000
6/15/2010	11:44:51 AM	PHl3 MFC set to  0.000000
6/15/2010	11:44:51 AM	SiCl4 MFC set to  0.000000
6/15/2010	11:44:51 AM	Bypass solenoid MFC set to  0.000000
6/15/2010	11:44:52 AM	Tube furnace set to 0
6/15/2010	11:46:12 AM	Helium valve closed
6/15/2010	11:46:12 AM	H2 valve closed
6/15/2010	11:46:12 AM	BCl3 valve closed
6/15/2010	11:46:12 AM	PH3 valve closed
6/15/2010	11:46:12 AM	SiCl4 pre valve closed
6/15/2010	11:46:12 AM	SiCl4 post valve closed
6/15/2010	11:46:12 AM	Main Vac valve closed
6/15/2010	11:46:12 AM	Bypass valve closed
6/15/2010	11:46:12 AM	Bubbler valve closed
6/15/2010	11:46:12 AM	Helium MFC set to  0.000000
6/15/2010	11:46:12 AM	H2 MFC set to  0.000000
6/15/2010	11:46:12 AM	BCl3 MFC set to  0.000000
6/15/2010	11:46:12 AM	PHl3 MFC set to  0.000000
6/15/2010	11:46:12 AM	SiCl4 MFC set to  0.000000
6/15/2010	11:46:12 AM	Bypass solenoid MFC set to  0.000000
6/15/2010	11:46:12 AM	Tube furnace set to 0
6/15/2010	11:46:27 AM	Helium valve closed
6/15/2010	11:46:27 AM	H2 valve closed
6/15/2010	11:46:27 AM	BCl3 valve closed
6/15/2010	11:46:27 AM	PH3 valve closed
6/15/2010	11:46:27 AM	SiCl4 pre valve closed
6/15/2010	11:46:27 AM	SiCl4 post valve closed
6/15/2010	11:46:27 AM	Main Vac valve closed
6/15/2010	11:46:27 AM	Bubbler valve closed
6/15/2010	11:46:27 AM	Bypass valve opened
6/15/2010	11:46:27 AM	Helium MFC set to  0.000000
6/15/2010	11:46:27 AM	H2 MFC set to  0.000000
6/15/2010	11:46:27 AM	BCl3 MFC set to  0.000000
6/15/2010	11:46:27 AM	PHl3 MFC set to  0.000000
6/15/2010	11:46:27 AM	SiCl4 MFC set to  0.000000
6/15/2010	11:46:27 AM	Bypass solenoid MFC set to  0.000000
6/15/2010	11:46:27 AM	Tube furnace set to 0
6/15/2010	11:47:01 AM	Helium valve closed
6/15/2010	11:47:01 AM	H2 valve closed
6/15/2010	11:47:01 AM	BCl3 valve closed
6/15/2010	11:47:01 AM	PH3 valve closed
6/15/2010	11:47:01 AM	SiCl4 pre valve closed
6/15/2010	11:47:01 AM	SiCl4 post valve closed
6/15/2010	11:47:01 AM	Bubbler valve closed
6/15/2010	11:47:01 AM	Main Vac valve opened
6/15/2010	11:47:01 AM	Bypass valve opened
6/15/2010	11:47:01 AM	Helium MFC set to  0.000000
6/15/2010	11:47:01 AM	H2 MFC set to  0.000000
6/15/2010	11:47:01 AM	BCl3 MFC set to  0.000000
6/15/2010	11:47:01 AM	PHl3 MFC set to  0.000000
6/15/2010	11:47:01 AM	SiCl4 MFC set to  0.000000
6/15/2010	11:47:01 AM	Bypass solenoid MFC set to  0.000000
6/15/2010	11:47:01 AM	Tube furnace set to 0
6/15/2010	11:52:01 AM	H2 valve closed
6/15/2010	11:52:01 AM	BCl3 valve closed
6/15/2010	11:52:01 AM	PH3 valve closed
6/15/2010	11:52:01 AM	SiCl4 pre valve closed
6/15/2010	11:52:01 AM	SiCl4 post valve closed
6/15/2010	11:52:01 AM	Main Vac valve closed
6/15/2010	11:52:01 AM	Bypass valve closed
6/15/2010	11:52:01 AM	Bubbler valve closed
6/15/2010	11:52:01 AM	Helium valve opened
6/15/2010	11:52:01 AM	Helium MFC set to  500.000000
6/15/2010	11:52:01 AM	H2 MFC set to  0.000000
6/15/2010	11:52:01 AM	BCl3 MFC set to  0.000000
6/15/2010	11:52:01 AM	PHl3 MFC set to  0.000000
6/15/2010	11:52:01 AM	SiCl4 MFC set to  0.000000
6/15/2010	11:52:01 AM	Bypass solenoid MFC set to  0.000000
6/15/2010	11:52:01 AM	Tube furnace set to 0
6/15/2010	11:53:21 AM	Helium valve closed
6/15/2010	11:53:21 AM	H2 valve closed
6/15/2010	11:53:21 AM	BCl3 valve closed
6/15/2010	11:53:21 AM	PH3 valve closed
6/15/2010	11:53:21 AM	SiCl4 pre valve closed
6/15/2010	11:53:21 AM	SiCl4 post valve closed
6/15/2010	11:53:21 AM	Main Vac valve closed
6/15/2010	11:53:21 AM	Bypass valve closed
6/15/2010	11:53:21 AM	Bubbler valve closed
6/15/2010	11:53:21 AM	Helium MFC set to  0.000000
6/15/2010	11:53:21 AM	H2 MFC set to  0.000000
6/15/2010	11:53:21 AM	BCl3 MFC set to  0.000000
6/15/2010	11:53:21 AM	PHl3 MFC set to  0.000000
6/15/2010	11:53:21 AM	SiCl4 MFC set to  0.000000
6/15/2010	11:53:21 AM	Bypass solenoid MFC set to  0.000000
6/15/2010	11:53:21 AM	Tube furnace set to 0
6/15/2010	11:53:36 AM	Helium valve closed
6/15/2010	11:53:36 AM	H2 valve closed
6/15/2010	11:53:36 AM	BCl3 valve closed
6/15/2010	11:53:36 AM	PH3 valve closed
6/15/2010	11:53:36 AM	SiCl4 pre valve closed
6/15/2010	11:53:36 AM	SiCl4 post valve closed
6/15/2010	11:53:36 AM	Main Vac valve closed
6/15/2010	11:53:36 AM	Bubbler valve closed
6/15/2010	11:53:36 AM	Bypass valve opened
6/15/2010	11:53:36 AM	Helium MFC set to  0.000000
6/15/2010	11:53:36 AM	H2 MFC set to  0.000000
6/15/2010	11:53:36 AM	BCl3 MFC set to  0.000000
6/15/2010	11:53:36 AM	PHl3 MFC set to  0.000000
6/15/2010	11:53:36 AM	SiCl4 MFC set to  0.000000
6/15/2010	11:53:36 AM	Bypass solenoid MFC set to  0.000000
6/15/2010	11:53:37 AM	Tube furnace set to 0
6/15/2010	11:54:10 AM	Helium valve closed
6/15/2010	11:54:10 AM	H2 valve closed
6/15/2010	11:54:10 AM	BCl3 valve closed
6/15/2010	11:54:10 AM	PH3 valve closed
6/15/2010	11:54:10 AM	SiCl4 pre valve closed
6/15/2010	11:54:10 AM	SiCl4 post valve closed
6/15/2010	11:54:10 AM	Bubbler valve closed
6/15/2010	11:54:10 AM	Main Vac valve opened
6/15/2010	11:54:10 AM	Bypass valve opened
6/15/2010	11:54:10 AM	Helium MFC set to  0.000000
6/15/2010	11:54:10 AM	H2 MFC set to  0.000000
6/15/2010	11:54:10 AM	BCl3 MFC set to  0.000000
6/15/2010	11:54:10 AM	PHl3 MFC set to  0.000000
6/15/2010	11:54:10 AM	SiCl4 MFC set to  0.000000
6/15/2010	11:54:10 AM	Bypass solenoid MFC set to  0.000000
6/15/2010	11:54:10 AM	Tube furnace set to 0
6/15/2010	11:59:10 AM	H2 valve closed
6/15/2010	11:59:10 AM	BCl3 valve closed
6/15/2010	11:59:10 AM	PH3 valve closed
6/15/2010	11:59:10 AM	SiCl4 pre valve closed
6/15/2010	11:59:10 AM	SiCl4 post valve closed
6/15/2010	11:59:10 AM	Main Vac valve closed
6/15/2010	11:59:10 AM	Bypass valve closed
6/15/2010	11:59:10 AM	Bubbler valve closed
6/15/2010	11:59:10 AM	Helium valve opened
6/15/2010	11:59:10 AM	Helium MFC set to  500.000000
6/15/2010	11:59:10 AM	H2 MFC set to  0.000000
6/15/2010	11:59:10 AM	BCl3 MFC set to  0.000000
6/15/2010	11:59:10 AM	PHl3 MFC set to  0.000000
6/15/2010	11:59:10 AM	SiCl4 MFC set to  0.000000
6/15/2010	11:59:10 AM	Bypass solenoid MFC set to  0.000000
6/15/2010	11:59:10 AM	Tube furnace set to 0
6/15/2010	12:00:30 PM	Helium valve closed
6/15/2010	12:00:30 PM	H2 valve closed
6/15/2010	12:00:30 PM	BCl3 valve closed
6/15/2010	12:00:30 PM	PH3 valve closed
6/15/2010	12:00:30 PM	SiCl4 pre valve closed
6/15/2010	12:00:30 PM	SiCl4 post valve closed
6/15/2010	12:00:30 PM	Main Vac valve closed
6/15/2010	12:00:30 PM	Bypass valve closed
6/15/2010	12:00:30 PM	Bubbler valve closed
6/15/2010	12:00:30 PM	Helium MFC set to  0.000000
6/15/2010	12:00:30 PM	H2 MFC set to  0.000000
6/15/2010	12:00:30 PM	BCl3 MFC set to  0.000000
6/15/2010	12:00:30 PM	PHl3 MFC set to  0.000000
6/15/2010	12:00:30 PM	SiCl4 MFC set to  0.000000
6/15/2010	12:00:30 PM	Bypass solenoid MFC set to  0.000000
6/15/2010	12:00:30 PM	Tube furnace set to 0
6/15/2010	12:00:45 PM	Helium valve closed
6/15/2010	12:00:45 PM	H2 valve closed
6/15/2010	12:00:45 PM	BCl3 valve closed
6/15/2010	12:00:45 PM	PH3 valve closed
6/15/2010	12:00:45 PM	SiCl4 pre valve closed
6/15/2010	12:00:45 PM	SiCl4 post valve closed
6/15/2010	12:00:45 PM	Main Vac valve closed
6/15/2010	12:00:45 PM	Bubbler valve closed
6/15/2010	12:00:45 PM	Bypass valve opened
6/15/2010	12:00:45 PM	Helium MFC set to  0.000000
6/15/2010	12:00:45 PM	H2 MFC set to  0.000000
6/15/2010	12:00:45 PM	BCl3 MFC set to  0.000000
6/15/2010	12:00:45 PM	PHl3 MFC set to  0.000000
6/15/2010	12:00:45 PM	SiCl4 MFC set to  0.000000
6/15/2010	12:00:45 PM	Bypass solenoid MFC set to  0.000000
6/15/2010	12:00:45 PM	Tube furnace set to 0
6/15/2010	12:01:18 PM	Helium valve closed
6/15/2010	12:01:18 PM	H2 valve closed
6/15/2010	12:01:18 PM	BCl3 valve closed
6/15/2010	12:01:18 PM	PH3 valve closed
6/15/2010	12:01:18 PM	SiCl4 pre valve closed
6/15/2010	12:01:18 PM	SiCl4 post valve closed
6/15/2010	12:01:18 PM	Bubbler valve closed
6/15/2010	12:01:18 PM	Main Vac valve opened
6/15/2010	12:01:18 PM	Bypass valve opened
6/15/2010	12:01:18 PM	Helium MFC set to  0.000000
6/15/2010	12:01:18 PM	H2 MFC set to  0.000000
6/15/2010	12:01:18 PM	BCl3 MFC set to  0.000000
6/15/2010	12:01:18 PM	PHl3 MFC set to  0.000000
6/15/2010	12:01:18 PM	SiCl4 MFC set to  0.000000
6/15/2010	12:01:18 PM	Bypass solenoid MFC set to  0.000000
6/15/2010	12:01:18 PM	Tube furnace set to 0
6/15/2010	12:06:18 PM	Helium valve closed
6/15/2010	12:06:18 PM	H2 valve closed
6/15/2010	12:06:18 PM	BCl3 valve closed
6/15/2010	12:06:18 PM	PH3 valve closed
6/15/2010	12:06:18 PM	SiCl4 pre valve closed
6/15/2010	12:06:18 PM	SiCl4 post valve closed
6/15/2010	12:06:18 PM	Bubbler valve closed
6/15/2010	12:06:18 PM	Main Vac valve opened
6/15/2010	12:06:18 PM	Bypass valve opened
6/15/2010	12:06:18 PM	Helium MFC set to  0.000000
6/15/2010	12:06:18 PM	H2 MFC set to  0.000000
6/15/2010	12:06:18 PM	BCl3 MFC set to  0.000000
6/15/2010	12:06:18 PM	PHl3 MFC set to  0.000000
6/15/2010	12:06:18 PM	SiCl4 MFC set to  0.000000
6/15/2010	12:06:18 PM	Bypass solenoid MFC set to  0.000000
6/15/2010	12:06:18 PM	Tube furnace set to 0
6/15/2010	12:06:19 PM	Run finished at 12:06 PM
6/15/2010	12:06:19 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
6/15/2010	12:41:46 PM	Helium MFC set to  100.000000
6/15/2010	12:41:52 PM	Helium valve opened
6/15/2010	12:46:43 PM	Helium valve closed
6/15/2010	12:47:23 PM	Helium MFC set to  0.000000
6/15/2010	12:47:50 PM	Recipe started at 12:47 PM
6/15/2010	12:47:50 PM	Helium valve closed
6/15/2010	12:47:51 PM	BCl3 valve closed
6/15/2010	12:47:51 PM	PH3 valve closed
6/15/2010	12:47:51 PM	SiCl4 pre valve closed
6/15/2010	12:47:51 PM	SiCl4 post valve closed
6/15/2010	12:47:51 PM	Main Vac valve closed
6/15/2010	12:47:51 PM	Bypass valve closed
6/15/2010	12:47:51 PM	Bubbler valve closed
6/15/2010	12:47:51 PM	H2 valve opened
6/15/2010	12:47:51 PM	Helium MFC set to  0.000000
6/15/2010	12:47:51 PM	H2 MFC set to  500.000000
6/15/2010	12:47:51 PM	BCl3 MFC set to  0.000000
6/15/2010	12:47:51 PM	PHl3 MFC set to  0.000000
6/15/2010	12:47:51 PM	SiCl4 MFC set to  0.000000
6/15/2010	12:47:51 PM	Bypass solenoid MFC set to  0.000000
6/15/2010	12:47:51 PM	Tube furnace set to 0
6/15/2010	12:49:11 PM	Helium valve closed
6/15/2010	12:49:11 PM	BCl3 valve closed
6/15/2010	12:49:11 PM	PH3 valve closed
6/15/2010	12:49:11 PM	SiCl4 pre valve closed
6/15/2010	12:49:11 PM	SiCl4 post valve closed
6/15/2010	12:49:11 PM	Main Vac valve closed
6/15/2010	12:49:11 PM	Bypass valve closed
6/15/2010	12:49:11 PM	H2 valve opened
6/15/2010	12:49:11 PM	Bubbler valve opened
6/15/2010	12:49:11 PM	Helium MFC set to  0.000000
6/15/2010	12:49:11 PM	H2 MFC set to  500.000000
6/15/2010	12:49:11 PM	BCl3 MFC set to  0.000000
6/15/2010	12:49:11 PM	PHl3 MFC set to  0.000000
6/15/2010	12:49:11 PM	SiCl4 MFC set to  0.000000
6/15/2010	12:49:11 PM	Bypass solenoid MFC set to  0.000000
6/15/2010	12:49:11 PM	Tube furnace set to 1000
6/15/2010	1:09:11 PM	Helium valve closed
6/15/2010	1:09:11 PM	PH3 valve closed
6/15/2010	1:09:11 PM	Main Vac valve closed
6/15/2010	1:09:11 PM	Bypass valve closed
6/15/2010	1:09:11 PM	H2 valve opened
6/15/2010	1:09:11 PM	BCl3 valve opened
6/15/2010	1:09:11 PM	SiCl4 pre valve opened
6/15/2010	1:09:11 PM	SiCl4 post valve opened
6/15/2010	1:09:11 PM	Bubbler valve opened
6/15/2010	1:09:11 PM	Helium MFC set to  0.000000
6/15/2010	1:09:11 PM	H2 MFC set to  500.000000
6/15/2010	1:09:11 PM	BCl3 MFC set to  7.000000
6/15/2010	1:09:11 PM	PHl3 MFC set to  0.000000
6/15/2010	1:09:11 PM	SiCl4 MFC set to  50.000000
6/15/2010	1:09:11 PM	Bypass solenoid MFC set to  0.000000
6/15/2010	1:09:12 PM	Tube furnace set to 1000
6/15/2010	1:24:11 PM	H2 valve closed
6/15/2010	1:24:12 PM	BCl3 valve closed
6/15/2010	1:24:12 PM	PH3 valve closed
6/15/2010	1:24:12 PM	SiCl4 pre valve closed
6/15/2010	1:24:12 PM	SiCl4 post valve closed
6/15/2010	1:24:12 PM	Main Vac valve closed
6/15/2010	1:24:12 PM	Bypass valve closed
6/15/2010	1:24:12 PM	Helium valve opened
6/15/2010	1:24:12 PM	Bubbler valve opened
6/15/2010	1:24:12 PM	Helium MFC set to  500.000000
6/15/2010	1:24:12 PM	H2 MFC set to  0.000000
6/15/2010	1:24:12 PM	BCl3 MFC set to  0.000000
6/15/2010	1:24:12 PM	PHl3 MFC set to  0.000000
6/15/2010	1:24:12 PM	SiCl4 MFC set to  0.000000
6/15/2010	1:24:12 PM	Bypass solenoid MFC set to  0.000000
6/15/2010	1:24:12 PM	Tube furnace set to 0
6/15/2010	1:44:12 PM	Helium valve closed
6/15/2010	1:44:12 PM	H2 valve closed
6/15/2010	1:44:12 PM	BCl3 valve closed
6/15/2010	1:44:12 PM	PH3 valve closed
6/15/2010	1:44:12 PM	SiCl4 pre valve closed
6/15/2010	1:44:12 PM	SiCl4 post valve closed
6/15/2010	1:44:12 PM	Main Vac valve closed
6/15/2010	1:44:12 PM	Bypass valve closed
6/15/2010	1:44:12 PM	Bubbler valve closed
6/15/2010	1:44:12 PM	Helium MFC set to  0.000000
6/15/2010	1:44:12 PM	H2 MFC set to  0.000000
6/15/2010	1:44:12 PM	BCl3 MFC set to  0.000000
6/15/2010	1:44:12 PM	PHl3 MFC set to  0.000000
6/15/2010	1:44:12 PM	SiCl4 MFC set to  0.000000
6/15/2010	1:44:12 PM	Bypass solenoid MFC set to  0.000000
6/15/2010	1:44:12 PM	Tube furnace set to 0
6/15/2010	1:44:12 PM	Run finished at 1:44 PM
6/15/2010	1:54:49 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/15/2010	1:54:49 PM	Recipe started at 1:54 PM
6/15/2010	1:54:49 PM	H2 valve closed
6/15/2010	1:54:49 PM	BCl3 valve closed
6/15/2010	1:54:49 PM	PH3 valve closed
6/15/2010	1:54:49 PM	SiCl4 pre valve closed
6/15/2010	1:54:49 PM	SiCl4 post valve closed
6/15/2010	1:54:49 PM	Main Vac valve closed
6/15/2010	1:54:49 PM	Bypass valve closed
6/15/2010	1:54:49 PM	Bubbler valve closed
6/15/2010	1:54:49 PM	Helium valve opened
6/15/2010	1:54:49 PM	Helium MFC set to  500.000000
6/15/2010	1:54:49 PM	H2 MFC set to  0.000000
6/15/2010	1:54:49 PM	BCl3 MFC set to  0.000000
6/15/2010	1:54:49 PM	PHl3 MFC set to  0.000000
6/15/2010	1:54:49 PM	SiCl4 MFC set to  0.000000
6/15/2010	1:54:49 PM	Bypass solenoid MFC set to  0.000000
6/15/2010	1:54:49 PM	Tube furnace set to 0
6/15/2010	1:54:54 PM	Helium valve closed
6/15/2010	1:54:54 PM	H2 valve closed
6/15/2010	1:54:54 PM	BCl3 valve closed
6/15/2010	1:54:54 PM	PH3 valve closed
6/15/2010	1:54:54 PM	SiCl4 pre valve closed
6/15/2010	1:54:54 PM	SiCl4 post valve closed
6/15/2010	1:54:54 PM	Main Vac valve closed
6/15/2010	1:54:54 PM	Bypass valve closed
6/15/2010	1:54:54 PM	Bubbler valve closed
6/15/2010	1:54:54 PM	Helium MFC set to  0.000000
6/15/2010	1:54:54 PM	H2 MFC set to  0.000000
6/15/2010	1:54:54 PM	BCl3 MFC set to  0.000000
6/15/2010	1:54:54 PM	PHl3 MFC set to  0.000000
6/15/2010	1:54:54 PM	SiCl4 MFC set to  0.000000
6/15/2010	1:54:54 PM	Bypass solenoid MFC set to  0.000000
6/15/2010	1:54:55 PM	Tube furnace set to 0
6/15/2010	1:54:55 PM	Run finished at 1:54 PM
6/15/2010	1:54:55 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/15/2010	2:08:18 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/15/2010	2:08:19 PM	Recipe started at 2:08 PM
6/15/2010	2:08:19 PM	Helium valve closed
6/15/2010	2:08:19 PM	H2 valve closed
6/15/2010	2:08:19 PM	BCl3 valve closed
6/15/2010	2:08:19 PM	PH3 valve closed
6/15/2010	2:08:19 PM	SiCl4 pre valve closed
6/15/2010	2:08:19 PM	SiCl4 post valve closed
6/15/2010	2:08:19 PM	Main Vac valve closed
6/15/2010	2:08:19 PM	Bubbler valve closed
6/15/2010	2:08:19 PM	Bypass valve opened
6/15/2010	2:08:19 PM	Helium MFC set to  0.000000
6/15/2010	2:08:19 PM	H2 MFC set to  0.000000
6/15/2010	2:08:19 PM	BCl3 MFC set to  0.000000
6/15/2010	2:08:19 PM	PHl3 MFC set to  0.000000
6/15/2010	2:08:19 PM	SiCl4 MFC set to  0.000000
6/15/2010	2:08:19 PM	Bypass solenoid MFC set to  0.000000
6/15/2010	2:08:19 PM	Tube furnace set to 0
6/15/2010	2:09:07 PM	Helium valve closed
6/15/2010	2:09:07 PM	H2 valve closed
6/15/2010	2:09:07 PM	BCl3 valve closed
6/15/2010	2:09:07 PM	PH3 valve closed
6/15/2010	2:09:07 PM	SiCl4 pre valve closed
6/15/2010	2:09:07 PM	SiCl4 post valve closed
6/15/2010	2:09:07 PM	Bubbler valve closed
6/15/2010	2:09:07 PM	Main Vac valve opened
6/15/2010	2:09:07 PM	Bypass valve opened
6/15/2010	2:09:07 PM	Helium MFC set to  0.000000
6/15/2010	2:09:07 PM	H2 MFC set to  0.000000
6/15/2010	2:09:07 PM	BCl3 MFC set to  0.000000
6/15/2010	2:09:07 PM	PHl3 MFC set to  0.000000
6/15/2010	2:09:07 PM	SiCl4 MFC set to  0.000000
6/15/2010	2:09:07 PM	Bypass solenoid MFC set to  0.000000
6/15/2010	2:09:07 PM	Tube furnace set to 0
6/15/2010	2:09:08 PM	Run finished at 2:09 PM
6/15/2010	2:09:08 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/15/2010	2:09:13 PM	Helium MFC set to  100.000000
6/15/2010	2:09:14 PM	Helium valve opened
6/15/2010	2:11:43 PM	Helium valve closed
6/15/2010	2:13:16 PM	Helium valve opened
6/15/2010	2:16:28 PM	Helium valve closed
6/15/2010	2:17:02 PM	Helium valve opened
6/15/2010	2:20:22 PM	Helium valve closed
6/15/2010	2:20:59 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
6/15/2010	2:21:05 PM	Recipe started at 2:21 PM
6/15/2010	2:21:05 PM	H2 valve closed
6/15/2010	2:21:05 PM	BCl3 valve closed
6/15/2010	2:21:05 PM	PH3 valve closed
6/15/2010	2:21:05 PM	SiCl4 pre valve closed
6/15/2010	2:21:05 PM	SiCl4 post valve closed
6/15/2010	2:21:05 PM	Main Vac valve closed
6/15/2010	2:21:05 PM	Bypass valve closed
6/15/2010	2:21:05 PM	Bubbler valve closed
6/15/2010	2:21:05 PM	Helium valve opened
6/15/2010	2:21:05 PM	Helium MFC set to  500.000000
6/15/2010	2:21:05 PM	H2 MFC set to  0.000000
6/15/2010	2:21:05 PM	BCl3 MFC set to  0.000000
6/15/2010	2:21:05 PM	PHl3 MFC set to  0.000000
6/15/2010	2:21:05 PM	SiCl4 MFC set to  0.000000
6/15/2010	2:21:05 PM	Bypass solenoid MFC set to  0.000000
6/15/2010	2:21:05 PM	Tube furnace set to 0
6/15/2010	2:22:23 PM	Helium valve closed
6/15/2010	2:22:23 PM	H2 valve closed
6/15/2010	2:22:23 PM	BCl3 valve closed
6/15/2010	2:22:23 PM	PH3 valve closed
6/15/2010	2:22:23 PM	SiCl4 pre valve closed
6/15/2010	2:22:23 PM	SiCl4 post valve closed
6/15/2010	2:22:23 PM	Main Vac valve closed
6/15/2010	2:22:23 PM	Bypass valve closed
6/15/2010	2:22:23 PM	Bubbler valve closed
6/15/2010	2:22:23 PM	Helium MFC set to  0.000000
6/15/2010	2:22:23 PM	H2 MFC set to  0.000000
6/15/2010	2:22:23 PM	BCl3 MFC set to  0.000000
6/15/2010	2:22:23 PM	PHl3 MFC set to  0.000000
6/15/2010	2:22:23 PM	SiCl4 MFC set to  0.000000
6/15/2010	2:22:23 PM	Bypass solenoid MFC set to  0.000000
6/15/2010	2:22:23 PM	Tube furnace set to 0
6/15/2010	2:22:38 PM	Helium valve closed
6/15/2010	2:22:38 PM	H2 valve closed
6/15/2010	2:22:38 PM	BCl3 valve closed
6/15/2010	2:22:38 PM	PH3 valve closed
6/15/2010	2:22:38 PM	SiCl4 pre valve closed
6/15/2010	2:22:38 PM	SiCl4 post valve closed
6/15/2010	2:22:38 PM	Main Vac valve closed
6/15/2010	2:22:38 PM	Bubbler valve closed
6/15/2010	2:22:38 PM	Bypass valve opened
6/15/2010	2:22:38 PM	Helium MFC set to  0.000000
6/15/2010	2:22:38 PM	H2 MFC set to  0.000000
6/15/2010	2:22:38 PM	BCl3 MFC set to  0.000000
6/15/2010	2:22:38 PM	PHl3 MFC set to  0.000000
6/15/2010	2:22:38 PM	SiCl4 MFC set to  0.000000
6/15/2010	2:22:38 PM	Bypass solenoid MFC set to  0.000000
6/15/2010	2:22:38 PM	Tube furnace set to 0
6/15/2010	2:23:10 PM	Helium valve closed
6/15/2010	2:23:10 PM	H2 valve closed
6/15/2010	2:23:10 PM	BCl3 valve closed
6/15/2010	2:23:10 PM	PH3 valve closed
6/15/2010	2:23:10 PM	SiCl4 pre valve closed
6/15/2010	2:23:10 PM	SiCl4 post valve closed
6/15/2010	2:23:10 PM	Bubbler valve closed
6/15/2010	2:23:10 PM	Main Vac valve opened
6/15/2010	2:23:10 PM	Bypass valve opened
6/15/2010	2:23:10 PM	Helium MFC set to  0.000000
6/15/2010	2:23:10 PM	H2 MFC set to  0.000000
6/15/2010	2:23:10 PM	BCl3 MFC set to  0.000000
6/15/2010	2:23:10 PM	PHl3 MFC set to  0.000000
6/15/2010	2:23:10 PM	SiCl4 MFC set to  0.000000
6/15/2010	2:23:10 PM	Bypass solenoid MFC set to  0.000000
6/15/2010	2:23:10 PM	Tube furnace set to 0
6/15/2010	2:28:10 PM	H2 valve closed
6/15/2010	2:28:10 PM	BCl3 valve closed
6/15/2010	2:28:10 PM	PH3 valve closed
6/15/2010	2:28:10 PM	SiCl4 pre valve closed
6/15/2010	2:28:10 PM	SiCl4 post valve closed
6/15/2010	2:28:10 PM	Main Vac valve closed
6/15/2010	2:28:10 PM	Bypass valve closed
6/15/2010	2:28:10 PM	Bubbler valve closed
6/15/2010	2:28:10 PM	Helium valve opened
6/15/2010	2:28:10 PM	Helium MFC set to  500.000000
6/15/2010	2:28:10 PM	H2 MFC set to  0.000000
6/15/2010	2:28:10 PM	BCl3 MFC set to  0.000000
6/15/2010	2:28:10 PM	PHl3 MFC set to  0.000000
6/15/2010	2:28:10 PM	SiCl4 MFC set to  0.000000
6/15/2010	2:28:10 PM	Bypass solenoid MFC set to  0.000000
6/15/2010	2:28:10 PM	Tube furnace set to 0
6/15/2010	2:29:27 PM	Helium valve closed
6/15/2010	2:29:27 PM	H2 valve closed
6/15/2010	2:29:27 PM	BCl3 valve closed
6/15/2010	2:29:27 PM	PH3 valve closed
6/15/2010	2:29:27 PM	SiCl4 pre valve closed
6/15/2010	2:29:27 PM	SiCl4 post valve closed
6/15/2010	2:29:27 PM	Main Vac valve closed
6/15/2010	2:29:27 PM	Bypass valve closed
6/15/2010	2:29:27 PM	Bubbler valve closed
6/15/2010	2:29:27 PM	Helium MFC set to  0.000000
6/15/2010	2:29:27 PM	H2 MFC set to  0.000000
6/15/2010	2:29:27 PM	BCl3 MFC set to  0.000000
6/15/2010	2:29:27 PM	PHl3 MFC set to  0.000000
6/15/2010	2:29:27 PM	SiCl4 MFC set to  0.000000
6/15/2010	2:29:27 PM	Bypass solenoid MFC set to  0.000000
6/15/2010	2:29:28 PM	Tube furnace set to 0
6/15/2010	2:29:43 PM	Helium valve closed
6/15/2010	2:29:43 PM	H2 valve closed
6/15/2010	2:29:43 PM	BCl3 valve closed
6/15/2010	2:29:43 PM	PH3 valve closed
6/15/2010	2:29:43 PM	SiCl4 pre valve closed
6/15/2010	2:29:43 PM	SiCl4 post valve closed
6/15/2010	2:29:43 PM	Main Vac valve closed
6/15/2010	2:29:43 PM	Bubbler valve closed
6/15/2010	2:29:43 PM	Bypass valve opened
6/15/2010	2:29:43 PM	Helium MFC set to  0.000000
6/15/2010	2:29:43 PM	H2 MFC set to  0.000000
6/15/2010	2:29:43 PM	BCl3 MFC set to  0.000000
6/15/2010	2:29:43 PM	PHl3 MFC set to  0.000000
6/15/2010	2:29:43 PM	SiCl4 MFC set to  0.000000
6/15/2010	2:29:43 PM	Bypass solenoid MFC set to  0.000000
6/15/2010	2:29:43 PM	Tube furnace set to 0
6/15/2010	2:30:15 PM	Helium valve closed
6/15/2010	2:30:15 PM	H2 valve closed
6/15/2010	2:30:15 PM	BCl3 valve closed
6/15/2010	2:30:15 PM	PH3 valve closed
6/15/2010	2:30:15 PM	SiCl4 pre valve closed
6/15/2010	2:30:15 PM	SiCl4 post valve closed
6/15/2010	2:30:15 PM	Bubbler valve closed
6/15/2010	2:30:15 PM	Main Vac valve opened
6/15/2010	2:30:15 PM	Bypass valve opened
6/15/2010	2:30:15 PM	Helium MFC set to  0.000000
6/15/2010	2:30:15 PM	H2 MFC set to  0.000000
6/15/2010	2:30:15 PM	BCl3 MFC set to  0.000000
6/15/2010	2:30:15 PM	PHl3 MFC set to  0.000000
6/15/2010	2:30:15 PM	SiCl4 MFC set to  0.000000
6/15/2010	2:30:15 PM	Bypass solenoid MFC set to  0.000000
6/15/2010	2:30:15 PM	Tube furnace set to 0
6/15/2010	2:35:15 PM	H2 valve closed
6/15/2010	2:35:15 PM	BCl3 valve closed
6/15/2010	2:35:15 PM	PH3 valve closed
6/15/2010	2:35:15 PM	SiCl4 pre valve closed
6/15/2010	2:35:15 PM	SiCl4 post valve closed
6/15/2010	2:35:15 PM	Main Vac valve closed
6/15/2010	2:35:15 PM	Bypass valve closed
6/15/2010	2:35:15 PM	Bubbler valve closed
6/15/2010	2:35:15 PM	Helium valve opened
6/15/2010	2:35:15 PM	Helium MFC set to  500.000000
6/15/2010	2:35:15 PM	H2 MFC set to  0.000000
6/15/2010	2:35:15 PM	BCl3 MFC set to  0.000000
6/15/2010	2:35:15 PM	PHl3 MFC set to  0.000000
6/15/2010	2:35:15 PM	SiCl4 MFC set to  0.000000
6/15/2010	2:35:15 PM	Bypass solenoid MFC set to  0.000000
6/15/2010	2:35:15 PM	Tube furnace set to 0
6/15/2010	2:36:32 PM	Helium valve closed
6/15/2010	2:36:32 PM	H2 valve closed
6/15/2010	2:36:32 PM	BCl3 valve closed
6/15/2010	2:36:32 PM	PH3 valve closed
6/15/2010	2:36:32 PM	SiCl4 pre valve closed
6/15/2010	2:36:32 PM	SiCl4 post valve closed
6/15/2010	2:36:32 PM	Main Vac valve closed
6/15/2010	2:36:32 PM	Bypass valve closed
6/15/2010	2:36:32 PM	Bubbler valve closed
6/15/2010	2:36:32 PM	Helium MFC set to  0.000000
6/15/2010	2:36:32 PM	H2 MFC set to  0.000000
6/15/2010	2:36:32 PM	BCl3 MFC set to  0.000000
6/15/2010	2:36:32 PM	PHl3 MFC set to  0.000000
6/15/2010	2:36:32 PM	SiCl4 MFC set to  0.000000
6/15/2010	2:36:32 PM	Bypass solenoid MFC set to  0.000000
6/15/2010	2:36:32 PM	Tube furnace set to 0
6/15/2010	2:36:47 PM	Helium valve closed
6/15/2010	2:36:47 PM	H2 valve closed
6/15/2010	2:36:47 PM	BCl3 valve closed
6/15/2010	2:36:47 PM	PH3 valve closed
6/15/2010	2:36:47 PM	SiCl4 pre valve closed
6/15/2010	2:36:47 PM	SiCl4 post valve closed
6/15/2010	2:36:47 PM	Main Vac valve closed
6/15/2010	2:36:47 PM	Bubbler valve closed
6/15/2010	2:36:47 PM	Bypass valve opened
6/15/2010	2:36:47 PM	Helium MFC set to  0.000000
6/15/2010	2:36:47 PM	H2 MFC set to  0.000000
6/15/2010	2:36:47 PM	BCl3 MFC set to  0.000000
6/15/2010	2:36:47 PM	PHl3 MFC set to  0.000000
6/15/2010	2:36:47 PM	SiCl4 MFC set to  0.000000
6/15/2010	2:36:47 PM	Bypass solenoid MFC set to  0.000000
6/15/2010	2:36:48 PM	Tube furnace set to 0
6/15/2010	2:37:20 PM	Helium valve closed
6/15/2010	2:37:20 PM	H2 valve closed
6/15/2010	2:37:20 PM	BCl3 valve closed
6/15/2010	2:37:20 PM	PH3 valve closed
6/15/2010	2:37:20 PM	SiCl4 pre valve closed
6/15/2010	2:37:20 PM	SiCl4 post valve closed
6/15/2010	2:37:20 PM	Bubbler valve closed
6/15/2010	2:37:20 PM	Main Vac valve opened
6/15/2010	2:37:20 PM	Bypass valve opened
6/15/2010	2:37:20 PM	Helium MFC set to  0.000000
6/15/2010	2:37:20 PM	H2 MFC set to  0.000000
6/15/2010	2:37:20 PM	BCl3 MFC set to  0.000000
6/15/2010	2:37:20 PM	PHl3 MFC set to  0.000000
6/15/2010	2:37:20 PM	SiCl4 MFC set to  0.000000
6/15/2010	2:37:20 PM	Bypass solenoid MFC set to  0.000000
6/15/2010	2:37:20 PM	Tube furnace set to 0
6/15/2010	2:38:16 PM	Run aborted at 2:38 PM
6/15/2010	2:38:16 PM	Helium valve closed
6/15/2010	2:38:16 PM	H2 valve closed
6/15/2010	2:38:16 PM	BCl3 valve closed
6/15/2010	2:38:16 PM	PH3 valve closed
6/15/2010	2:38:16 PM	SiCl4 pre valve closed
6/15/2010	2:38:16 PM	SiCl4 post valve closed
6/15/2010	2:38:16 PM	Bypass valve closed
6/15/2010	2:38:16 PM	Main Vac valve closed
6/15/2010	2:38:16 PM	Bubbler valve closed
6/15/2010	2:38:16 PM	Helium MFC set to  0.000000
6/15/2010	2:38:16 PM	H2 MFC set to  0.000000
6/15/2010	2:38:16 PM	BCl3 MFC set to  0.000000
6/15/2010	2:38:16 PM	PHl3 MFC set to  0.000000
6/15/2010	2:38:16 PM	SiCl4 MFC set to  0.000000
6/15/2010	2:38:16 PM	Tube furnace set to 0
6/15/2010	2:38:16 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
6/15/2010	2:38:17 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/15/2010	2:38:18 PM	Recipe started at 2:38 PM
6/15/2010	2:38:18 PM	Helium valve closed
6/15/2010	2:38:18 PM	H2 valve closed
6/15/2010	2:38:18 PM	BCl3 valve closed
6/15/2010	2:38:18 PM	PH3 valve closed
6/15/2010	2:38:18 PM	SiCl4 pre valve closed
6/15/2010	2:38:18 PM	SiCl4 post valve closed
6/15/2010	2:38:18 PM	Main Vac valve closed
6/15/2010	2:38:18 PM	Bubbler valve closed
6/15/2010	2:38:18 PM	Bypass valve opened
6/15/2010	2:38:18 PM	Helium MFC set to  0.000000
6/15/2010	2:38:18 PM	H2 MFC set to  0.000000
6/15/2010	2:38:18 PM	BCl3 MFC set to  0.000000
6/15/2010	2:38:18 PM	PHl3 MFC set to  0.000000
6/15/2010	2:38:18 PM	SiCl4 MFC set to  0.000000
6/15/2010	2:38:18 PM	Bypass solenoid MFC set to  0.000000
6/15/2010	2:38:18 PM	Tube furnace set to 0
6/15/2010	2:38:18 PM	Helium valve closed
6/15/2010	2:38:18 PM	H2 valve closed
6/15/2010	2:38:18 PM	BCl3 valve closed
6/15/2010	2:38:18 PM	PH3 valve closed
6/15/2010	2:38:18 PM	SiCl4 pre valve closed
6/15/2010	2:38:18 PM	SiCl4 post valve closed
6/15/2010	2:38:18 PM	Bubbler valve closed
6/15/2010	2:38:18 PM	Main Vac valve opened
6/15/2010	2:38:18 PM	Bypass valve opened
6/15/2010	2:38:18 PM	Helium MFC set to  0.000000
6/15/2010	2:38:18 PM	H2 MFC set to  0.000000
6/15/2010	2:38:18 PM	BCl3 MFC set to  0.000000
6/15/2010	2:38:18 PM	PHl3 MFC set to  0.000000
6/15/2010	2:38:18 PM	SiCl4 MFC set to  0.000000
6/15/2010	2:38:18 PM	Bypass solenoid MFC set to  0.000000
6/15/2010	2:38:19 PM	Tube furnace set to 0
6/15/2010	2:38:19 PM	Run finished at 2:38 PM
6/15/2010	2:38:19 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/15/2010	2:38:24 PM	Helium MFC set to  100.000000
6/15/2010	2:38:24 PM	Helium valve opened
6/15/2010	2:44:55 PM	Helium valve closed
6/15/2010	2:45:23 PM	Helium MFC set to  0.000000
6/15/2010	2:53:53 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
6/15/2010	2:53:59 PM	Recipe started at 2:53 PM
6/15/2010	2:53:59 PM	H2 valve closed
6/15/2010	2:53:59 PM	BCl3 valve closed
6/15/2010	2:53:59 PM	PH3 valve closed
6/15/2010	2:53:59 PM	SiCl4 pre valve closed
6/15/2010	2:53:59 PM	SiCl4 post valve closed
6/15/2010	2:53:59 PM	Main Vac valve closed
6/15/2010	2:53:59 PM	Bypass valve closed
6/15/2010	2:53:59 PM	Bubbler valve closed
6/15/2010	2:53:59 PM	Helium valve opened
6/15/2010	2:53:59 PM	Helium MFC set to  500.000000
6/15/2010	2:53:59 PM	H2 MFC set to  0.000000
6/15/2010	2:53:59 PM	BCl3 MFC set to  0.000000
6/15/2010	2:53:59 PM	PHl3 MFC set to  0.000000
6/15/2010	2:53:59 PM	SiCl4 MFC set to  0.000000
6/15/2010	2:53:59 PM	Bypass solenoid MFC set to  0.000000
6/15/2010	2:53:59 PM	Tube furnace set to 0
6/15/2010	2:55:17 PM	Helium valve closed
6/15/2010	2:55:17 PM	H2 valve closed
6/15/2010	2:55:17 PM	BCl3 valve closed
6/15/2010	2:55:17 PM	PH3 valve closed
6/15/2010	2:55:17 PM	SiCl4 pre valve closed
6/15/2010	2:55:17 PM	SiCl4 post valve closed
6/15/2010	2:55:17 PM	Main Vac valve closed
6/15/2010	2:55:17 PM	Bypass valve closed
6/15/2010	2:55:17 PM	Bubbler valve closed
6/15/2010	2:55:17 PM	Helium MFC set to  0.000000
6/15/2010	2:55:17 PM	H2 MFC set to  0.000000
6/15/2010	2:55:17 PM	BCl3 MFC set to  0.000000
6/15/2010	2:55:17 PM	PHl3 MFC set to  0.000000
6/15/2010	2:55:17 PM	SiCl4 MFC set to  0.000000
6/15/2010	2:55:17 PM	Bypass solenoid MFC set to  0.000000
6/15/2010	2:55:17 PM	Tube furnace set to 0
6/15/2010	2:55:32 PM	Helium valve closed
6/15/2010	2:55:32 PM	H2 valve closed
6/15/2010	2:55:32 PM	BCl3 valve closed
6/15/2010	2:55:32 PM	PH3 valve closed
6/15/2010	2:55:32 PM	SiCl4 pre valve closed
6/15/2010	2:55:32 PM	SiCl4 post valve closed
6/15/2010	2:55:32 PM	Main Vac valve closed
6/15/2010	2:55:32 PM	Bubbler valve closed
6/15/2010	2:55:32 PM	Bypass valve opened
6/15/2010	2:55:32 PM	Helium MFC set to  0.000000
6/15/2010	2:55:32 PM	H2 MFC set to  0.000000
6/15/2010	2:55:32 PM	BCl3 MFC set to  0.000000
6/15/2010	2:55:32 PM	PHl3 MFC set to  0.000000
6/15/2010	2:55:32 PM	SiCl4 MFC set to  0.000000
6/15/2010	2:55:32 PM	Bypass solenoid MFC set to  0.000000
6/15/2010	2:55:32 PM	Tube furnace set to 0
6/15/2010	2:56:04 PM	Helium valve closed
6/15/2010	2:56:04 PM	H2 valve closed
6/15/2010	2:56:04 PM	BCl3 valve closed
6/15/2010	2:56:04 PM	PH3 valve closed
6/15/2010	2:56:04 PM	SiCl4 pre valve closed
6/15/2010	2:56:04 PM	SiCl4 post valve closed
6/15/2010	2:56:04 PM	Bubbler valve closed
6/15/2010	2:56:04 PM	Main Vac valve opened
6/15/2010	2:56:04 PM	Bypass valve opened
6/15/2010	2:56:04 PM	Helium MFC set to  0.000000
6/15/2010	2:56:04 PM	H2 MFC set to  0.000000
6/15/2010	2:56:04 PM	BCl3 MFC set to  0.000000
6/15/2010	2:56:04 PM	PHl3 MFC set to  0.000000
6/15/2010	2:56:04 PM	SiCl4 MFC set to  0.000000
6/15/2010	2:56:04 PM	Bypass solenoid MFC set to  0.000000
6/15/2010	2:56:04 PM	Tube furnace set to 0
6/15/2010	3:01:04 PM	H2 valve closed
6/15/2010	3:01:04 PM	BCl3 valve closed
6/15/2010	3:01:04 PM	PH3 valve closed
6/15/2010	3:01:04 PM	SiCl4 pre valve closed
6/15/2010	3:01:04 PM	SiCl4 post valve closed
6/15/2010	3:01:04 PM	Main Vac valve closed
6/15/2010	3:01:04 PM	Bypass valve closed
6/15/2010	3:01:04 PM	Bubbler valve closed
6/15/2010	3:01:04 PM	Helium valve opened
6/15/2010	3:01:04 PM	Helium MFC set to  500.000000
6/15/2010	3:01:04 PM	H2 MFC set to  0.000000
6/15/2010	3:01:04 PM	BCl3 MFC set to  0.000000
6/15/2010	3:01:04 PM	PHl3 MFC set to  0.000000
6/15/2010	3:01:04 PM	SiCl4 MFC set to  0.000000
6/15/2010	3:01:04 PM	Bypass solenoid MFC set to  0.000000
6/15/2010	3:01:05 PM	Tube furnace set to 0
6/15/2010	3:02:22 PM	Helium valve closed
6/15/2010	3:02:22 PM	H2 valve closed
6/15/2010	3:02:22 PM	BCl3 valve closed
6/15/2010	3:02:22 PM	PH3 valve closed
6/15/2010	3:02:22 PM	SiCl4 pre valve closed
6/15/2010	3:02:22 PM	SiCl4 post valve closed
6/15/2010	3:02:22 PM	Main Vac valve closed
6/15/2010	3:02:22 PM	Bypass valve closed
6/15/2010	3:02:22 PM	Bubbler valve closed
6/15/2010	3:02:22 PM	Helium MFC set to  0.000000
6/15/2010	3:02:22 PM	H2 MFC set to  0.000000
6/15/2010	3:02:22 PM	BCl3 MFC set to  0.000000
6/15/2010	3:02:22 PM	PHl3 MFC set to  0.000000
6/15/2010	3:02:22 PM	SiCl4 MFC set to  0.000000
6/15/2010	3:02:22 PM	Bypass solenoid MFC set to  0.000000
6/15/2010	3:02:22 PM	Tube furnace set to 0
6/15/2010	3:02:37 PM	Helium valve closed
6/15/2010	3:02:37 PM	H2 valve closed
6/15/2010	3:02:37 PM	BCl3 valve closed
6/15/2010	3:02:37 PM	PH3 valve closed
6/15/2010	3:02:38 PM	SiCl4 pre valve closed
6/15/2010	3:02:38 PM	SiCl4 post valve closed
6/15/2010	3:02:38 PM	Main Vac valve closed
6/15/2010	3:02:38 PM	Bubbler valve closed
6/15/2010	3:02:38 PM	Bypass valve opened
6/15/2010	3:02:38 PM	Helium MFC set to  0.000000
6/15/2010	3:02:38 PM	H2 MFC set to  0.000000
6/15/2010	3:02:38 PM	BCl3 MFC set to  0.000000
6/15/2010	3:02:38 PM	PHl3 MFC set to  0.000000
6/15/2010	3:02:38 PM	SiCl4 MFC set to  0.000000
6/15/2010	3:02:38 PM	Bypass solenoid MFC set to  0.000000
6/15/2010	3:02:38 PM	Tube furnace set to 0
6/15/2010	3:03:10 PM	Helium valve closed
6/15/2010	3:03:10 PM	H2 valve closed
6/15/2010	3:03:10 PM	BCl3 valve closed
6/15/2010	3:03:10 PM	PH3 valve closed
6/15/2010	3:03:10 PM	SiCl4 pre valve closed
6/15/2010	3:03:10 PM	SiCl4 post valve closed
6/15/2010	3:03:10 PM	Bubbler valve closed
6/15/2010	3:03:10 PM	Main Vac valve opened
6/15/2010	3:03:10 PM	Bypass valve opened
6/15/2010	3:03:10 PM	Helium MFC set to  0.000000
6/15/2010	3:03:10 PM	H2 MFC set to  0.000000
6/15/2010	3:03:10 PM	BCl3 MFC set to  0.000000
6/15/2010	3:03:10 PM	PHl3 MFC set to  0.000000
6/15/2010	3:03:10 PM	SiCl4 MFC set to  0.000000
6/15/2010	3:03:10 PM	Bypass solenoid MFC set to  0.000000
6/15/2010	3:03:10 PM	Tube furnace set to 0
6/15/2010	3:08:10 PM	H2 valve closed
6/15/2010	3:08:10 PM	BCl3 valve closed
6/15/2010	3:08:10 PM	PH3 valve closed
6/15/2010	3:08:10 PM	SiCl4 pre valve closed
6/15/2010	3:08:10 PM	SiCl4 post valve closed
6/15/2010	3:08:10 PM	Main Vac valve closed
6/15/2010	3:08:10 PM	Bypass valve closed
6/15/2010	3:08:10 PM	Bubbler valve closed
6/15/2010	3:08:10 PM	Helium valve opened
6/15/2010	3:08:10 PM	Helium MFC set to  500.000000
6/15/2010	3:08:10 PM	H2 MFC set to  0.000000
6/15/2010	3:08:10 PM	BCl3 MFC set to  0.000000
6/15/2010	3:08:10 PM	PHl3 MFC set to  0.000000
6/15/2010	3:08:10 PM	SiCl4 MFC set to  0.000000
6/15/2010	3:08:10 PM	Bypass solenoid MFC set to  0.000000
6/15/2010	3:08:10 PM	Tube furnace set to 0
6/15/2010	3:09:28 PM	Helium valve closed
6/15/2010	3:09:28 PM	H2 valve closed
6/15/2010	3:09:28 PM	BCl3 valve closed
6/15/2010	3:09:28 PM	PH3 valve closed
6/15/2010	3:09:28 PM	SiCl4 pre valve closed
6/15/2010	3:09:28 PM	SiCl4 post valve closed
6/15/2010	3:09:28 PM	Main Vac valve closed
6/15/2010	3:09:28 PM	Bypass valve closed
6/15/2010	3:09:28 PM	Bubbler valve closed
6/15/2010	3:09:28 PM	Helium MFC set to  0.000000
6/15/2010	3:09:28 PM	H2 MFC set to  0.000000
6/15/2010	3:09:28 PM	BCl3 MFC set to  0.000000
6/15/2010	3:09:28 PM	PHl3 MFC set to  0.000000
6/15/2010	3:09:28 PM	SiCl4 MFC set to  0.000000
6/15/2010	3:09:28 PM	Bypass solenoid MFC set to  0.000000
6/15/2010	3:09:28 PM	Tube furnace set to 0
6/15/2010	3:09:43 PM	Helium valve closed
6/15/2010	3:09:43 PM	H2 valve closed
6/15/2010	3:09:43 PM	BCl3 valve closed
6/15/2010	3:09:43 PM	PH3 valve closed
6/15/2010	3:09:43 PM	SiCl4 pre valve closed
6/15/2010	3:09:43 PM	SiCl4 post valve closed
6/15/2010	3:09:43 PM	Main Vac valve closed
6/15/2010	3:09:43 PM	Bubbler valve closed
6/15/2010	3:09:43 PM	Bypass valve opened
6/15/2010	3:09:43 PM	Helium MFC set to  0.000000
6/15/2010	3:09:43 PM	H2 MFC set to  0.000000
6/15/2010	3:09:43 PM	BCl3 MFC set to  0.000000
6/15/2010	3:09:43 PM	PHl3 MFC set to  0.000000
6/15/2010	3:09:43 PM	SiCl4 MFC set to  0.000000
6/15/2010	3:09:43 PM	Bypass solenoid MFC set to  0.000000
6/15/2010	3:09:43 PM	Tube furnace set to 0
6/15/2010	3:10:15 PM	Helium valve closed
6/15/2010	3:10:15 PM	H2 valve closed
6/15/2010	3:10:15 PM	BCl3 valve closed
6/15/2010	3:10:15 PM	PH3 valve closed
6/15/2010	3:10:15 PM	SiCl4 pre valve closed
6/15/2010	3:10:15 PM	SiCl4 post valve closed
6/15/2010	3:10:15 PM	Bubbler valve closed
6/15/2010	3:10:15 PM	Main Vac valve opened
6/15/2010	3:10:15 PM	Bypass valve opened
6/15/2010	3:10:15 PM	Helium MFC set to  0.000000
6/15/2010	3:10:15 PM	H2 MFC set to  0.000000
6/15/2010	3:10:15 PM	BCl3 MFC set to  0.000000
6/15/2010	3:10:15 PM	PHl3 MFC set to  0.000000
6/15/2010	3:10:15 PM	SiCl4 MFC set to  0.000000
6/15/2010	3:10:15 PM	Bypass solenoid MFC set to  0.000000
6/15/2010	3:10:15 PM	Tube furnace set to 0
6/15/2010	3:15:15 PM	Helium valve closed
6/15/2010	3:15:15 PM	H2 valve closed
6/15/2010	3:15:15 PM	BCl3 valve closed
6/15/2010	3:15:15 PM	PH3 valve closed
6/15/2010	3:15:15 PM	SiCl4 pre valve closed
6/15/2010	3:15:15 PM	SiCl4 post valve closed
6/15/2010	3:15:15 PM	Bubbler valve closed
6/15/2010	3:15:15 PM	Main Vac valve opened
6/15/2010	3:15:15 PM	Bypass valve opened
6/15/2010	3:15:15 PM	Helium MFC set to  0.000000
6/15/2010	3:15:15 PM	H2 MFC set to  0.000000
6/15/2010	3:15:15 PM	BCl3 MFC set to  0.000000
6/15/2010	3:15:15 PM	PHl3 MFC set to  0.000000
6/15/2010	3:15:15 PM	SiCl4 MFC set to  0.000000
6/15/2010	3:15:15 PM	Bypass solenoid MFC set to  0.000000
6/15/2010	3:15:16 PM	Tube furnace set to 0
6/15/2010	3:15:17 PM	Run finished at 3:15 PM
6/15/2010	3:15:17 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
6/15/2010	3:49:05 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
6/15/2010	3:49:05 PM	Recipe started at 3:49 PM
6/15/2010	3:49:05 PM	Helium valve closed
6/15/2010	3:49:05 PM	H2 valve closed
6/15/2010	3:49:05 PM	BCl3 valve closed
6/15/2010	3:49:05 PM	PH3 valve closed
6/15/2010	3:49:05 PM	SiCl4 pre valve closed
6/15/2010	3:49:05 PM	SiCl4 post valve closed
6/15/2010	3:49:05 PM	Main Vac valve closed
6/15/2010	3:49:05 PM	Bypass valve closed
6/15/2010	3:49:05 PM	Bubbler valve closed
6/15/2010	3:49:05 PM	Helium MFC set to  0.000000
6/15/2010	3:49:05 PM	H2 MFC set to  0.000000
6/15/2010	3:49:05 PM	BCl3 MFC set to  0.000000
6/15/2010	3:49:05 PM	PHl3 MFC set to  0.000000
6/15/2010	3:49:05 PM	SiCl4 MFC set to  0.000000
6/15/2010	3:49:05 PM	Bypass solenoid MFC set to  0.000000
6/15/2010	3:49:05 PM	Tube furnace set to 0
6/15/2010	3:49:05 PM	Run finished at 3:49 PM
6/15/2010	3:49:05 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
6/15/2010	3:49:16 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/15/2010	3:49:17 PM	Recipe started at 3:49 PM
6/15/2010	3:49:17 PM	Helium valve closed
6/15/2010	3:49:17 PM	H2 valve closed
6/15/2010	3:49:17 PM	BCl3 valve closed
6/15/2010	3:49:17 PM	PH3 valve closed
6/15/2010	3:49:17 PM	SiCl4 pre valve closed
6/15/2010	3:49:17 PM	SiCl4 post valve closed
6/15/2010	3:49:17 PM	Main Vac valve closed
6/15/2010	3:49:17 PM	Bubbler valve closed
6/15/2010	3:49:17 PM	Bypass valve opened
6/15/2010	3:49:17 PM	Helium MFC set to  0.000000
6/15/2010	3:49:17 PM	H2 MFC set to  0.000000
6/15/2010	3:49:17 PM	BCl3 MFC set to  0.000000
6/15/2010	3:49:17 PM	PHl3 MFC set to  0.000000
6/15/2010	3:49:17 PM	SiCl4 MFC set to  0.000000
6/15/2010	3:49:17 PM	Bypass solenoid MFC set to  0.000000
6/15/2010	3:49:17 PM	Tube furnace set to 0
6/15/2010	3:49:17 PM	Helium valve closed
6/15/2010	3:49:17 PM	H2 valve closed
6/15/2010	3:49:17 PM	BCl3 valve closed
6/15/2010	3:49:17 PM	PH3 valve closed
6/15/2010	3:49:17 PM	SiCl4 pre valve closed
6/15/2010	3:49:17 PM	SiCl4 post valve closed
6/15/2010	3:49:17 PM	Bubbler valve closed
6/15/2010	3:49:17 PM	Main Vac valve opened
6/15/2010	3:49:17 PM	Bypass valve opened
6/15/2010	3:49:17 PM	Helium MFC set to  0.000000
6/15/2010	3:49:17 PM	H2 MFC set to  0.000000
6/15/2010	3:49:17 PM	BCl3 MFC set to  0.000000
6/15/2010	3:49:17 PM	PHl3 MFC set to  0.000000
6/15/2010	3:49:17 PM	SiCl4 MFC set to  0.000000
6/15/2010	3:49:17 PM	Bypass solenoid MFC set to  0.000000
6/15/2010	3:49:18 PM	Tube furnace set to 0
6/15/2010	3:49:18 PM	Run finished at 3:49 PM
6/15/2010	3:49:18 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/15/2010	3:50:09 PM	Recipe started at 3:50 PM
6/15/2010	3:50:09 PM	Helium valve closed
6/15/2010	3:50:09 PM	BCl3 valve closed
6/15/2010	3:50:09 PM	PH3 valve closed
6/15/2010	3:50:09 PM	SiCl4 pre valve closed
6/15/2010	3:50:09 PM	SiCl4 post valve closed
6/15/2010	3:50:09 PM	Main Vac valve closed
6/15/2010	3:50:09 PM	Bypass valve closed
6/15/2010	3:50:09 PM	Bubbler valve closed
6/15/2010	3:50:09 PM	H2 valve opened
6/15/2010	3:50:09 PM	Helium MFC set to  0.000000
6/15/2010	3:50:09 PM	H2 MFC set to  500.000000
6/15/2010	3:50:09 PM	BCl3 MFC set to  0.000000
6/15/2010	3:50:09 PM	PHl3 MFC set to  0.000000
6/15/2010	3:50:09 PM	SiCl4 MFC set to  0.000000
6/15/2010	3:50:09 PM	Bypass solenoid MFC set to  0.000000
6/15/2010	3:50:09 PM	Tube furnace set to 0
6/15/2010	3:51:29 PM	Helium valve closed
6/15/2010	3:51:29 PM	BCl3 valve closed
6/15/2010	3:51:29 PM	PH3 valve closed
6/15/2010	3:51:29 PM	SiCl4 pre valve closed
6/15/2010	3:51:29 PM	SiCl4 post valve closed
6/15/2010	3:51:29 PM	Main Vac valve closed
6/15/2010	3:51:29 PM	Bypass valve closed
6/15/2010	3:51:29 PM	H2 valve opened
6/15/2010	3:51:29 PM	Bubbler valve opened
6/15/2010	3:51:29 PM	Helium MFC set to  0.000000
6/15/2010	3:51:29 PM	H2 MFC set to  500.000000
6/15/2010	3:51:29 PM	BCl3 MFC set to  0.000000
6/15/2010	3:51:29 PM	PHl3 MFC set to  0.000000
6/15/2010	3:51:29 PM	SiCl4 MFC set to  0.000000
6/15/2010	3:51:29 PM	Bypass solenoid MFC set to  0.000000
6/15/2010	3:51:29 PM	Tube furnace set to 1000
6/15/2010	4:11:29 PM	Helium valve closed
6/15/2010	4:11:29 PM	PH3 valve closed
6/15/2010	4:11:29 PM	Main Vac valve closed
6/15/2010	4:11:29 PM	Bypass valve closed
6/15/2010	4:11:29 PM	H2 valve opened
6/15/2010	4:11:29 PM	BCl3 valve opened
6/15/2010	4:11:29 PM	SiCl4 pre valve opened
6/15/2010	4:11:29 PM	SiCl4 post valve opened
6/15/2010	4:11:29 PM	Bubbler valve opened
6/15/2010	4:11:29 PM	Helium MFC set to  0.000000
6/15/2010	4:11:29 PM	H2 MFC set to  500.000000
6/15/2010	4:11:29 PM	BCl3 MFC set to  7.000000
6/15/2010	4:11:29 PM	PHl3 MFC set to  0.000000
6/15/2010	4:11:29 PM	SiCl4 MFC set to  50.000000
6/15/2010	4:11:29 PM	Bypass solenoid MFC set to  0.000000
6/15/2010	4:11:29 PM	Tube furnace set to 1000
6/15/2010	4:26:29 PM	H2 valve closed
6/15/2010	4:26:29 PM	BCl3 valve closed
6/15/2010	4:26:29 PM	PH3 valve closed
6/15/2010	4:26:29 PM	SiCl4 pre valve closed
6/15/2010	4:26:29 PM	SiCl4 post valve closed
6/15/2010	4:26:29 PM	Main Vac valve closed
6/15/2010	4:26:29 PM	Bypass valve closed
6/15/2010	4:26:29 PM	Helium valve opened
6/15/2010	4:26:29 PM	Bubbler valve opened
6/15/2010	4:26:29 PM	Helium MFC set to  500.000000
6/15/2010	4:26:29 PM	H2 MFC set to  0.000000
6/15/2010	4:26:29 PM	BCl3 MFC set to  0.000000
6/15/2010	4:26:29 PM	PHl3 MFC set to  0.000000
6/15/2010	4:26:29 PM	SiCl4 MFC set to  0.000000
6/15/2010	4:26:29 PM	Bypass solenoid MFC set to  0.000000
6/15/2010	4:26:29 PM	Tube furnace set to 0
6/15/2010	4:46:29 PM	Helium valve closed
6/15/2010	4:46:29 PM	H2 valve closed
6/15/2010	4:46:29 PM	BCl3 valve closed
6/15/2010	4:46:29 PM	PH3 valve closed
6/15/2010	4:46:29 PM	SiCl4 pre valve closed
6/15/2010	4:46:29 PM	SiCl4 post valve closed
6/15/2010	4:46:29 PM	Main Vac valve closed
6/15/2010	4:46:29 PM	Bypass valve closed
6/15/2010	4:46:29 PM	Bubbler valve closed
6/15/2010	4:46:29 PM	Helium MFC set to  0.000000
6/15/2010	4:46:29 PM	H2 MFC set to  0.000000
6/15/2010	4:46:29 PM	BCl3 MFC set to  0.000000
6/15/2010	4:46:29 PM	PHl3 MFC set to  0.000000
6/15/2010	4:46:29 PM	SiCl4 MFC set to  0.000000
6/15/2010	4:46:29 PM	Bypass solenoid MFC set to  0.000000
6/15/2010	4:46:29 PM	Tube furnace set to 0
6/15/2010	4:46:30 PM	Run finished at 4:46 PM
6/15/2010	4:54:52 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/15/2010	4:54:53 PM	Recipe started at 4:54 PM
6/15/2010	4:54:53 PM	H2 valve closed
6/15/2010	4:54:53 PM	BCl3 valve closed
6/15/2010	4:54:53 PM	PH3 valve closed
6/15/2010	4:54:53 PM	SiCl4 pre valve closed
6/15/2010	4:54:53 PM	SiCl4 post valve closed
6/15/2010	4:54:53 PM	Main Vac valve closed
6/15/2010	4:54:53 PM	Bypass valve closed
6/15/2010	4:54:53 PM	Bubbler valve closed
6/15/2010	4:54:53 PM	Helium valve opened
6/15/2010	4:54:53 PM	Helium MFC set to  500.000000
6/15/2010	4:54:53 PM	H2 MFC set to  0.000000
6/15/2010	4:54:53 PM	BCl3 MFC set to  0.000000
6/15/2010	4:54:53 PM	PHl3 MFC set to  0.000000
6/15/2010	4:54:53 PM	SiCl4 MFC set to  0.000000
6/15/2010	4:54:53 PM	Bypass solenoid MFC set to  0.000000
6/15/2010	4:54:53 PM	Tube furnace set to 0
6/15/2010	4:54:57 PM	Helium valve closed
6/15/2010	4:54:57 PM	H2 valve closed
6/15/2010	4:54:57 PM	BCl3 valve closed
6/15/2010	4:54:57 PM	PH3 valve closed
6/15/2010	4:54:57 PM	SiCl4 pre valve closed
6/15/2010	4:54:57 PM	SiCl4 post valve closed
6/15/2010	4:54:57 PM	Main Vac valve closed
6/15/2010	4:54:57 PM	Bypass valve closed
6/15/2010	4:54:57 PM	Bubbler valve closed
6/15/2010	4:54:57 PM	Helium MFC set to  0.000000
6/15/2010	4:54:57 PM	H2 MFC set to  0.000000
6/15/2010	4:54:57 PM	BCl3 MFC set to  0.000000
6/15/2010	4:54:57 PM	PHl3 MFC set to  0.000000
6/15/2010	4:54:57 PM	SiCl4 MFC set to  0.000000
6/15/2010	4:54:57 PM	Bypass solenoid MFC set to  0.000000
6/15/2010	4:54:57 PM	Tube furnace set to 0
6/15/2010	4:54:57 PM	Run finished at 4:54 PM
6/15/2010	4:54:57 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/15/2010	5:13:20 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/15/2010	5:13:21 PM	Recipe started at 5:13 PM
6/15/2010	5:13:21 PM	Helium valve closed
6/15/2010	5:13:21 PM	H2 valve closed
6/15/2010	5:13:21 PM	BCl3 valve closed
6/15/2010	5:13:21 PM	PH3 valve closed
6/15/2010	5:13:21 PM	SiCl4 pre valve closed
6/15/2010	5:13:21 PM	SiCl4 post valve closed
6/15/2010	5:13:21 PM	Main Vac valve closed
6/15/2010	5:13:21 PM	Bubbler valve closed
6/15/2010	5:13:21 PM	Bypass valve opened
6/15/2010	5:13:21 PM	Helium MFC set to  0.000000
6/15/2010	5:13:21 PM	H2 MFC set to  0.000000
6/15/2010	5:13:21 PM	BCl3 MFC set to  0.000000
6/15/2010	5:13:21 PM	PHl3 MFC set to  0.000000
6/15/2010	5:13:21 PM	SiCl4 MFC set to  0.000000
6/15/2010	5:13:21 PM	Bypass solenoid MFC set to  0.000000
6/15/2010	5:13:21 PM	Tube furnace set to 0
6/15/2010	5:14:10 PM	Helium valve closed
6/15/2010	5:14:10 PM	H2 valve closed
6/15/2010	5:14:10 PM	BCl3 valve closed
6/15/2010	5:14:10 PM	PH3 valve closed
6/15/2010	5:14:10 PM	SiCl4 pre valve closed
6/15/2010	5:14:10 PM	SiCl4 post valve closed
6/15/2010	5:14:10 PM	Bubbler valve closed
6/15/2010	5:14:10 PM	Main Vac valve opened
6/15/2010	5:14:10 PM	Bypass valve opened
6/15/2010	5:14:10 PM	Helium MFC set to  0.000000
6/15/2010	5:14:10 PM	H2 MFC set to  0.000000
6/15/2010	5:14:10 PM	BCl3 MFC set to  0.000000
6/15/2010	5:14:10 PM	PHl3 MFC set to  0.000000
6/15/2010	5:14:10 PM	SiCl4 MFC set to  0.000000
6/15/2010	5:14:10 PM	Bypass solenoid MFC set to  0.000000
6/15/2010	5:14:10 PM	Tube furnace set to 0
6/15/2010	5:14:10 PM	Run finished at 5:14 PM
6/15/2010	5:14:10 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/15/2010	5:14:22 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
6/15/2010	5:14:27 PM	Recipe started at 5:14 PM
6/15/2010	5:14:27 PM	H2 valve closed
6/15/2010	5:14:27 PM	BCl3 valve closed
6/15/2010	5:14:27 PM	PH3 valve closed
6/15/2010	5:14:27 PM	SiCl4 pre valve closed
6/15/2010	5:14:27 PM	SiCl4 post valve closed
6/15/2010	5:14:27 PM	Main Vac valve closed
6/15/2010	5:14:27 PM	Bypass valve closed
6/15/2010	5:14:27 PM	Bubbler valve closed
6/15/2010	5:14:27 PM	Helium valve opened
6/15/2010	5:14:27 PM	Helium MFC set to  500.000000
6/15/2010	5:14:27 PM	H2 MFC set to  0.000000
6/15/2010	5:14:27 PM	BCl3 MFC set to  0.000000
6/15/2010	5:14:27 PM	PHl3 MFC set to  0.000000
6/15/2010	5:14:27 PM	SiCl4 MFC set to  0.000000
6/15/2010	5:14:27 PM	Bypass solenoid MFC set to  0.000000
6/15/2010	5:14:27 PM	Tube furnace set to 0
6/15/2010	5:15:47 PM	Helium valve closed
6/15/2010	5:15:47 PM	H2 valve closed
6/15/2010	5:15:47 PM	BCl3 valve closed
6/15/2010	5:15:47 PM	PH3 valve closed
6/15/2010	5:15:47 PM	SiCl4 pre valve closed
6/15/2010	5:15:47 PM	SiCl4 post valve closed
6/15/2010	5:15:47 PM	Main Vac valve closed
6/15/2010	5:15:47 PM	Bypass valve closed
6/15/2010	5:15:47 PM	Bubbler valve closed
6/15/2010	5:15:47 PM	Helium MFC set to  0.000000
6/15/2010	5:15:47 PM	H2 MFC set to  0.000000
6/15/2010	5:15:47 PM	BCl3 MFC set to  0.000000
6/15/2010	5:15:47 PM	PHl3 MFC set to  0.000000
6/15/2010	5:15:47 PM	SiCl4 MFC set to  0.000000
6/15/2010	5:15:47 PM	Bypass solenoid MFC set to  0.000000
6/15/2010	5:15:47 PM	Tube furnace set to 0
6/15/2010	5:16:02 PM	Helium valve closed
6/15/2010	5:16:02 PM	H2 valve closed
6/15/2010	5:16:02 PM	BCl3 valve closed
6/15/2010	5:16:02 PM	PH3 valve closed
6/15/2010	5:16:02 PM	SiCl4 pre valve closed
6/15/2010	5:16:02 PM	SiCl4 post valve closed
6/15/2010	5:16:02 PM	Main Vac valve closed
6/15/2010	5:16:02 PM	Bubbler valve closed
6/15/2010	5:16:02 PM	Bypass valve opened
6/15/2010	5:16:02 PM	Helium MFC set to  0.000000
6/15/2010	5:16:02 PM	H2 MFC set to  0.000000
6/15/2010	5:16:02 PM	BCl3 MFC set to  0.000000
6/15/2010	5:16:02 PM	PHl3 MFC set to  0.000000
6/15/2010	5:16:02 PM	SiCl4 MFC set to  0.000000
6/15/2010	5:16:02 PM	Bypass solenoid MFC set to  0.000000
6/15/2010	5:16:02 PM	Tube furnace set to 0
6/15/2010	5:16:35 PM	Helium valve closed
6/15/2010	5:16:35 PM	H2 valve closed
6/15/2010	5:16:36 PM	BCl3 valve closed
6/15/2010	5:16:36 PM	PH3 valve closed
6/15/2010	5:16:36 PM	SiCl4 pre valve closed
6/15/2010	5:16:36 PM	SiCl4 post valve closed
6/15/2010	5:16:36 PM	Bubbler valve closed
6/15/2010	5:16:36 PM	Main Vac valve opened
6/15/2010	5:16:36 PM	Bypass valve opened
6/15/2010	5:16:36 PM	Helium MFC set to  0.000000
6/15/2010	5:16:36 PM	H2 MFC set to  0.000000
6/15/2010	5:16:36 PM	BCl3 MFC set to  0.000000
6/15/2010	5:16:36 PM	PHl3 MFC set to  0.000000
6/15/2010	5:16:36 PM	SiCl4 MFC set to  0.000000
6/15/2010	5:16:36 PM	Bypass solenoid MFC set to  0.000000
6/15/2010	5:16:36 PM	Tube furnace set to 0
6/15/2010	5:21:36 PM	H2 valve closed
6/15/2010	5:21:36 PM	BCl3 valve closed
6/15/2010	5:21:36 PM	PH3 valve closed
6/15/2010	5:21:36 PM	SiCl4 pre valve closed
6/15/2010	5:21:36 PM	SiCl4 post valve closed
6/15/2010	5:21:36 PM	Main Vac valve closed
6/15/2010	5:21:36 PM	Bypass valve closed
6/15/2010	5:21:36 PM	Bubbler valve closed
6/15/2010	5:21:36 PM	Helium valve opened
6/15/2010	5:21:36 PM	Helium MFC set to  500.000000
6/15/2010	5:21:36 PM	H2 MFC set to  0.000000
6/15/2010	5:21:36 PM	BCl3 MFC set to  0.000000
6/15/2010	5:21:36 PM	PHl3 MFC set to  0.000000
6/15/2010	5:21:36 PM	SiCl4 MFC set to  0.000000
6/15/2010	5:21:36 PM	Bypass solenoid MFC set to  0.000000
6/15/2010	5:21:36 PM	Tube furnace set to 0
6/15/2010	5:22:55 PM	Helium valve closed
6/15/2010	5:22:55 PM	H2 valve closed
6/15/2010	5:22:55 PM	BCl3 valve closed
6/15/2010	5:22:55 PM	PH3 valve closed
6/15/2010	5:22:55 PM	SiCl4 pre valve closed
6/15/2010	5:22:55 PM	SiCl4 post valve closed
6/15/2010	5:22:55 PM	Main Vac valve closed
6/15/2010	5:22:55 PM	Bypass valve closed
6/15/2010	5:22:55 PM	Bubbler valve closed
6/15/2010	5:22:55 PM	Helium MFC set to  0.000000
6/15/2010	5:22:55 PM	H2 MFC set to  0.000000
6/15/2010	5:22:55 PM	BCl3 MFC set to  0.000000
6/15/2010	5:22:55 PM	PHl3 MFC set to  0.000000
6/15/2010	5:22:55 PM	SiCl4 MFC set to  0.000000
6/15/2010	5:22:55 PM	Bypass solenoid MFC set to  0.000000
6/15/2010	5:22:55 PM	Tube furnace set to 0
6/15/2010	5:23:10 PM	Helium valve closed
6/15/2010	5:23:10 PM	H2 valve closed
6/15/2010	5:23:10 PM	BCl3 valve closed
6/15/2010	5:23:10 PM	PH3 valve closed
6/15/2010	5:23:10 PM	SiCl4 pre valve closed
6/15/2010	5:23:10 PM	SiCl4 post valve closed
6/15/2010	5:23:10 PM	Main Vac valve closed
6/15/2010	5:23:10 PM	Bubbler valve closed
6/15/2010	5:23:10 PM	Bypass valve opened
6/15/2010	5:23:10 PM	Helium MFC set to  0.000000
6/15/2010	5:23:10 PM	H2 MFC set to  0.000000
6/15/2010	5:23:10 PM	BCl3 MFC set to  0.000000
6/15/2010	5:23:10 PM	PHl3 MFC set to  0.000000
6/15/2010	5:23:10 PM	SiCl4 MFC set to  0.000000
6/15/2010	5:23:10 PM	Bypass solenoid MFC set to  0.000000
6/15/2010	5:23:10 PM	Tube furnace set to 0
6/15/2010	5:23:42 PM	Helium valve closed
6/15/2010	5:23:42 PM	H2 valve closed
6/15/2010	5:23:42 PM	BCl3 valve closed
6/15/2010	5:23:42 PM	PH3 valve closed
6/15/2010	5:23:43 PM	SiCl4 pre valve closed
6/15/2010	5:23:43 PM	SiCl4 post valve closed
6/15/2010	5:23:43 PM	Bubbler valve closed
6/15/2010	5:23:43 PM	Main Vac valve opened
6/15/2010	5:23:43 PM	Bypass valve opened
6/15/2010	5:23:43 PM	Helium MFC set to  0.000000
6/15/2010	5:23:43 PM	H2 MFC set to  0.000000
6/15/2010	5:23:43 PM	BCl3 MFC set to  0.000000
6/15/2010	5:23:43 PM	PHl3 MFC set to  0.000000
6/15/2010	5:23:43 PM	SiCl4 MFC set to  0.000000
6/15/2010	5:23:43 PM	Bypass solenoid MFC set to  0.000000
6/15/2010	5:23:43 PM	Tube furnace set to 0
6/15/2010	5:28:43 PM	H2 valve closed
6/15/2010	5:28:43 PM	BCl3 valve closed
6/15/2010	5:28:43 PM	PH3 valve closed
6/15/2010	5:28:43 PM	SiCl4 pre valve closed
6/15/2010	5:28:43 PM	SiCl4 post valve closed
6/15/2010	5:28:43 PM	Main Vac valve closed
6/15/2010	5:28:43 PM	Bypass valve closed
6/15/2010	5:28:43 PM	Bubbler valve closed
6/15/2010	5:28:43 PM	Helium valve opened
6/15/2010	5:28:43 PM	Helium MFC set to  500.000000
6/15/2010	5:28:43 PM	H2 MFC set to  0.000000
6/15/2010	5:28:43 PM	BCl3 MFC set to  0.000000
6/15/2010	5:28:43 PM	PHl3 MFC set to  0.000000
6/15/2010	5:28:43 PM	SiCl4 MFC set to  0.000000
6/15/2010	5:28:43 PM	Bypass solenoid MFC set to  0.000000
6/15/2010	5:28:43 PM	Tube furnace set to 0
6/15/2010	5:30:01 PM	Helium valve closed
6/15/2010	5:30:01 PM	H2 valve closed
6/15/2010	5:30:01 PM	BCl3 valve closed
6/15/2010	5:30:01 PM	PH3 valve closed
6/15/2010	5:30:01 PM	SiCl4 pre valve closed
6/15/2010	5:30:01 PM	SiCl4 post valve closed
6/15/2010	5:30:01 PM	Main Vac valve closed
6/15/2010	5:30:01 PM	Bypass valve closed
6/15/2010	5:30:01 PM	Bubbler valve closed
6/15/2010	5:30:01 PM	Helium MFC set to  0.000000
6/15/2010	5:30:01 PM	H2 MFC set to  0.000000
6/15/2010	5:30:01 PM	BCl3 MFC set to  0.000000
6/15/2010	5:30:01 PM	PHl3 MFC set to  0.000000
6/15/2010	5:30:01 PM	SiCl4 MFC set to  0.000000
6/15/2010	5:30:01 PM	Bypass solenoid MFC set to  0.000000
6/15/2010	5:30:02 PM	Tube furnace set to 0
6/15/2010	5:30:17 PM	Helium valve closed
6/15/2010	5:30:17 PM	H2 valve closed
6/15/2010	5:30:17 PM	BCl3 valve closed
6/15/2010	5:30:17 PM	PH3 valve closed
6/15/2010	5:30:17 PM	SiCl4 pre valve closed
6/15/2010	5:30:17 PM	SiCl4 post valve closed
6/15/2010	5:30:17 PM	Main Vac valve closed
6/15/2010	5:30:17 PM	Bubbler valve closed
6/15/2010	5:30:17 PM	Bypass valve opened
6/15/2010	5:30:17 PM	Helium MFC set to  0.000000
6/15/2010	5:30:17 PM	H2 MFC set to  0.000000
6/15/2010	5:30:17 PM	BCl3 MFC set to  0.000000
6/15/2010	5:30:17 PM	PHl3 MFC set to  0.000000
6/15/2010	5:30:17 PM	SiCl4 MFC set to  0.000000
6/15/2010	5:30:17 PM	Bypass solenoid MFC set to  0.000000
6/15/2010	5:30:17 PM	Tube furnace set to 0
6/15/2010	5:30:49 PM	Helium valve closed
6/15/2010	5:30:49 PM	H2 valve closed
6/15/2010	5:30:49 PM	BCl3 valve closed
6/15/2010	5:30:49 PM	PH3 valve closed
6/15/2010	5:30:49 PM	SiCl4 pre valve closed
6/15/2010	5:30:49 PM	SiCl4 post valve closed
6/15/2010	5:30:49 PM	Bubbler valve closed
6/15/2010	5:30:49 PM	Main Vac valve opened
6/15/2010	5:30:49 PM	Bypass valve opened
6/15/2010	5:30:49 PM	Helium MFC set to  0.000000
6/15/2010	5:30:49 PM	H2 MFC set to  0.000000
6/15/2010	5:30:49 PM	BCl3 MFC set to  0.000000
6/15/2010	5:30:49 PM	PHl3 MFC set to  0.000000
6/15/2010	5:30:49 PM	SiCl4 MFC set to  0.000000
6/15/2010	5:30:49 PM	Bypass solenoid MFC set to  0.000000
6/15/2010	5:30:49 PM	Tube furnace set to 0
6/15/2010	5:35:49 PM	Helium valve closed
6/15/2010	5:35:49 PM	H2 valve closed
6/15/2010	5:35:49 PM	BCl3 valve closed
6/15/2010	5:35:49 PM	PH3 valve closed
6/15/2010	5:35:49 PM	SiCl4 pre valve closed
6/15/2010	5:35:49 PM	SiCl4 post valve closed
6/15/2010	5:35:49 PM	Bubbler valve closed
6/15/2010	5:35:49 PM	Main Vac valve opened
6/15/2010	5:35:49 PM	Bypass valve opened
6/15/2010	5:35:49 PM	Helium MFC set to  0.000000
6/15/2010	5:35:49 PM	H2 MFC set to  0.000000
6/15/2010	5:35:49 PM	BCl3 MFC set to  0.000000
6/15/2010	5:35:49 PM	PHl3 MFC set to  0.000000
6/15/2010	5:35:49 PM	SiCl4 MFC set to  0.000000
6/15/2010	5:35:49 PM	Bypass solenoid MFC set to  0.000000
6/15/2010	5:35:49 PM	Tube furnace set to 0
6/15/2010	5:35:50 PM	Run finished at 5:35 PM
6/15/2010	5:35:50 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
6/15/2010	7:40:12 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
6/15/2010	7:40:18 PM	Recipe started at 7:40 PM
6/15/2010	7:40:18 PM	H2 valve closed
6/15/2010	7:40:18 PM	BCl3 valve closed
6/15/2010	7:40:18 PM	PH3 valve closed
6/15/2010	7:40:18 PM	SiCl4 pre valve closed
6/15/2010	7:40:18 PM	SiCl4 post valve closed
6/15/2010	7:40:18 PM	Main Vac valve closed
6/15/2010	7:40:18 PM	Bypass valve closed
6/15/2010	7:40:18 PM	Bubbler valve closed
6/15/2010	7:40:18 PM	Helium valve opened
6/15/2010	7:40:18 PM	Helium MFC set to  500.000000
6/15/2010	7:40:18 PM	H2 MFC set to  0.000000
6/15/2010	7:40:18 PM	BCl3 MFC set to  0.000000
6/15/2010	7:40:18 PM	PHl3 MFC set to  0.000000
6/15/2010	7:40:18 PM	SiCl4 MFC set to  0.000000
6/15/2010	7:40:18 PM	Bypass solenoid MFC set to  0.000000
6/15/2010	7:40:18 PM	Tube furnace set to 0
6/15/2010	7:41:39 PM	Helium valve closed
6/15/2010	7:41:39 PM	H2 valve closed
6/15/2010	7:41:39 PM	BCl3 valve closed
6/15/2010	7:41:39 PM	PH3 valve closed
6/15/2010	7:41:39 PM	SiCl4 pre valve closed
6/15/2010	7:41:39 PM	SiCl4 post valve closed
6/15/2010	7:41:39 PM	Main Vac valve closed
6/15/2010	7:41:39 PM	Bypass valve closed
6/15/2010	7:41:39 PM	Bubbler valve closed
6/15/2010	7:41:39 PM	Helium MFC set to  0.000000
6/15/2010	7:41:39 PM	H2 MFC set to  0.000000
6/15/2010	7:41:39 PM	BCl3 MFC set to  0.000000
6/15/2010	7:41:39 PM	PHl3 MFC set to  0.000000
6/15/2010	7:41:39 PM	SiCl4 MFC set to  0.000000
6/15/2010	7:41:39 PM	Bypass solenoid MFC set to  0.000000
6/15/2010	7:41:39 PM	Tube furnace set to 0
6/15/2010	7:41:54 PM	Helium valve closed
6/15/2010	7:41:54 PM	H2 valve closed
6/15/2010	7:41:54 PM	BCl3 valve closed
6/15/2010	7:41:54 PM	PH3 valve closed
6/15/2010	7:41:54 PM	SiCl4 pre valve closed
6/15/2010	7:41:54 PM	SiCl4 post valve closed
6/15/2010	7:41:54 PM	Main Vac valve closed
6/15/2010	7:41:54 PM	Bubbler valve closed
6/15/2010	7:41:54 PM	Bypass valve opened
6/15/2010	7:41:54 PM	Helium MFC set to  0.000000
6/15/2010	7:41:54 PM	H2 MFC set to  0.000000
6/15/2010	7:41:54 PM	BCl3 MFC set to  0.000000
6/15/2010	7:41:54 PM	PHl3 MFC set to  0.000000
6/15/2010	7:41:54 PM	SiCl4 MFC set to  0.000000
6/15/2010	7:41:54 PM	Bypass solenoid MFC set to  0.000000
6/15/2010	7:41:54 PM	Tube furnace set to 0
6/15/2010	7:42:28 PM	Helium valve closed
6/15/2010	7:42:28 PM	H2 valve closed
6/15/2010	7:42:28 PM	BCl3 valve closed
6/15/2010	7:42:28 PM	PH3 valve closed
6/15/2010	7:42:28 PM	SiCl4 pre valve closed
6/15/2010	7:42:28 PM	SiCl4 post valve closed
6/15/2010	7:42:28 PM	Bubbler valve closed
6/15/2010	7:42:28 PM	Main Vac valve opened
6/15/2010	7:42:28 PM	Bypass valve opened
6/15/2010	7:42:28 PM	Helium MFC set to  0.000000
6/15/2010	7:42:28 PM	H2 MFC set to  0.000000
6/15/2010	7:42:28 PM	BCl3 MFC set to  0.000000
6/15/2010	7:42:28 PM	PHl3 MFC set to  0.000000
6/15/2010	7:42:28 PM	SiCl4 MFC set to  0.000000
6/15/2010	7:42:28 PM	Bypass solenoid MFC set to  0.000000
6/15/2010	7:42:28 PM	Tube furnace set to 0
6/15/2010	7:45:22 PM	H2 valve closed
6/15/2010	7:45:22 PM	BCl3 valve closed
6/15/2010	7:45:22 PM	PH3 valve closed
6/15/2010	7:45:22 PM	SiCl4 pre valve closed
6/15/2010	7:45:22 PM	SiCl4 post valve closed
6/15/2010	7:45:22 PM	Main Vac valve closed
6/15/2010	7:45:22 PM	Bypass valve closed
6/15/2010	7:45:22 PM	Bubbler valve closed
6/15/2010	7:45:22 PM	Helium valve opened
6/15/2010	7:45:22 PM	Helium MFC set to  500.000000
6/15/2010	7:45:22 PM	H2 MFC set to  0.000000
6/15/2010	7:45:22 PM	BCl3 MFC set to  0.000000
6/15/2010	7:45:22 PM	PHl3 MFC set to  0.000000
6/15/2010	7:45:22 PM	SiCl4 MFC set to  0.000000
6/15/2010	7:45:22 PM	Bypass solenoid MFC set to  0.000000
6/15/2010	7:45:23 PM	Tube furnace set to 0
6/15/2010	7:46:43 PM	Helium valve closed
6/15/2010	7:46:43 PM	H2 valve closed
6/15/2010	7:46:43 PM	BCl3 valve closed
6/15/2010	7:46:43 PM	PH3 valve closed
6/15/2010	7:46:43 PM	SiCl4 pre valve closed
6/15/2010	7:46:43 PM	SiCl4 post valve closed
6/15/2010	7:46:43 PM	Main Vac valve closed
6/15/2010	7:46:43 PM	Bypass valve closed
6/15/2010	7:46:43 PM	Bubbler valve closed
6/15/2010	7:46:43 PM	Helium MFC set to  0.000000
6/15/2010	7:46:43 PM	H2 MFC set to  0.000000
6/15/2010	7:46:43 PM	BCl3 MFC set to  0.000000
6/15/2010	7:46:43 PM	PHl3 MFC set to  0.000000
6/15/2010	7:46:43 PM	SiCl4 MFC set to  0.000000
6/15/2010	7:46:43 PM	Bypass solenoid MFC set to  0.000000
6/15/2010	7:46:43 PM	Tube furnace set to 0
6/15/2010	7:46:58 PM	Helium valve closed
6/15/2010	7:46:58 PM	H2 valve closed
6/15/2010	7:46:58 PM	BCl3 valve closed
6/15/2010	7:46:58 PM	PH3 valve closed
6/15/2010	7:46:58 PM	SiCl4 pre valve closed
6/15/2010	7:46:58 PM	SiCl4 post valve closed
6/15/2010	7:46:58 PM	Main Vac valve closed
6/15/2010	7:46:58 PM	Bubbler valve closed
6/15/2010	7:46:58 PM	Bypass valve opened
6/15/2010	7:46:58 PM	Helium MFC set to  0.000000
6/15/2010	7:46:58 PM	H2 MFC set to  0.000000
6/15/2010	7:46:58 PM	BCl3 MFC set to  0.000000
6/15/2010	7:46:58 PM	PHl3 MFC set to  0.000000
6/15/2010	7:46:58 PM	SiCl4 MFC set to  0.000000
6/15/2010	7:46:58 PM	Bypass solenoid MFC set to  0.000000
6/15/2010	7:46:59 PM	Tube furnace set to 0
6/15/2010	7:47:32 PM	Helium valve closed
6/15/2010	7:47:32 PM	H2 valve closed
6/15/2010	7:47:32 PM	BCl3 valve closed
6/15/2010	7:47:32 PM	PH3 valve closed
6/15/2010	7:47:32 PM	SiCl4 pre valve closed
6/15/2010	7:47:32 PM	SiCl4 post valve closed
6/15/2010	7:47:32 PM	Bubbler valve closed
6/15/2010	7:47:32 PM	Main Vac valve opened
6/15/2010	7:47:32 PM	Bypass valve opened
6/15/2010	7:47:32 PM	Helium MFC set to  0.000000
6/15/2010	7:47:32 PM	H2 MFC set to  0.000000
6/15/2010	7:47:32 PM	BCl3 MFC set to  0.000000
6/15/2010	7:47:32 PM	PHl3 MFC set to  0.000000
6/15/2010	7:47:32 PM	SiCl4 MFC set to  0.000000
6/15/2010	7:47:32 PM	Bypass solenoid MFC set to  0.000000
6/15/2010	7:47:32 PM	Tube furnace set to 0
6/15/2010	7:49:07 PM	H2 valve closed
6/15/2010	7:49:07 PM	BCl3 valve closed
6/15/2010	7:49:07 PM	PH3 valve closed
6/15/2010	7:49:07 PM	SiCl4 pre valve closed
6/15/2010	7:49:07 PM	SiCl4 post valve closed
6/15/2010	7:49:07 PM	Main Vac valve closed
6/15/2010	7:49:07 PM	Bypass valve closed
6/15/2010	7:49:07 PM	Bubbler valve closed
6/15/2010	7:49:07 PM	Helium valve opened
6/15/2010	7:49:07 PM	Helium MFC set to  500.000000
6/15/2010	7:49:07 PM	H2 MFC set to  0.000000
6/15/2010	7:49:07 PM	BCl3 MFC set to  0.000000
6/15/2010	7:49:07 PM	PHl3 MFC set to  0.000000
6/15/2010	7:49:07 PM	SiCl4 MFC set to  0.000000
6/15/2010	7:49:07 PM	Bypass solenoid MFC set to  0.000000
6/15/2010	7:49:07 PM	Tube furnace set to 0
6/15/2010	7:50:28 PM	Helium valve closed
6/15/2010	7:50:28 PM	H2 valve closed
6/15/2010	7:50:28 PM	BCl3 valve closed
6/15/2010	7:50:28 PM	PH3 valve closed
6/15/2010	7:50:28 PM	SiCl4 pre valve closed
6/15/2010	7:50:28 PM	SiCl4 post valve closed
6/15/2010	7:50:28 PM	Main Vac valve closed
6/15/2010	7:50:28 PM	Bypass valve closed
6/15/2010	7:50:28 PM	Bubbler valve closed
6/15/2010	7:50:28 PM	Helium MFC set to  0.000000
6/15/2010	7:50:28 PM	H2 MFC set to  0.000000
6/15/2010	7:50:28 PM	BCl3 MFC set to  0.000000
6/15/2010	7:50:28 PM	PHl3 MFC set to  0.000000
6/15/2010	7:50:28 PM	SiCl4 MFC set to  0.000000
6/15/2010	7:50:28 PM	Bypass solenoid MFC set to  0.000000
6/15/2010	7:50:28 PM	Tube furnace set to 0
6/15/2010	7:50:43 PM	Helium valve closed
6/15/2010	7:50:43 PM	H2 valve closed
6/15/2010	7:50:43 PM	BCl3 valve closed
6/15/2010	7:50:43 PM	PH3 valve closed
6/15/2010	7:50:43 PM	SiCl4 pre valve closed
6/15/2010	7:50:43 PM	SiCl4 post valve closed
6/15/2010	7:50:43 PM	Main Vac valve closed
6/15/2010	7:50:43 PM	Bubbler valve closed
6/15/2010	7:50:43 PM	Bypass valve opened
6/15/2010	7:50:43 PM	Helium MFC set to  0.000000
6/15/2010	7:50:43 PM	H2 MFC set to  0.000000
6/15/2010	7:50:43 PM	BCl3 MFC set to  0.000000
6/15/2010	7:50:43 PM	PHl3 MFC set to  0.000000
6/15/2010	7:50:43 PM	SiCl4 MFC set to  0.000000
6/15/2010	7:50:43 PM	Bypass solenoid MFC set to  0.000000
6/15/2010	7:50:43 PM	Tube furnace set to 0
6/15/2010	7:51:16 PM	Helium valve closed
6/15/2010	7:51:16 PM	H2 valve closed
6/15/2010	7:51:16 PM	BCl3 valve closed
6/15/2010	7:51:16 PM	PH3 valve closed
6/15/2010	7:51:16 PM	SiCl4 pre valve closed
6/15/2010	7:51:16 PM	SiCl4 post valve closed
6/15/2010	7:51:16 PM	Bubbler valve closed
6/15/2010	7:51:16 PM	Main Vac valve opened
6/15/2010	7:51:16 PM	Bypass valve opened
6/15/2010	7:51:16 PM	Helium MFC set to  0.000000
6/15/2010	7:51:16 PM	H2 MFC set to  0.000000
6/15/2010	7:51:16 PM	BCl3 MFC set to  0.000000
6/15/2010	7:51:16 PM	PHl3 MFC set to  0.000000
6/15/2010	7:51:16 PM	SiCl4 MFC set to  0.000000
6/15/2010	7:51:16 PM	Bypass solenoid MFC set to  0.000000
6/15/2010	7:51:16 PM	Tube furnace set to 0
6/15/2010	7:56:16 PM	Helium valve closed
6/15/2010	7:56:16 PM	H2 valve closed
6/15/2010	7:56:16 PM	BCl3 valve closed
6/15/2010	7:56:16 PM	PH3 valve closed
6/15/2010	7:56:16 PM	SiCl4 pre valve closed
6/15/2010	7:56:16 PM	SiCl4 post valve closed
6/15/2010	7:56:16 PM	Bubbler valve closed
6/15/2010	7:56:16 PM	Main Vac valve opened
6/15/2010	7:56:16 PM	Bypass valve opened
6/15/2010	7:56:16 PM	Helium MFC set to  0.000000
6/15/2010	7:56:16 PM	H2 MFC set to  0.000000
6/15/2010	7:56:16 PM	BCl3 MFC set to  0.000000
6/15/2010	7:56:16 PM	PHl3 MFC set to  0.000000
6/15/2010	7:56:16 PM	SiCl4 MFC set to  0.000000
6/15/2010	7:56:17 PM	Bypass solenoid MFC set to  0.000000
6/15/2010	7:56:17 PM	Tube furnace set to 0
6/15/2010	7:56:18 PM	Run finished at 7:56 PM
6/15/2010	7:56:18 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
6/15/2010	8:04:37 PM	Recipe started at 8:04 PM
6/15/2010	8:04:37 PM	Helium valve closed
6/15/2010	8:04:37 PM	BCl3 valve closed
6/15/2010	8:04:37 PM	PH3 valve closed
6/15/2010	8:04:37 PM	SiCl4 pre valve closed
6/15/2010	8:04:37 PM	SiCl4 post valve closed
6/15/2010	8:04:37 PM	Main Vac valve closed
6/15/2010	8:04:37 PM	Bypass valve closed
6/15/2010	8:04:37 PM	Bubbler valve closed
6/15/2010	8:04:37 PM	H2 valve opened
6/15/2010	8:04:37 PM	Helium MFC set to  0.000000
6/15/2010	8:04:37 PM	H2 MFC set to  500.000000
6/15/2010	8:04:37 PM	BCl3 MFC set to  0.000000
6/15/2010	8:04:37 PM	PHl3 MFC set to  0.000000
6/15/2010	8:04:37 PM	SiCl4 MFC set to  0.000000
6/15/2010	8:04:37 PM	Bypass solenoid MFC set to  0.000000
6/15/2010	8:04:37 PM	Tube furnace set to 0
6/15/2010	8:05:59 PM	Helium valve closed
6/15/2010	8:05:59 PM	BCl3 valve closed
6/15/2010	8:05:59 PM	PH3 valve closed
6/15/2010	8:05:59 PM	SiCl4 pre valve closed
6/15/2010	8:05:59 PM	SiCl4 post valve closed
6/15/2010	8:05:59 PM	Main Vac valve closed
6/15/2010	8:05:59 PM	Bypass valve closed
6/15/2010	8:05:59 PM	H2 valve opened
6/15/2010	8:05:59 PM	Bubbler valve opened
6/15/2010	8:05:59 PM	Helium MFC set to  0.000000
6/15/2010	8:05:59 PM	H2 MFC set to  500.000000
6/15/2010	8:05:59 PM	BCl3 MFC set to  0.000000
6/15/2010	8:05:59 PM	PHl3 MFC set to  0.000000
6/15/2010	8:05:59 PM	SiCl4 MFC set to  0.000000
6/15/2010	8:05:59 PM	Bypass solenoid MFC set to  0.000000
6/15/2010	8:05:59 PM	Tube furnace set to 1000
6/15/2010	8:25:59 PM	Helium valve closed
6/15/2010	8:25:59 PM	PH3 valve closed
6/15/2010	8:25:59 PM	Main Vac valve closed
6/15/2010	8:25:59 PM	Bypass valve closed
6/15/2010	8:25:59 PM	H2 valve opened
6/15/2010	8:25:59 PM	BCl3 valve opened
6/15/2010	8:25:59 PM	SiCl4 pre valve opened
6/15/2010	8:25:59 PM	SiCl4 post valve opened
6/15/2010	8:25:59 PM	Bubbler valve opened
6/15/2010	8:25:59 PM	Helium MFC set to  0.000000
6/15/2010	8:25:59 PM	H2 MFC set to  500.000000
6/15/2010	8:25:59 PM	BCl3 MFC set to  12.000000
6/15/2010	8:25:59 PM	PHl3 MFC set to  0.000000
6/15/2010	8:25:59 PM	SiCl4 MFC set to  50.000000
6/15/2010	8:25:59 PM	Bypass solenoid MFC set to  0.000000
6/15/2010	8:25:59 PM	Tube furnace set to 1000
6/15/2010	8:40:59 PM	H2 valve closed
6/15/2010	8:40:59 PM	BCl3 valve closed
6/15/2010	8:40:59 PM	PH3 valve closed
6/15/2010	8:40:59 PM	SiCl4 pre valve closed
6/15/2010	8:40:59 PM	SiCl4 post valve closed
6/15/2010	8:40:59 PM	Main Vac valve closed
6/15/2010	8:40:59 PM	Bypass valve closed
6/15/2010	8:40:59 PM	Helium valve opened
6/15/2010	8:40:59 PM	Bubbler valve opened
6/15/2010	8:40:59 PM	Helium MFC set to  500.000000
6/15/2010	8:40:59 PM	H2 MFC set to  0.000000
6/15/2010	8:40:59 PM	BCl3 MFC set to  0.000000
6/15/2010	8:40:59 PM	PHl3 MFC set to  0.000000
6/15/2010	8:40:59 PM	SiCl4 MFC set to  0.000000
6/15/2010	8:40:59 PM	Bypass solenoid MFC set to  0.000000
6/15/2010	8:40:59 PM	Tube furnace set to 0
6/15/2010	9:00:59 PM	Helium valve closed
6/15/2010	9:00:59 PM	H2 valve closed
6/15/2010	9:00:59 PM	BCl3 valve closed
6/15/2010	9:00:59 PM	PH3 valve closed
6/15/2010	9:00:59 PM	SiCl4 pre valve closed
6/15/2010	9:00:59 PM	SiCl4 post valve closed
6/15/2010	9:00:59 PM	Main Vac valve closed
6/15/2010	9:00:59 PM	Bypass valve closed
6/15/2010	9:00:59 PM	Bubbler valve closed
6/15/2010	9:00:59 PM	Helium MFC set to  0.000000
6/15/2010	9:00:59 PM	H2 MFC set to  0.000000
6/15/2010	9:00:59 PM	BCl3 MFC set to  0.000000
6/15/2010	9:00:59 PM	PHl3 MFC set to  0.000000
6/15/2010	9:00:59 PM	SiCl4 MFC set to  0.000000
6/15/2010	9:00:59 PM	Bypass solenoid MFC set to  0.000000
6/15/2010	9:00:59 PM	Tube furnace set to 0
6/15/2010	9:00:59 PM	Run finished at 9:00 PM
6/15/2010	9:08:37 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/15/2010	9:08:37 PM	Recipe started at 9:08 PM
6/15/2010	9:08:37 PM	H2 valve closed
6/15/2010	9:08:37 PM	BCl3 valve closed
6/15/2010	9:08:37 PM	PH3 valve closed
6/15/2010	9:08:37 PM	SiCl4 pre valve closed
6/15/2010	9:08:37 PM	SiCl4 post valve closed
6/15/2010	9:08:37 PM	Main Vac valve closed
6/15/2010	9:08:37 PM	Bypass valve closed
6/15/2010	9:08:37 PM	Bubbler valve closed
6/15/2010	9:08:37 PM	Helium valve opened
6/15/2010	9:08:37 PM	Helium MFC set to  500.000000
6/15/2010	9:08:37 PM	H2 MFC set to  0.000000
6/15/2010	9:08:37 PM	BCl3 MFC set to  0.000000
6/15/2010	9:08:37 PM	PHl3 MFC set to  0.000000
6/15/2010	9:08:37 PM	SiCl4 MFC set to  0.000000
6/15/2010	9:08:37 PM	Bypass solenoid MFC set to  0.000000
6/15/2010	9:08:37 PM	Tube furnace set to 0
6/15/2010	9:08:40 PM	Helium valve closed
6/15/2010	9:08:40 PM	H2 valve closed
6/15/2010	9:08:40 PM	BCl3 valve closed
6/15/2010	9:08:40 PM	PH3 valve closed
6/15/2010	9:08:40 PM	SiCl4 pre valve closed
6/15/2010	9:08:40 PM	SiCl4 post valve closed
6/15/2010	9:08:40 PM	Main Vac valve closed
6/15/2010	9:08:40 PM	Bypass valve closed
6/15/2010	9:08:40 PM	Bubbler valve closed
6/15/2010	9:08:40 PM	Helium MFC set to  0.000000
6/15/2010	9:08:41 PM	H2 MFC set to  0.000000
6/15/2010	9:08:41 PM	BCl3 MFC set to  0.000000
6/15/2010	9:08:41 PM	PHl3 MFC set to  0.000000
6/15/2010	9:08:41 PM	SiCl4 MFC set to  0.000000
6/15/2010	9:08:41 PM	Bypass solenoid MFC set to  0.000000
6/15/2010	9:08:41 PM	Tube furnace set to 0
6/15/2010	9:08:41 PM	Run finished at 9:08 PM
6/15/2010	9:08:41 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/15/2010	9:17:06 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/15/2010	9:17:06 PM	Recipe started at 9:17 PM
6/15/2010	9:17:06 PM	Helium valve closed
6/15/2010	9:17:06 PM	H2 valve closed
6/15/2010	9:17:06 PM	BCl3 valve closed
6/15/2010	9:17:06 PM	PH3 valve closed
6/15/2010	9:17:06 PM	SiCl4 pre valve closed
6/15/2010	9:17:06 PM	SiCl4 post valve closed
6/15/2010	9:17:06 PM	Main Vac valve closed
6/15/2010	9:17:06 PM	Bubbler valve closed
6/15/2010	9:17:06 PM	Bypass valve opened
6/15/2010	9:17:06 PM	Helium MFC set to  0.000000
6/15/2010	9:17:06 PM	H2 MFC set to  0.000000
6/15/2010	9:17:06 PM	BCl3 MFC set to  0.000000
6/15/2010	9:17:06 PM	PHl3 MFC set to  0.000000
6/15/2010	9:17:06 PM	SiCl4 MFC set to  0.000000
6/15/2010	9:17:06 PM	Bypass solenoid MFC set to  0.000000
6/15/2010	9:17:07 PM	Tube furnace set to 0
6/15/2010	9:17:55 PM	Helium valve closed
6/15/2010	9:17:55 PM	H2 valve closed
6/15/2010	9:17:55 PM	BCl3 valve closed
6/15/2010	9:17:55 PM	PH3 valve closed
6/15/2010	9:17:55 PM	SiCl4 pre valve closed
6/15/2010	9:17:55 PM	SiCl4 post valve closed
6/15/2010	9:17:55 PM	Bubbler valve closed
6/15/2010	9:17:55 PM	Main Vac valve opened
6/15/2010	9:17:55 PM	Bypass valve opened
6/15/2010	9:17:55 PM	Helium MFC set to  0.000000
6/15/2010	9:17:55 PM	H2 MFC set to  0.000000
6/15/2010	9:17:55 PM	BCl3 MFC set to  0.000000
6/15/2010	9:17:55 PM	PHl3 MFC set to  0.000000
6/15/2010	9:17:55 PM	SiCl4 MFC set to  0.000000
6/15/2010	9:17:55 PM	Bypass solenoid MFC set to  0.000000
6/15/2010	9:17:55 PM	Tube furnace set to 0
6/15/2010	9:17:55 PM	Run finished at 9:17 PM
6/15/2010	9:17:55 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/15/2010	9:17:59 PM	Helium MFC set to  100.000000
6/15/2010	9:18:01 PM	Helium valve opened
6/15/2010	9:37:30 PM	Helium valve closed
6/15/2010	9:37:33 PM	Helium MFC set to  0.000000
6/15/2010	9:37:55 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
6/15/2010	9:38:00 PM	Recipe started at 9:37 PM
6/15/2010	9:38:00 PM	H2 valve closed
6/15/2010	9:38:00 PM	BCl3 valve closed
6/15/2010	9:38:00 PM	PH3 valve closed
6/15/2010	9:38:00 PM	SiCl4 pre valve closed
6/15/2010	9:38:00 PM	SiCl4 post valve closed
6/15/2010	9:38:00 PM	Main Vac valve closed
6/15/2010	9:38:00 PM	Bypass valve closed
6/15/2010	9:38:00 PM	Bubbler valve closed
6/15/2010	9:38:00 PM	Helium valve opened
6/15/2010	9:38:00 PM	Helium MFC set to  500.000000
6/15/2010	9:38:00 PM	H2 MFC set to  0.000000
6/15/2010	9:38:00 PM	BCl3 MFC set to  0.000000
6/15/2010	9:38:00 PM	PHl3 MFC set to  0.000000
6/15/2010	9:38:00 PM	SiCl4 MFC set to  0.000000
6/15/2010	9:38:00 PM	Bypass solenoid MFC set to  0.000000
6/15/2010	9:38:00 PM	Tube furnace set to 0
6/15/2010	9:39:21 PM	Helium valve closed
6/15/2010	9:39:21 PM	H2 valve closed
6/15/2010	9:39:21 PM	BCl3 valve closed
6/15/2010	9:39:21 PM	PH3 valve closed
6/15/2010	9:39:21 PM	SiCl4 pre valve closed
6/15/2010	9:39:21 PM	SiCl4 post valve closed
6/15/2010	9:39:21 PM	Main Vac valve closed
6/15/2010	9:39:21 PM	Bypass valve closed
6/15/2010	9:39:21 PM	Bubbler valve closed
6/15/2010	9:39:21 PM	Helium MFC set to  0.000000
6/15/2010	9:39:21 PM	H2 MFC set to  0.000000
6/15/2010	9:39:21 PM	BCl3 MFC set to  0.000000
6/15/2010	9:39:21 PM	PHl3 MFC set to  0.000000
6/15/2010	9:39:21 PM	SiCl4 MFC set to  0.000000
6/15/2010	9:39:21 PM	Bypass solenoid MFC set to  0.000000
6/15/2010	9:39:21 PM	Tube furnace set to 0
6/15/2010	9:39:36 PM	Helium valve closed
6/15/2010	9:39:36 PM	H2 valve closed
6/15/2010	9:39:36 PM	BCl3 valve closed
6/15/2010	9:39:36 PM	PH3 valve closed
6/15/2010	9:39:36 PM	SiCl4 pre valve closed
6/15/2010	9:39:36 PM	SiCl4 post valve closed
6/15/2010	9:39:36 PM	Main Vac valve closed
6/15/2010	9:39:36 PM	Bubbler valve closed
6/15/2010	9:39:36 PM	Bypass valve opened
6/15/2010	9:39:36 PM	Helium MFC set to  0.000000
6/15/2010	9:39:36 PM	H2 MFC set to  0.000000
6/15/2010	9:39:36 PM	BCl3 MFC set to  0.000000
6/15/2010	9:39:36 PM	PHl3 MFC set to  0.000000
6/15/2010	9:39:36 PM	SiCl4 MFC set to  0.000000
6/15/2010	9:39:36 PM	Bypass solenoid MFC set to  0.000000
6/15/2010	9:39:36 PM	Tube furnace set to 0
6/15/2010	9:40:09 PM	Helium valve closed
6/15/2010	9:40:09 PM	H2 valve closed
6/15/2010	9:40:09 PM	BCl3 valve closed
6/15/2010	9:40:09 PM	PH3 valve closed
6/15/2010	9:40:09 PM	SiCl4 pre valve closed
6/15/2010	9:40:09 PM	SiCl4 post valve closed
6/15/2010	9:40:09 PM	Bubbler valve closed
6/15/2010	9:40:09 PM	Main Vac valve opened
6/15/2010	9:40:09 PM	Bypass valve opened
6/15/2010	9:40:09 PM	Helium MFC set to  0.000000
6/15/2010	9:40:10 PM	H2 MFC set to  0.000000
6/15/2010	9:40:10 PM	BCl3 MFC set to  0.000000
6/15/2010	9:40:10 PM	PHl3 MFC set to  0.000000
6/15/2010	9:40:10 PM	SiCl4 MFC set to  0.000000
6/15/2010	9:40:10 PM	Bypass solenoid MFC set to  0.000000
6/15/2010	9:40:10 PM	Tube furnace set to 0
6/15/2010	9:45:10 PM	H2 valve closed
6/15/2010	9:45:10 PM	BCl3 valve closed
6/15/2010	9:45:10 PM	PH3 valve closed
6/15/2010	9:45:10 PM	SiCl4 pre valve closed
6/15/2010	9:45:10 PM	SiCl4 post valve closed
6/15/2010	9:45:10 PM	Main Vac valve closed
6/15/2010	9:45:10 PM	Bypass valve closed
6/15/2010	9:45:10 PM	Bubbler valve closed
6/15/2010	9:45:10 PM	Helium valve opened
6/15/2010	9:45:10 PM	Helium MFC set to  500.000000
6/15/2010	9:45:10 PM	H2 MFC set to  0.000000
6/15/2010	9:45:10 PM	BCl3 MFC set to  0.000000
6/15/2010	9:45:10 PM	PHl3 MFC set to  0.000000
6/15/2010	9:45:10 PM	SiCl4 MFC set to  0.000000
6/15/2010	9:45:10 PM	Bypass solenoid MFC set to  0.000000
6/15/2010	9:45:10 PM	Tube furnace set to 0
6/15/2010	9:46:29 PM	Helium valve closed
6/15/2010	9:46:29 PM	H2 valve closed
6/15/2010	9:46:29 PM	BCl3 valve closed
6/15/2010	9:46:29 PM	PH3 valve closed
6/15/2010	9:46:29 PM	SiCl4 pre valve closed
6/15/2010	9:46:29 PM	SiCl4 post valve closed
6/15/2010	9:46:29 PM	Main Vac valve closed
6/15/2010	9:46:29 PM	Bypass valve closed
6/15/2010	9:46:29 PM	Bubbler valve closed
6/15/2010	9:46:29 PM	Helium MFC set to  0.000000
6/15/2010	9:46:29 PM	H2 MFC set to  0.000000
6/15/2010	9:46:29 PM	BCl3 MFC set to  0.000000
6/15/2010	9:46:29 PM	PHl3 MFC set to  0.000000
6/15/2010	9:46:29 PM	SiCl4 MFC set to  0.000000
6/15/2010	9:46:29 PM	Bypass solenoid MFC set to  0.000000
6/15/2010	9:46:29 PM	Tube furnace set to 0
6/15/2010	9:46:44 PM	Helium valve closed
6/15/2010	9:46:44 PM	H2 valve closed
6/15/2010	9:46:44 PM	BCl3 valve closed
6/15/2010	9:46:44 PM	PH3 valve closed
6/15/2010	9:46:44 PM	SiCl4 pre valve closed
6/15/2010	9:46:44 PM	SiCl4 post valve closed
6/15/2010	9:46:44 PM	Main Vac valve closed
6/15/2010	9:46:44 PM	Bubbler valve closed
6/15/2010	9:46:44 PM	Bypass valve opened
6/15/2010	9:46:44 PM	Helium MFC set to  0.000000
6/15/2010	9:46:44 PM	H2 MFC set to  0.000000
6/15/2010	9:46:44 PM	BCl3 MFC set to  0.000000
6/15/2010	9:46:44 PM	PHl3 MFC set to  0.000000
6/15/2010	9:46:44 PM	SiCl4 MFC set to  0.000000
6/15/2010	9:46:44 PM	Bypass solenoid MFC set to  0.000000
6/15/2010	9:46:44 PM	Tube furnace set to 0
6/15/2010	9:47:17 PM	Helium valve closed
6/15/2010	9:47:17 PM	H2 valve closed
6/15/2010	9:47:17 PM	BCl3 valve closed
6/15/2010	9:47:17 PM	PH3 valve closed
6/15/2010	9:47:17 PM	SiCl4 pre valve closed
6/15/2010	9:47:17 PM	SiCl4 post valve closed
6/15/2010	9:47:17 PM	Bubbler valve closed
6/15/2010	9:47:17 PM	Main Vac valve opened
6/15/2010	9:47:17 PM	Bypass valve opened
6/15/2010	9:47:17 PM	Helium MFC set to  0.000000
6/15/2010	9:47:17 PM	H2 MFC set to  0.000000
6/15/2010	9:47:17 PM	BCl3 MFC set to  0.000000
6/15/2010	9:47:17 PM	PHl3 MFC set to  0.000000
6/15/2010	9:47:17 PM	SiCl4 MFC set to  0.000000
6/15/2010	9:47:17 PM	Bypass solenoid MFC set to  0.000000
6/15/2010	9:47:17 PM	Tube furnace set to 0
6/15/2010	9:52:17 PM	H2 valve closed
6/15/2010	9:52:17 PM	BCl3 valve closed
6/15/2010	9:52:17 PM	PH3 valve closed
6/15/2010	9:52:17 PM	SiCl4 pre valve closed
6/15/2010	9:52:17 PM	SiCl4 post valve closed
6/15/2010	9:52:17 PM	Main Vac valve closed
6/15/2010	9:52:17 PM	Bypass valve closed
6/15/2010	9:52:17 PM	Bubbler valve closed
6/15/2010	9:52:17 PM	Helium valve opened
6/15/2010	9:52:17 PM	Helium MFC set to  500.000000
6/15/2010	9:52:17 PM	H2 MFC set to  0.000000
6/15/2010	9:52:17 PM	BCl3 MFC set to  0.000000
6/15/2010	9:52:17 PM	PHl3 MFC set to  0.000000
6/15/2010	9:52:17 PM	SiCl4 MFC set to  0.000000
6/15/2010	9:52:17 PM	Bypass solenoid MFC set to  0.000000
6/15/2010	9:52:18 PM	Tube furnace set to 0
6/15/2010	9:53:36 PM	Helium valve closed
6/15/2010	9:53:36 PM	H2 valve closed
6/15/2010	9:53:36 PM	BCl3 valve closed
6/15/2010	9:53:36 PM	PH3 valve closed
6/15/2010	9:53:36 PM	SiCl4 pre valve closed
6/15/2010	9:53:36 PM	SiCl4 post valve closed
6/15/2010	9:53:36 PM	Main Vac valve closed
6/15/2010	9:53:36 PM	Bypass valve closed
6/15/2010	9:53:36 PM	Bubbler valve closed
6/15/2010	9:53:36 PM	Helium MFC set to  0.000000
6/15/2010	9:53:36 PM	H2 MFC set to  0.000000
6/15/2010	9:53:36 PM	BCl3 MFC set to  0.000000
6/15/2010	9:53:36 PM	PHl3 MFC set to  0.000000
6/15/2010	9:53:36 PM	SiCl4 MFC set to  0.000000
6/15/2010	9:53:36 PM	Bypass solenoid MFC set to  0.000000
6/15/2010	9:53:37 PM	Tube furnace set to 0
6/15/2010	9:53:52 PM	Helium valve closed
6/15/2010	9:53:52 PM	H2 valve closed
6/15/2010	9:53:52 PM	BCl3 valve closed
6/15/2010	9:53:52 PM	PH3 valve closed
6/15/2010	9:53:52 PM	SiCl4 pre valve closed
6/15/2010	9:53:52 PM	SiCl4 post valve closed
6/15/2010	9:53:52 PM	Main Vac valve closed
6/15/2010	9:53:52 PM	Bubbler valve closed
6/15/2010	9:53:52 PM	Bypass valve opened
6/15/2010	9:53:52 PM	Helium MFC set to  0.000000
6/15/2010	9:53:52 PM	H2 MFC set to  0.000000
6/15/2010	9:53:52 PM	BCl3 MFC set to  0.000000
6/15/2010	9:53:52 PM	PHl3 MFC set to  0.000000
6/15/2010	9:53:52 PM	SiCl4 MFC set to  0.000000
6/15/2010	9:53:52 PM	Bypass solenoid MFC set to  0.000000
6/15/2010	9:53:52 PM	Tube furnace set to 0
6/15/2010	9:54:24 PM	Helium valve closed
6/15/2010	9:54:24 PM	H2 valve closed
6/15/2010	9:54:24 PM	BCl3 valve closed
6/15/2010	9:54:24 PM	PH3 valve closed
6/15/2010	9:54:24 PM	SiCl4 pre valve closed
6/15/2010	9:54:24 PM	SiCl4 post valve closed
6/15/2010	9:54:24 PM	Bubbler valve closed
6/15/2010	9:54:24 PM	Main Vac valve opened
6/15/2010	9:54:24 PM	Bypass valve opened
6/15/2010	9:54:24 PM	Helium MFC set to  0.000000
6/15/2010	9:54:24 PM	H2 MFC set to  0.000000
6/15/2010	9:54:24 PM	BCl3 MFC set to  0.000000
6/15/2010	9:54:24 PM	PHl3 MFC set to  0.000000
6/15/2010	9:54:24 PM	SiCl4 MFC set to  0.000000
6/15/2010	9:54:24 PM	Bypass solenoid MFC set to  0.000000
6/15/2010	9:54:24 PM	Tube furnace set to 0
6/15/2010	9:59:24 PM	Helium valve closed
6/15/2010	9:59:24 PM	H2 valve closed
6/15/2010	9:59:24 PM	BCl3 valve closed
6/15/2010	9:59:24 PM	PH3 valve closed
6/15/2010	9:59:24 PM	SiCl4 pre valve closed
6/15/2010	9:59:24 PM	SiCl4 post valve closed
6/15/2010	9:59:24 PM	Bubbler valve closed
6/15/2010	9:59:24 PM	Main Vac valve opened
6/15/2010	9:59:24 PM	Bypass valve opened
6/15/2010	9:59:24 PM	Helium MFC set to  0.000000
6/15/2010	9:59:24 PM	H2 MFC set to  0.000000
6/15/2010	9:59:24 PM	BCl3 MFC set to  0.000000
6/15/2010	9:59:24 PM	PHl3 MFC set to  0.000000
6/15/2010	9:59:24 PM	SiCl4 MFC set to  0.000000
6/15/2010	9:59:24 PM	Bypass solenoid MFC set to  0.000000
6/15/2010	9:59:25 PM	Tube furnace set to 0
6/15/2010	9:59:26 PM	Run finished at 9:59 PM
6/15/2010	9:59:26 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
6/15/2010	10:01:25 PM	Helium MFC set to  100.000000
6/15/2010	10:01:26 PM	Helium valve opened
6/15/2010	10:13:39 PM	Helium valve closed
6/15/2010	10:13:41 PM	Helium MFC set to  0.000000
6/15/2010	10:21:13 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
6/15/2010	10:21:13 PM	Recipe started at 10:21 PM
6/15/2010	10:21:13 PM	Helium valve closed
6/15/2010	10:21:13 PM	H2 valve closed
6/15/2010	10:21:13 PM	BCl3 valve closed
6/15/2010	10:21:13 PM	PH3 valve closed
6/15/2010	10:21:13 PM	SiCl4 pre valve closed
6/15/2010	10:21:13 PM	SiCl4 post valve closed
6/15/2010	10:21:13 PM	Main Vac valve closed
6/15/2010	10:21:13 PM	Bypass valve closed
6/15/2010	10:21:13 PM	Bubbler valve closed
6/15/2010	10:21:13 PM	Helium MFC set to  0.000000
6/15/2010	10:21:13 PM	H2 MFC set to  0.000000
6/15/2010	10:21:13 PM	BCl3 MFC set to  0.000000
6/15/2010	10:21:13 PM	PHl3 MFC set to  0.000000
6/15/2010	10:21:13 PM	SiCl4 MFC set to  0.000000
6/15/2010	10:21:13 PM	Bypass solenoid MFC set to  0.000000
6/15/2010	10:21:13 PM	Tube furnace set to 0
6/15/2010	10:21:14 PM	Run finished at 10:21 PM
6/15/2010	10:21:14 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
6/15/2010	10:22:26 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/15/2010	10:22:26 PM	Recipe started at 10:22 PM
6/15/2010	10:22:26 PM	Helium valve closed
6/15/2010	10:22:26 PM	H2 valve closed
6/15/2010	10:22:26 PM	BCl3 valve closed
6/15/2010	10:22:26 PM	PH3 valve closed
6/15/2010	10:22:26 PM	SiCl4 pre valve closed
6/15/2010	10:22:26 PM	SiCl4 post valve closed
6/15/2010	10:22:26 PM	Main Vac valve closed
6/15/2010	10:22:26 PM	Bubbler valve closed
6/15/2010	10:22:26 PM	Bypass valve opened
6/15/2010	10:22:26 PM	Helium MFC set to  0.000000
6/15/2010	10:22:26 PM	H2 MFC set to  0.000000
6/15/2010	10:22:26 PM	BCl3 MFC set to  0.000000
6/15/2010	10:22:26 PM	PHl3 MFC set to  0.000000
6/15/2010	10:22:26 PM	SiCl4 MFC set to  0.000000
6/15/2010	10:22:26 PM	Bypass solenoid MFC set to  0.000000
6/15/2010	10:22:26 PM	Tube furnace set to 0
6/15/2010	10:22:27 PM	Helium valve closed
6/15/2010	10:22:27 PM	H2 valve closed
6/15/2010	10:22:27 PM	BCl3 valve closed
6/15/2010	10:22:27 PM	PH3 valve closed
6/15/2010	10:22:27 PM	SiCl4 pre valve closed
6/15/2010	10:22:27 PM	SiCl4 post valve closed
6/15/2010	10:22:27 PM	Bubbler valve closed
6/15/2010	10:22:27 PM	Main Vac valve opened
6/15/2010	10:22:27 PM	Bypass valve opened
6/15/2010	10:22:27 PM	Helium MFC set to  0.000000
6/15/2010	10:22:27 PM	H2 MFC set to  0.000000
6/15/2010	10:22:27 PM	BCl3 MFC set to  0.000000
6/15/2010	10:22:27 PM	PHl3 MFC set to  0.000000
6/15/2010	10:22:27 PM	SiCl4 MFC set to  0.000000
6/15/2010	10:22:27 PM	Bypass solenoid MFC set to  0.000000
6/15/2010	10:22:27 PM	Tube furnace set to 0
6/15/2010	10:22:27 PM	Run finished at 10:22 PM
6/15/2010	10:22:27 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/15/2010	10:22:40 PM	Recipe started at 10:22 PM
6/15/2010	10:22:40 PM	Helium valve closed
6/15/2010	10:22:40 PM	BCl3 valve closed
6/15/2010	10:22:40 PM	PH3 valve closed
6/15/2010	10:22:40 PM	SiCl4 pre valve closed
6/15/2010	10:22:40 PM	SiCl4 post valve closed
6/15/2010	10:22:40 PM	Main Vac valve closed
6/15/2010	10:22:40 PM	Bypass valve closed
6/15/2010	10:22:40 PM	Bubbler valve closed
6/15/2010	10:22:40 PM	H2 valve opened
6/15/2010	10:22:40 PM	Helium MFC set to  0.000000
6/15/2010	10:22:40 PM	H2 MFC set to  500.000000
6/15/2010	10:22:40 PM	BCl3 MFC set to  0.000000
6/15/2010	10:22:40 PM	PHl3 MFC set to  0.000000
6/15/2010	10:22:40 PM	SiCl4 MFC set to  0.000000
6/15/2010	10:22:40 PM	Bypass solenoid MFC set to  0.000000
6/15/2010	10:22:41 PM	Tube furnace set to 0
6/15/2010	10:24:00 PM	Helium valve closed
6/15/2010	10:24:00 PM	BCl3 valve closed
6/15/2010	10:24:00 PM	PH3 valve closed
6/15/2010	10:24:00 PM	SiCl4 pre valve closed
6/15/2010	10:24:00 PM	SiCl4 post valve closed
6/15/2010	10:24:00 PM	Main Vac valve closed
6/15/2010	10:24:00 PM	Bypass valve closed
6/15/2010	10:24:00 PM	H2 valve opened
6/15/2010	10:24:00 PM	Bubbler valve opened
6/15/2010	10:24:00 PM	Helium MFC set to  0.000000
6/15/2010	10:24:00 PM	H2 MFC set to  500.000000
6/15/2010	10:24:00 PM	BCl3 MFC set to  0.000000
6/15/2010	10:24:00 PM	PHl3 MFC set to  0.000000
6/15/2010	10:24:00 PM	SiCl4 MFC set to  0.000000
6/15/2010	10:24:00 PM	Bypass solenoid MFC set to  0.000000
6/15/2010	10:24:00 PM	Tube furnace set to 1000
6/15/2010	10:44:00 PM	Helium valve closed
6/15/2010	10:44:00 PM	PH3 valve closed
6/15/2010	10:44:00 PM	Main Vac valve closed
6/15/2010	10:44:00 PM	Bypass valve closed
6/15/2010	10:44:00 PM	H2 valve opened
6/15/2010	10:44:00 PM	BCl3 valve opened
6/15/2010	10:44:00 PM	SiCl4 pre valve opened
6/15/2010	10:44:00 PM	SiCl4 post valve opened
6/15/2010	10:44:00 PM	Bubbler valve opened
6/15/2010	10:44:00 PM	Helium MFC set to  0.000000
6/15/2010	10:44:00 PM	H2 MFC set to  500.000000
6/15/2010	10:44:00 PM	BCl3 MFC set to  12.000000
6/15/2010	10:44:00 PM	PHl3 MFC set to  0.000000
6/15/2010	10:44:00 PM	SiCl4 MFC set to  50.000000
6/15/2010	10:44:00 PM	Bypass solenoid MFC set to  0.000000
6/15/2010	10:44:00 PM	Tube furnace set to 1000
6/15/2010	10:59:00 PM	H2 valve closed
6/15/2010	10:59:00 PM	BCl3 valve closed
6/15/2010	10:59:00 PM	PH3 valve closed
6/15/2010	10:59:00 PM	SiCl4 pre valve closed
6/15/2010	10:59:00 PM	SiCl4 post valve closed
6/15/2010	10:59:00 PM	Main Vac valve closed
6/15/2010	10:59:00 PM	Bypass valve closed
6/15/2010	10:59:00 PM	Helium valve opened
6/15/2010	10:59:00 PM	Bubbler valve opened
6/15/2010	10:59:00 PM	Helium MFC set to  500.000000
6/15/2010	10:59:00 PM	H2 MFC set to  0.000000
6/15/2010	10:59:00 PM	BCl3 MFC set to  0.000000
6/15/2010	10:59:00 PM	PHl3 MFC set to  0.000000
6/15/2010	10:59:00 PM	SiCl4 MFC set to  0.000000
6/15/2010	10:59:00 PM	Bypass solenoid MFC set to  0.000000
6/15/2010	10:59:00 PM	Tube furnace set to 0
6/15/2010	11:19:00 PM	Helium valve closed
6/15/2010	11:19:00 PM	H2 valve closed
6/15/2010	11:19:00 PM	BCl3 valve closed
6/15/2010	11:19:00 PM	PH3 valve closed
6/15/2010	11:19:00 PM	SiCl4 pre valve closed
6/15/2010	11:19:00 PM	SiCl4 post valve closed
6/15/2010	11:19:00 PM	Main Vac valve closed
6/15/2010	11:19:00 PM	Bypass valve closed
6/15/2010	11:19:00 PM	Bubbler valve closed
6/15/2010	11:19:00 PM	Helium MFC set to  0.000000
6/15/2010	11:19:00 PM	H2 MFC set to  0.000000
6/15/2010	11:19:00 PM	BCl3 MFC set to  0.000000
6/15/2010	11:19:00 PM	PHl3 MFC set to  0.000000
6/15/2010	11:19:00 PM	SiCl4 MFC set to  0.000000
6/15/2010	11:19:00 PM	Bypass solenoid MFC set to  0.000000
6/15/2010	11:19:01 PM	Tube furnace set to 0
6/15/2010	11:19:01 PM	Run finished at 11:19 PM
6/15/2010	11:28:25 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/15/2010	11:28:25 PM	Recipe started at 11:28 PM
6/15/2010	11:28:25 PM	H2 valve closed
6/15/2010	11:28:25 PM	BCl3 valve closed
6/15/2010	11:28:25 PM	PH3 valve closed
6/15/2010	11:28:25 PM	SiCl4 pre valve closed
6/15/2010	11:28:25 PM	SiCl4 post valve closed
6/15/2010	11:28:25 PM	Main Vac valve closed
6/15/2010	11:28:25 PM	Bypass valve closed
6/15/2010	11:28:25 PM	Bubbler valve closed
6/15/2010	11:28:25 PM	Helium valve opened
6/15/2010	11:28:25 PM	Helium MFC set to  500.000000
6/15/2010	11:28:25 PM	H2 MFC set to  0.000000
6/15/2010	11:28:25 PM	BCl3 MFC set to  0.000000
6/15/2010	11:28:25 PM	PHl3 MFC set to  0.000000
6/15/2010	11:28:25 PM	SiCl4 MFC set to  0.000000
6/15/2010	11:28:25 PM	Bypass solenoid MFC set to  0.000000
6/15/2010	11:28:25 PM	Tube furnace set to 0
6/15/2010	11:28:30 PM	Helium valve closed
6/15/2010	11:28:30 PM	H2 valve closed
6/15/2010	11:28:30 PM	BCl3 valve closed
6/15/2010	11:28:30 PM	PH3 valve closed
6/15/2010	11:28:30 PM	SiCl4 pre valve closed
6/15/2010	11:28:30 PM	SiCl4 post valve closed
6/15/2010	11:28:30 PM	Main Vac valve closed
6/15/2010	11:28:30 PM	Bypass valve closed
6/15/2010	11:28:30 PM	Bubbler valve closed
6/15/2010	11:28:30 PM	Helium MFC set to  0.000000
6/15/2010	11:28:30 PM	H2 MFC set to  0.000000
6/15/2010	11:28:30 PM	BCl3 MFC set to  0.000000
6/15/2010	11:28:30 PM	PHl3 MFC set to  0.000000
6/15/2010	11:28:30 PM	SiCl4 MFC set to  0.000000
6/15/2010	11:28:30 PM	Bypass solenoid MFC set to  0.000000
6/15/2010	11:28:30 PM	Tube furnace set to 0
6/15/2010	11:28:31 PM	Run finished at 11:28 PM
6/15/2010	11:28:31 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/15/2010	11:31:11 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/15/2010	11:31:11 PM	Recipe started at 11:31 PM
6/15/2010	11:31:11 PM	Helium valve closed
6/15/2010	11:31:11 PM	H2 valve closed
6/15/2010	11:31:11 PM	BCl3 valve closed
6/15/2010	11:31:11 PM	PH3 valve closed
6/15/2010	11:31:11 PM	SiCl4 pre valve closed
6/15/2010	11:31:11 PM	SiCl4 post valve closed
6/15/2010	11:31:11 PM	Main Vac valve closed
6/15/2010	11:31:11 PM	Bubbler valve closed
6/15/2010	11:31:11 PM	Bypass valve opened
6/15/2010	11:31:11 PM	Helium MFC set to  0.000000
6/15/2010	11:31:11 PM	H2 MFC set to  0.000000
6/15/2010	11:31:11 PM	BCl3 MFC set to  0.000000
6/15/2010	11:31:11 PM	PHl3 MFC set to  0.000000
6/15/2010	11:31:11 PM	SiCl4 MFC set to  0.000000
6/15/2010	11:31:11 PM	Bypass solenoid MFC set to  0.000000
6/15/2010	11:31:12 PM	Tube furnace set to 0
6/15/2010	11:31:57 PM	Helium valve closed
6/15/2010	11:31:57 PM	H2 valve closed
6/15/2010	11:31:57 PM	BCl3 valve closed
6/15/2010	11:31:57 PM	PH3 valve closed
6/15/2010	11:31:57 PM	SiCl4 pre valve closed
6/15/2010	11:31:57 PM	SiCl4 post valve closed
6/15/2010	11:31:57 PM	Bubbler valve closed
6/15/2010	11:31:57 PM	Main Vac valve opened
6/15/2010	11:31:57 PM	Bypass valve opened
6/15/2010	11:31:57 PM	Helium MFC set to  0.000000
6/15/2010	11:31:57 PM	H2 MFC set to  0.000000
6/15/2010	11:31:57 PM	BCl3 MFC set to  0.000000
6/15/2010	11:31:57 PM	PHl3 MFC set to  0.000000
6/15/2010	11:31:57 PM	SiCl4 MFC set to  0.000000
6/15/2010	11:31:57 PM	Bypass solenoid MFC set to  0.000000
6/15/2010	11:31:57 PM	Tube furnace set to 0
6/15/2010	11:31:57 PM	Run finished at 11:31 PM
6/15/2010	11:31:57 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
